EXxx-OMZ0016

) 1 +COM(US2_24V) 2 n+1 2 n+1 3 -COM(US2_0V) 3 +COM(US2_24V) 4 n 4 n * -COM is connected to 0V (US2) and +COM to 24V (US2) inside the product as shown in the circuit diagram below.

Fieldbus system DeviceNet TM compatible SI unit

) 0 1 EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYE1 (24 outputs) 0 3 EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input unit EX600-AXA 4 (2 byte/1 channel) 0 (2 channels) (2 channels) 0 4 Analogue output unit EX600-AYA (2 byte/1 channel) Analogue I/O unit EX600-AMB 4 4 (2 channels/2 channels) (2 byte

air-filter-e

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

Air Preparation Equipment

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

60

AC/Class B (Built-in full-wave rectifier) 1 1 G N R VX02 1 1 G N VX02 Valve N.C. N.O. Model Valve Model Nil 2 1 2 3 VXK21ll VXK22ll VXK23ll 1 2 3 4 7 8 J Nil 2 1 2 3 VXK21ll VXK22ll VXK23ll N.C. N.O.

EXxx-OMU0020EN

Table. 5-10 Valve diagnostics 2 Bit Description Explanation 0 Valve 16, 17 diagnostics 0: Short circuit, 1: No error 1 Valve 18, 19 diagnostics 0: Short circuit, 1: No error 2 Valve 20, 21 diagnostics 0: Short circuit, 1: No error 3 Valve 22, 23 diagnostics 0: Short circuit, 1: No error 4 Valve 24, 25 diagnostics 0: Short circuit, 1: No error 5 Valve 26, 27 diagnostics 0: Short circuit, 1

Digital Flow Switch (Integrated display type)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Measurement diagnostics 0: Within range 1: Out of range (HHH/LLL) 14 Fixed output 0: Normal output 1: Fixed output 15 Error Diagnosis 0: Error not generated 1: Error generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow measurement value

EXxx-OMS0026CN

(8/8 ) 1 1 EX600-DMF (8/8 ) 1 1 EX600-AXA 4 (2 byte/1 ) 0 (2 ) EX600-AYA (2 ) 0 4 (2 byte/1 ) EX600-AMB 4 4 (2/2 ) (2 byte/1 ) (2 byte/1 ) -58No.EX-OMS0026CN 2 EX600 0 1 2 1 <1> 0 1 DYB SEN3 SI 4 byte 1 byte [0](EX600-DYB)1 byte [1]SI (EX600-SEN3)4 byte 0 Padding DYB(0) 07 Byte0 Byte1 07 Byte2 815 SEN3(1) Byte3 1623 Byte4 2431 Byte5 Padding 2 byte 6 byte 1 Byte0 byte0 DYB(0)

SI Unit for Vacuum Manifold

0 0 0 0 1 1 0 1 Select CH13 for PressureValueMonitoring 0 0 0 0 1 1 1 0 Select CH14 for PressureValueMonitoring 0 0 0 0 1 1 1 1 Select CH15 for PressureValueMonitoring -26No.EX-OMZ0018 4.2.2.

Magnetically Coupled

resin Special resin NBR Special resin NBR 1/4" 3/8" 5/8" 3/4" 1" 1-1/4" 1-1/2" 2" 2-1/2" 6 10 15 20 25 32 40 50 63 Zinc chromated Zinc chromated CY3B6-PS CY3B10-PS CY3B15-PS CY3B20-PS CY3B25-PS CY3B32-PS CY3B40-PS CY3B50-PS CY3B63-PS Numbers !

KJ

9.3 15.6 2.5 1 8 26.7 1 16 10-32 UNF 29.6 31.9 2.3 2.5 4.6 17.6 17.6 1 4 13.6 12 17 17.9 1 8 30.3 Reference dimensions after NPT thread installation.

Series AP500

) Connections 1/2, 3/4 inch face seal, 1/2, 3/4 inch tube weld 3.

Fieldbus system Ethernet POWERLINK compatible SI unit

(16 outputs) 0 1 Digital output unit EX600-DYF (16 outputs) 0 1 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analog input Unit EX600-AXA 2 (1 word / 1 channel) 0 (2 channels) (2 channels) 0 2 Analog output Unit EX600-AYA (1 word / 1 channel) Analog I/O Unit EX600-AMB 2 2 (2/2 channels) (1 word / 1 channel) (1 word /1 channel) Note) 1 word is equivalent

Fieldbus system EtherNet/IP TM compatible SI unit

EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYE1 (24 outputs) 0 3 EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input Unit EX600-AXA (2 channels) 4 (2 byte/1 channel) 0 Analogue output Unit EX600-AYA (2 channels) 0 4 (2 byte/1 channel) Analogue I/O Unit EX600-AMB (2/2 channels) 4 (2 byte/1 channel) 4 (2

asilltr

1 .30 1.42 1.54 250 1 . 1 2 1 . 1 6 '1.18 1 . 2 1 1.24 1 . 2 7 1.30 1 .33 '1.40 1.46 1.53 1 .59 '1.72 1.84 2.O9 2.22 300 1 .58 1.63 1 .66 1 . 7 0 1 . 7 4 1 .78 1.82 1.86 r.95 2.03 2 . 1 2 2.2\ 2.38 2.55 2.84 3.01 400 3.10 3.16 3.20 3.26 3.32 3.44 3.50 \r.o I 3.73 3.97 4.20 4.44 4.67 5 . 1 9 Weight sw Dtype {rbs) 056 0.099 0.104 0 . 1 1 0 0.1 17 0.1230.1300.1340.141 0.154 0 . 1 6 3o.172 0.185

Air Cylinder NCQ7 Series Compact Cylinder

1 .30 1.42 1.54 250 1 . 1 2 1 . 1 6 '1.18 1 . 2 1 1.24 1 . 2 7 1.30 1 .33 '1.40 1.46 1.53 1 .59 '1.72 1.84 2.O9 2.22 300 1 .58 1.63 1 .66 1 . 7 0 1 . 7 4 1 .78 1.82 1.86 r.95 2.03 2 . 1 2 2.2\ 2.38 2.55 2.84 3.01 400 3.10 3.16 3.20 3.26 3.32 3.44 3.50 \r.o I 3.73 3.97 4.20 4.44 4.67 5 . 1 9 Weight sw Dtype {rbs) 056 0.099 0.104 0 . 1 1 0 0.1 17 0.1230.1300.1340.141 0.154 0 . 1 6 3o.172 0.185

Modular Type Regulator Series AR

Modular Type Regulator Series AR Regulator Series AR Port size Model Accessory AR10 M5 x 0.8 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 Bracket 3/4 Square embedded type pressure gauge (except for AR10) AR50 3/4, 1 AR60 Pages 36 through 40 1 Round pressure gauge Regulator with back flow mechanism Series ARK AR20K 1/8, 1/4 Panel mount AR25K 1/4, 3/8 AR30K 1/4, 3/8

CXWM/CXWL

Table (2) Housing Mounting Style with Auto Switch (CDBXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material CDBXW 10MM L CDBXW 16MM L CDBXW 20MM L CDBXW 25MM L CDBXW 32MM L 1 1 1 1 Magnet mounting block ass'y Aluminum alloy 1 1 1 1 1 Aluminum alloy Switch mounting rail 2 Spacer Mounting block

SFOD-OMT0011CN

No.SFOD-OMT0011CN-A (4 ) // JXC-W1 (JXC3 Series) 1. . 3 2. . 5 2.1 . 5 2.2 . 5 2.3 . 5 3. . 6 3.1 . 6 (1) . 6 (2) . 6 3.2 . 6 (1) . 6 (2) . 6 (3) . 8 4. . 9 4.1 . 9 (1) . 9 (2) . 16 (3) . 19 (4) . 22 (5) . 23 (6) . 24 (7) . 26 4.2 . 28 (1) . 28 (2) . 31 (3) . 32 4.3 . 33 (1) . 33 (2) . 35 4.4 . 36 4.5 . 36 4.6 . 39 (1) . 39 (2) JOG . 40 (3) 1 . 40 4.7 . 42

SFOD-OMT0012

Details of each function are explained in section (1-1) to (1-8) below: (1-1) Menu (1-5) STOP button (1-4) Mode selection (1-2) Sub window buttons (1-3) Servo ON / OFF (1-6) Actuator operation status (1-7) Current step data No. (1-8) Communication status (1-1) Menu Menu is used to display each kind of window, printing, etc.