EXxx-OMO0027

EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input unit EX600-AXA 4 (2 byte/1 channel) 0 (2 channels) (2 channels) 0 4 Analogue output unit EX600-AYA (2 byte/1 channel) Analogue I/O unit EX600-AMB 4 4 (2/2 channels) (2 byte/1 channel) (2 byte/1 channel) -62No.EX-OMO0027

Fieldbus system DeviceNet TM compatible SI unit

) 0 1 EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYE1 (24 outputs) 0 3 EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input unit EX600-AXA 4 (2 byte/1 channel) 0 (2 channels) (2 channels) 0 4 Analogue output unit EX600-AYA (2 byte/1 channel) Analogue I/O unit EX600-AMB 4 4 (2 channels/2 channels) (2 byte

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

screw 103.3 (131.5) A 4 SMC 37.6 53.6 B 2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable

Direct Operated

/N.O. 1/8 to 1/2 2 to 10 10 to 50 N.C.

ZP3

One-touch fitting 2, 4 2, 4 2, 4, 6 Vacuum inlet Barb fitting1 2, 4 2, 4 2, 4, 6 1 2 polyurethane tubing, 4, 6 soft tubing Vacuum Inlet Direction Lateral Y Type/ZP3-Y Connection Female thread Pad diameter 1.5 to 3.5 4 to 8 10 to 16 Connection thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Female thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Vacuum inlet One-touch fitting 2, 4 2, 4 2, 4, 6 Barb fitting1 2, 4 2, 4

Programless Controller Series LECP1

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

60

Model Valve Model Nil 2 1 2 3 VXK21ll VXK22ll VXK23ll 1 2 3 4 7 8 J Nil 2 1 2 3 VXK21ll VXK22ll VXK23ll N.C. N.O.

Fieldbus system EtherNet/IP TM compatible SI unit

EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYE1 (24 outputs) 0 3 EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input Unit EX600-AXA (2 channels) 4 (2 byte/1 channel) 0 Analogue output Unit EX600-AYA (2 channels) 0 4 (2 byte/1 channel) Analogue I/O Unit EX600-AMB (2/2 channels) 4 (2 byte/1 channel) 4 (2

EXxx-OMU0020EN

Diagnostics type 2 Table. 5-6 Overview of Diagnostics type 2 Byte Description 0 General diagnostics 1 1 Valve diagnostics 1 2 General diagnostics 2 3 Valve diagnostics 2 5.1.2.1.

Series AP500

) Connections 1/2, 3/4 inch face seal, 1/2, 3/4 inch tube weld 3.

EXxx-OMN0029CN

-DXE (16 ) 2 0 EX600-DXF (16 ) 2 0 EX600-DYB (8 ) 0 1 EX600-DYE (16 ) 0 2 EX600-DYE1 (24 ) 0 3 EX600-DYF (16 ) 0 2 EX600-DME (8/8 ) 1 1 EX600-DMF (8/8 ) 1 1 EX600-AXA 4 (2 byte/1 ) 0 (2 ) EX600-AYA (2 ) 0 4 (2 byte/1 ) EX600-AMB 4 4 (2/2 ) (2 byte/1 ) (2 byte/1 ) -59No.EX-OMN0029CN-D SI ([ ](20 )) 0 0 byte 1 4 byte 2 (10 ) 6 byte (64 ) 12 byte 3 3 -60No.EX-OMN0029CN-D EX600

EXxx-OMS0026CN

10 L/A IN L/A OUT 11 MSNS 12 13 14 15 -33No.EX-OMS0026CN EX600No. 1 LED OFF 1 2 LED () DXB DXC DXD 1 2 ON/OFF LED () ON/OFF ( EX600-DXC1) / 2 1 2 LED ST () 1 2 ON/OFF LED DXE DXF ST () ON/OFF ST / 1EtherNet/IP Web H.T. 2(62 ) -34No.EX-OMS0026CN EX600No. 1 2 LED () 1 2 LED ON/OFF () ON/OFF DYB / 3 1 2 LED ST () 1 2 LED ON/OFF ST () ON/OFF DYE DYF ST / 1 2 LED

ZQ-OM01401

7 Assy ZQ 1EP2-A 27 - No.ZQ-OM01401-B 8. 8.1 1) 2 2 22 3 0.028~0.032Nm) * 2 1Assy 2 Assy 2Assy () 3Assy 0.25~0.31Nm) 2 Assy () 28 - No.ZQ-OM01401-B 8.2. 1) 2 3) 0.12~0.18Nm) 8.3 1)2 2)2 : 0.054~0.080Nm 2 29 - No.ZQ-OM01401-B 8.4 1)(V)2 2) 2 : 0.11~0.13Nm 3)(V) 2 8.5 1)8.4 Ass'y Ass'y (V) 2)Ass'y 3)8.4 Ass'y 30 - No.ZQ-OM01401-B 8.6 1 2 32 4 5kPa ( ) 5 6)

Magnetically Coupled

100 Supply pressure (PSI) Supply pressure (PSI) 50, 60 30 600 23 23 23 23 22 25 Minimum operating pressure (PSI) 20 500 20 17 17 17 Theoretical thrust (Ibf) 63 (2-1/2") 15 400 10 300 5 200 0 6 (1/4") 10 (3/8") 50 (2") 15 (5/8") 20 (3/4") 25 (1") 32 (1-1/2") 40 (1-1/2") 50 (2") 63 (2-1/2") 100 Bore size [mm (inch)] Note) Values show when the cylinder is driving without load. 0 25 50 75 100

LJ1H

(B contact) 2 pcs.

VCA

ported) 5.5 F E Manual override 2-6.4 Mounting hole C B A G H 1 Q l = 300 S U V Y (X) 25 l = 280 U side D side Stations 1 2 3 4 5 n For manual override J2 Manual override W T R N Z M 16 1 1 L 2 2 2 2 P = K (pitch) n-3/8, 1/2 (VCA30) n-1/2, 3/4 (VCA40) OUT port J1 J3 2-1/2 (VCA30), 3/4 (VCA40) IN port (front ported) L dimensions (mm) Formulas VV2CA3 Side ported: L1 = n x 35 + 33, L2 = n x

Fieldbus system Ethernet POWERLINK compatible SI unit

(16 outputs) 0 1 Digital output unit EX600-DYF (16 outputs) 0 1 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analog input Unit EX600-AXA 2 (1 word / 1 channel) 0 (2 channels) (2 channels) 0 2 Analog output Unit EX600-AYA (1 word / 1 channel) Analog I/O Unit EX600-AMB 2 2 (2/2 channels) (1 word / 1 channel) (1 word /1 channel) Note) 1 word is equivalent

Digital Flow Switch (Integrated display type)

R S16 N -2 to 5 -82No.PF-OMW0007-E 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

air-filter-e

Specifications Model FGDCA FGDCB FGDEA FGDEB FGDTA FGDTB FGDFA FGDFB Number of elements 1 2 Note) 1 2 Note) 1 2 Note) 1 2 Note) 65 x L500 (L250 x 2) Aluminum SPCD 65 x L500 (L250 x 2) SCS14 Stainless steel 316 65 x L500 (L250 x 2) SCS14 Stainless steel 316 65 x L500 (L250 x 2) Element size 65 x L250 65 x L250 65 x L250 65 x L250 Cover Case Gasket/ O-ring Seal Aluminum SPCD Main materials

Air Preparation Equipment

Specifications Model FGDCA FGDCB FGDEA FGDEB FGDTA FGDTB FGDFA FGDFB Number of elements 1 2 Note) 1 2 Note) 1 2 Note) 1 2 Note) 65 x L500 (L250 x 2) Aluminum SPCD 65 x L500 (L250 x 2) SCS14 Stainless steel 316 65 x L500 (L250 x 2) SCS14 Stainless steel 316 65 x L500 (L250 x 2) Element size 65 x L250 65 x L250 65 x L250 65 x L250 Cover Case Gasket/ O-ring Seal Aluminum SPCD Main materials