Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Voltage Ouput <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specifications: Out: NPN; Func: Analog Voltage Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specifications: Out: NPN; Func: Analog Voltage Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: Made to Order

Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Voltage Ouput <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: Made to Order

Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: Made to Order

Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specifications: Out: NPN; Func: Analog Current Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: Made to Order

Rated Flow Range: 60 to 6000 l/min, Thread Type: F [G (ISO 1179-1 Compliant)], Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Voltage Ouput <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: Made to Order

Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 60 to 6000 l/min, Thread Type: F [G (ISO 1179-1 Compliant)], Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 60 to 6000 l/min, Thread Type: F [G (ISO 1179-1 Compliant)], Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: Made to Order

EXxx-OMU0020CN

SI 1 x 2 x ( 2.5mm = 1.3 Nm) . 3-3 IP65 14 No.EX-OMU0020CN 3.2.

SI Unit

14 Has it been ensured that any person intentionally starting hazardous movements can only do so with a directly view of the danger zone?

PFxx-OMY0005

1: ON 3 Flow rate SW2 0: OFF 1: ON 4 Temperature SW1 0: OFF 1: ON 5 Temperature SW2 0: OFF 1: ON 6 Pressure SW1 0: OFF 1: ON 7 Pressure SW2 0: OFF 1: ON 8 Flow rate unit 0: L 1: ft3 9 Flow rate criteria 0: STD 1: nor 10 Flow diagnosis 0: Normal 1: HHH 11 Temperature diagnosis 0: Normal 1: HHH/LLL 12 Pressure diagnosis 0: Normal 1: HHH/LLL 13 Fixed output 0: Normal output 1: Fixed output 14

High Vacuum L Type Valve

Parts Replacement Procedure 14 1 XL-OMS0001-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

High Vacuum L Type Valve

Period and Scope of Warranty 14 7. Parts Replacement Procedure 15 1 XL-OMV0007 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

High Vacuum L Type Valve

Parts Replacement Procedure 14 1 XL-OMV0017 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

K35-OMX0029

signal power supply 24V 13 CAL 14 E-STOP *1 *1 When the air servo cylinder is operated, turn ON the E-STOP signal.

Cylinder with lock

14 15 D-A3/ A44 9 9 10 11 11 11 * Values which include hysteresis are for guideline purposes only, they are not a 27 - 28 - Auto switch proper mounting position (detection at stroke end) and its mounting height Models with rubber bumper have different dimensions for auto switch proper mounting positions (A to B).

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +