Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

2 !3 !4 !5 !6 !7 !8 !

Precision Regulator

2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

Cylinder with Lock Series CLS

R 140 140mm With front bumper H 160 160mm With rear bumper Cylinder stroke (mm) Refer to the maximum stroke table on page 2. Indicate in alphabetical order when 2 or more symbols are applicable.

CEx-OMQ0013

85%] [1055Hz 0.75mmXYZ 2 ] 7-2 7-2-1 AC100V15AC85VAC115V 50/60Hz DC24V100.4A 2 0.75mm 2D FG0.75mm 100 FG FG 7-2-2 5m 20m5m20m CE1-H0374 22 CE1-R 20m 200m 5m 20m * A DC12V 0.3A B AWG24 DC12V 0.3A CEU2 CE2 U 25mm 400 200mm 1 R25 100 / 23 7-3 7-3-1 2 (AC100V,15%) 1 24V10%,0.4A) 4 CEU2 3 2 1 END / 1. 2.

PSE200

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

R.

ZSE F/ISE

Goes to 2. OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

STAINLESS STEEL CYLINDER

Specifications 2. Installation and Handling P7 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Cushion 2-7. Control of direction 2-8. Auto switches 3. Maintenance P16 3-1. Checks 3-2. Replacement of seals 3-3. Consumable parts 3-4. Troubleshooting 4. Basic Circuit for Cylinder Operation P24 5.

Compact Cylinder

D Bore size (mm) A Piping port (1) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) 20 25 B D 32 View from piston rod end 40 (2) (2) (2) (2) (2) (2) C 50 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating Range

LEF-OM006xx

20m 5 5m 5 C C 5m 3 00 3 00 500 500 600 600 7 00 7 00 800 800 900 900 1000 1000 1 2 00 1 2 00 1500 1500 1800 1800 2000 2000 LEFB16 LEFB16 LEFB25 LEFB25 () R R LEFB32 LEFB32 S S / P.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18

CG1x-OM0006N

GR-R-010(10g) 1 2 3) , 4 7 1 100 4 3g 1cm 1 2 100mm 7. 4. g 20 25 32 40 (mm) 100st 2 3 3 34 50st 0.5 0.5 0.5 1 19 3-2-4. 1) 8 8 2(9) 9 3) , 6 1mm 8. 9. 20 3-3. 3-3-1.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

2 2 2 4 2 4 Series MY2H Single Axis Type 16, 25, 40 MY2H G Bore size Stroke PG Q + Stroke (LL) L LA 4-B depth of counter bore C LD through hole 4-MM, depth M Cylinder mounting center line PA Work piece mounting center line U Long hole depth Y Guide center line NX PB PC PF QW X 4 x 2square nut J NT NH PE PD LB NW LW NV T-slot for body mounting NC LE H7 depth R GB Cushion needle 2-P (Hexagon

1

n Auto switch model Different surfaces Same surface Different surfaces Same surface D-M9m 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (

CM2

(n=2, 4, 6) 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 10 65 20 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 20+50( ) (n=2, 4, 6) 10 75 15 75+55(n2) n2 2 D-B59W 15 75 20 D-A3lA D-G39A D-K39A D-A44A 35+30(n2) 10 100 35 100+100(n2) Mounting Bracket Auto Switch Mounting Band Refer to p.1.4-35 for part numbers of the mounting brackets.

1

Refer to the table below if spacers are required separately. 2 Size 2 2 3 3 4.5 4 6 2 1/4 3 3/8 3 Size 3 3 4.5 4 6 2 1/4 3 3/8 Electrical entry DC AC Female thread type 1 Size 1 1 2 2 3 1 1/8 G Grommet 2 Size 2 2 3 3 4.5 2 1/4 *1 GS Grommet (With surge voltage suppressor) 3 Size 3 3 4.5 4 6 3 3/8 D DIN terminal (With surge voltage suppressor) Fitting type Face seal fitting/Compression

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

AC Servo Motor Driver (MECHATROLINK-III type)

Alarm] [Software Reset] [ALM-CLR] ON Reset button Execute button FL-1*2 System Alarm FL-2*2 Alarm CPF00 Digital Operator Transmission Error 1 CPF01 Digital Operator Transmission Error 2 A.

PSxx-OMU0005CN

K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2

Safety Instructions

Timer circuit 2 (, +) 2 SOL. SOL. SOL. SOL.