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Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent . D o not use under f ol l ow i ng condi t i ons. W ARN I N G /H I N TS O N CO RRECT U SE Vi brat i on, I m pact Envi ronm ent H i gher t han /M ERI TS 60

1 For details about certified products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VT325 How to Order V100 Compact yet provides a large flow capacity Dimensions (W x H x D)55 x 118 x 53 (Grommet) C: 0.61 dm3/(sbar) {Rc 3/8 (Passage 2 3)} A single valve with 6 valve functions (Universal porting type)

Double acting Double acting spring type Positional relationship of lever and port Single acting/spring extend Axial direction (tube) Port Transfer direction Roller material L M Port OptionNote 1) Resin A Q Nil Carbon steel Without option Nil D C S With lock mechanism Transfer direction With cancel cap With lever detection switchNote 2) Port Port Note 1) Options can be combined.

EX510 Gateway-type Serial Transmission System Plug-in Unit Series SQ1000 [Option] How to Order Manifold SS5Q SB 3 1 08 D CE compliant Manifold series Nil Q CE compliant 1 SQ1000 SI unit output polarity 1(P), 3(R) port size Nil N Positive common Negative common 1(P), 3(R) port, One-touch fittings for 8 Nil 1(P), 3(R) port, One-touch fittings for 5/16" 00T Valve stations Symbol 1 station Note

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Nil F N T NBR seals FKM seals EPR seals A B C None With bracket Nil B Note) Refer to Table (1) for availability. 2 0 1 A VNA Air operated 15A 2 to 4 External pilot solenoid 2 VNA 1 1 A 15A 1 T CE-compliant Nil Q CE-compliant Note) CE-compliant: For D or DZ only Manual override Rated voltage Valve size Valve type Port size 110

Nil (Rear piping) L (Bottom piping) Bracket A A1 ZS-46-A1 Bracket C A3 ZS-46-E B ZS-46-B Panel mount adapter E ZS-35-B D ZS-46-D Panel mount adapter + Front protective cover F ZS-35-E -9No.PS-OMX0002-A Accessories/Part numbers If an option is required independently, order with the following part numbers. Items Part No.

A to B C to D 500 L 5 to 500 -25 to 525 L/min 1000 L 10 to 1000 -50 to 1050 2000 L 20 to 2000 -100 to 2100 PFMC7 40 to 4000 -200 to 4200 500 L 0.17 to 17.66 -0.90 to 18.50 cfm 1000 L 0.35 to 35.31 -1.80 to 37.10 2000 L 0.70 to 70.63 -3.50 to 74.20 The flow ranges and relationship between the fluid and PD are shown in the figures below.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Applicable tubing O.D. d ASS Model AS231FE-01-04SK 12.7 17.5 9.3 13.1 24.9 4 9.3 26 31.8 ASR Applicable tubing O.D. d AS231FE-01-06SK 12 R 1/8 12 13.5 22.9 10.9 14 26.9 6 11.6 27 37.2 44.9 49.9 48.9 14.2 53.9 (Hexagon width across flats) AS231FE-01-08SK 18.5 28.2 12.9 16.2 30.9 8 15.2 29 41.7 ASF (Hexagon width across flats) AS231FE-02-04SK 16 21.9 10.9 16.2 30.6 4 10.4 36 40.1 AS231FE-02

(Normally open) B 4 VP 5 6 24 VDC 12 VDC Thread type VG Rc Nil G F 7 240 VAC, 50/60 Hz 9 Other VP NPT N Option NPTF T Electrical entry S070 G Grommet D DIN terminal Port size VQ 04 06 10 1 2 Rc T Conduit terminal E Grommet terminal 3 4 Rc Rc 1 VKF Light/Surge voltage suppressor VQZ Nil None S With surge voltage suppressor (Only grommet type is only available.)

(mm) H2 Q P L W H1 Model TMA-06 TMA-08 TMA-10 TMA-12 28 21.7 172.5 31.8 25.4 151.2 35 28.1 167.3 37 19 151 17.9 20.3 24.3 26.7 18.6 18.6 22 22 11.4 12.6 15 16.2 6 12 10 8 15-6-32 1 Related Products: Tube Cutter Series TK Tube Cutter: TK-2 Possible to cut a tube up to 18 mm.

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 2 to 4 2 0 1 A VNC 15A (Except valve size 8, 9) Air operated External pilot solenoid 2 VNC 15A 1 1 1 A T CE-compliant Nil Q CE-compliant Note) Electrical entry: D or DZ only Manual override Valve size Valve type Port size Rated voltage Nil: Non-locking push type Nil Air operated Symbol Orifice diameter (mm) Symbol Port size Rc

Enclosure Centralized wiring Centralized wiring 16-8-3 4 Air Catch Sensor Series ISA2 How to Order Manifold IISA2 N 3 B PL Without control unit IISA2 SL C 3 B 1 D E2 With control unit Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pressure gauge of regulator Note

2 q w e r t y !1 !0 o i u Component Parts No.

D Auto identification function Display units can be selected using either or . This function automatically identifies the pressure range of the pressure sensor that is connected to the multi-channel pressure sensor controller, thus eliminating the need of having to reset the range again after replacing the sensor.

Note Data 16 CJ-L016B CJ-F016B CJ-T016B T-bracket is used with double clevis (D). 1. For Series CJ2X, 0.1 Nl/min is the values at maximum in terms of its construction and there is internal leakage (ANR). Foot bracket Flange bracket T-bracket BJ2-010 Common for the types of D-C7/C8 and D-H7 BJ2-016 10-3-7