SMC Corporation of America
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The load voltages are 1 10 or 220VAC. Either voltage should be used with the contact Drotective box. The diffe.ence belween the operating position (on), of the switch and the returning nonoperating position (off), by movement of the piston magnet is called the differential response. Switch operatrng po6ation Lead wne bngth Swhch connaclinq s de 20 in. Load @nnecring sid6 20 in.

Example) 4-20 mA 20-4 mA 0-10 V 10-0 V : If teaching is performed with the conditions below, the setting might be interrupted and the orange LED flashes 4 times. If teaching is performed at the start or end of the measuring range, magnet force is not detected. Minimum set measuring range: 1 mm -14No.D-S-OMU0002-A Switch output mode There are 4 modes for switch output.

300 mm H: 600 mm VFR VP4 VZS VFS VS4 (Mounting hole) VQ7 2-M5 x 0.8 (PE port) EVS VFN (Piping port) L plug connector (L) VZ3 20-L-M5 M plug connector (M) VZ3 20-M-M5 3 4 5 3 4 5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor Built-in One-touch fittings VZ3 20-DIN terminal (D) VZ3 20-D-M5 3 4 5 3 4 5 C4 C6 MAX. 10 2-One-touch fitting (A, B port) Applicable

(mm) Mounting screw P L1 H2 D W1 L2 H1 W2 W3 Model (Nominal x Length) 6 4 TM-04 TM-06 TM-08 TM-10 TM-12 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 2.2 2.8 2.8 3.2 3.2 2 x 6 4.5 91.5 9.5 5.5 77.5 6 12.5 7.5 77.5 6 15 9 93 6.5 2.6 x 8 2.6 x 8 3 x 8 3 x 8 12 10 8 16.3 8.8 14.3 7.5 12 9.8 How to Use Caution 1.

N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

10 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40

Fault No. 10 Fault Possible cause Investigation method Countermeasures Tighten the branch cable connection. (if there is a broken wire, replace the cable) Input unit PWR LED is OFF. Power supply for input and control: 24 VDC 10% Check the branch cable connections and check for broken wires.

160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Recommended air flow Tubing size Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Unrestricted 360 piping tube mounting. The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360.

8.5 11 23 38 10 VXZ2230-02 VXZ2230-03 VXZ2240-04 VXZ2350-06 1.9 2.4 5.3 9.2 46 58 130 220 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.5 10 15 20 0 VC Effective area Air Flow characteristics AC DC AC DC AC Water Air Max. operating pressure differential (MPa) Oil DC VXZ2360-10 25 1.0 0.7 1.0 0.7 0.7 0.7 290 12 215 1.5 1480 0 1 Min. operating

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig

option CE-compliant Standard type Nil VQZ Q CE-compliant Nil Energy-saving type Y JIS Symbol Continuous duty type E VP Electrical entry: D only N.C.

Compact size (Width: 18 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing. Refer to page 3-13-4.) 20 or less 50 or less 10 3 Refer to the table below.

R Pod 20 stations lf there are more than 10 stations, exhaust from both sides of manifold. .In cas of NVZ120 manifold type, Supply air to "R" port of manitold base. ''P" port of maniljold base will be the exhaust port. NW4Zl-'?jjD 1 -? o*, "."o"oo 2 stations Top ported NW4Z1-20-91 F: With mounting 20 stations lfthe.e ale fiors lhan 10 stdions, xhaust from both sides of lnanilold.

R Pod 20 stations lf there are more than 10 stations, exhaust from both sides of manifold. .In cas of NVZ120 manifold type, Supply air to "R" port of manitold base. ''P" port of maniljold base will be the exhaust port. NW4Zl-'?jjD 1 -? o*, "."o"oo 2 stations Top ported NW4Z1-20-91 F: With mounting 20 stations lfthe.e ale fiors lhan 10 stdions, xhaust from both sides of lnanilold.

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

(mm) 4 6 8 10 12 Effective area (mm2) Nylon Urethane 4.2 4.2 11.4 9.0 21.6 14.9 35.2 25.0 50.2 39.7 Weight (g) Note) Note) Model d D2 L1 L2 A M D1 KCL04-99 KCL06-99 KCL08-99 KCL10-99 KCL12-99 10.4 12.8 15.2 18.5 20.9 7 8 12 25 30 Note) D1, D2: Max. diameter 10 10 12 17 17 18 20 23 26.5 28.5 34.3 36.5 40.3 44.3 46.8 22.6 24.1 25.2 28.6 29.4 16 17 18.5 21 22 4 6 8 10 12 Applicable tubing K

SOLENOID SPECIFICATIONS Adder Number 0 1 Required Amplifier VEA1 30, VEA131 vEA 250, 251 ,252 Control Range 0-750mA 0 1 A Coil Resistance 26]2 (68"F (20"C) ) 1312 (68"F (20'C)) PorYer Consumotion 15W Max. Current (68"F (20"C) ) 13W Max. Current (68"F (20'C)) Insulation Class H Max. TempeEture Rise 284'F (140"C) at Full Current Elec-trical Connection DIN Connector (h" PF) NVEF.