Wireless System

Link, No Activity (10 Mbps) 7 LINK/ACT1 LINK/ACT2 Orange LED flashes. Link, Activity (10 Mbps) Red LED is ON. IP address has been duplicated. 100 Mbps: Green 10 Mbps: Orange OFF EtherNet/IP is not connected. 15 Wireless System EX600-W Series LED Display Wireless slave unit No. LED name Function Color of LED Operation Green LED is ON.

MGP

15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

Ionizer Nozzle type IZN10 Series IZS

0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 445 IZN10 Series Flow Rate Characteristics (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 (3) Female threads for piping/IZN10-11 With Stainless steel 316 One-touch fitting + Anti-static tubing 0.7 Energy saving static neutralization nozzle/IZN10-01 0.3 0.6 0.25

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

10 9.5 4 Section AA B D Mounting base side +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6 x M3 x 0.5 depth 4 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 835 MXP/MXPJ6 1122Air Slide Table

Parallel Type Air Gripper

Model Screw Max. tightening Maximum screw-in depth (L mm) torque (Nm) MHZ2-10 M3 x 0.5 0.9 6 MHZ2-16 M4x0.7 1.6 4.5 MHZ2-20 M5 x 0.8 3.3 8 L L MHZ2-25 M6x1 5.9 10 MHZ2-32 M6x1 5.9 10 MHZ2-40 M8 x 1.25 13.7 13 Model Screw Max. tightening torque (Nm) Maximum screw-in depth (L mm) MHZ2-10 M3 x 0.5 0.69 5 MHZ2-16 M4x0.7 2.1 8 MHZ2-20 M5 x 0.8 4.3 10 MHZ2-25 M6x1 7.3 12 MHZ2-32 M6x1 7.9 13 MHZ2

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

MXP10-10 A Width across flats 1.5 H 13 (Plug: M-5P) 2-M5 x 0.8 Piping port Width across flats 5.5 4-M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth 2.5 3 4-M4 x 0.7 A 0.5 19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 28 27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

Action D S Rod end threads Double acting Single acting (spring extended) Rod end female threads (4 without threads) Rod end male threads Nil M Table 2 Auto switch specifications Table 1 Standard strokes Action Bore size (mm) 4 6 8, 10 4 6 8, 10 Standard stroke (mm) 4, 6, 8, 10 4, 6, 8, 10, 15 4, 6, 8, 10, 15, 20 4, 6 4, 6, 8 4, 6, 8, 10 Load voltage Lead wire length (m) Indicator light Wiring

VCA

size (mm) 4 5 7 10 Symbol 4 5 7 10 Class 3 Class 4 Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Manual override None Slotted locking type (tool required) Nil B Consult SMC regarding other voltages.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

N 0.5MPa 0.5MPa 40 40 0.4MPa 0.4MPa F 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 0 0 10 10 20 20 30 30 40 40 Gripping point L mm Gripping point L mm MHS2-25D MHS2-25D 100 100 F Internal gripping Pressure 0.6MPa Pressure 0.6MPa 80 80 Gripping force N Gripping force N 0.5MPa 0.5MPa 60 60 Note: 1N = 0.2248lbf 1in = 25.4mm 1MPa = 145psi 0.4MPa 0.4MPa 40 40 0.3MPa 0.3MPa 0.2MPa 0.2MPa 20 20 0 0 10 10

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Bernoulli Gripper

Body material 30 Nil 30 23 8.7 27 34 M3 x 0.5 6 8.5 3.3 10.5 2.2 8.5 0.8 11.3 11.8 2 4.2 0.8 2.8 27 P 17 S 77 ZNC 40 Nil 40 32 11 3.5 34 42.2 44 48 P 30 S 139 M4 x 0.7 8 11.5 3.6 13.5 2 8.5 1.0 10.5 12 3 5 1 5.8 60 Nil 60 47 21 10 54 64 110 P 67 S 323 *1 The stopper, vibration suppression cover, and plug weights are not included. 13 Bernoulli Gripper ZNC Series Dimensions: 80 Basic type

Electromagnetic Digital Flow Switch

Lead wire with connector for copying ZS-40-Y Connect up to 10 slave units 10 LFE0 Series For the flow switch precautions, refer to the Operation Manual on the SMC website.

Low torque Metal seal type Rotary joint

* flange: MQR8-F (for MQRF8-M5) * flange: MQR12-F (for MQRF12-M5) * o 55 * o 45 * o 41 * o 50 * 4-4.5 mounting hole * 4-8 counter bore 5.5 4.5 mounting hole +0.05 4.1 depth10 54h8 24 x M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033 25h8 16-M5 x 0.8 10 counter bore depth1.5 0 0.033 3 120 140 17 *7 (10 from end) 3 (87) 1 2 3 4 5 6 7 8 9 10 11 12 1 2 31 9 8.2 x 11 = 90.2

Ejector Valve Unit, Series ZYY/ZYX

10 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow

IDX-OM-W038

AT MV MV /F % %, IDH Series 13 1.1 IDX-OM-W038 2. 2 2.1 IDH Series 21 2.1 IDX-OM-W038 2. 2.2 2.2.1 (1) 1. (85%) 2. 3. 4. 5. 1535050 6. 7. () 8. 9. 10. 11. 2000m 12. 13. 14. 15. 16.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

2 x M5 x 0.8 (Vacuum port) 6.5 12 12 11 10 10 1 24 14 S O 20 46 24 30 K 15 (70) 10 24 24 12.5 4 12.5 4 10 30 When open F 17 17 54 4 x M6 x 1 through (Thread for mounting attachment) When open G (mm) J 32 68 88 H 176 276 316 G 138 238 278 F 98 158 178 E 38 80 100 D 87 129 149 B C 58 100 120 A MHL2-20D MHL2-20D1 MHL2-20D2 112211221122136 211 251 54 96 116 MHL2-25D 1122D A B C 12.5 +0.030 4H9

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Applicable filter model Set description Spare element O-ring for cover I-68S-A I-62S-A I-63S-A Element size (mm) 6 x 4 x L25 12 x 8 x L20 16 x 12 x L25 ZFC05 ZFC10 ZFC20 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. Note) Spare elements and O-rings for the cover (Applicable filter: ZFC10, 20) are sold in sets of 10 pieces each. *Do not wipe with alcohol, etc.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

PA3000/5000/PAX1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.