High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

JXCx-OMT0030CN

62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102 IF LED . 31 11 . 32 111 . 32 112 . 32 113 . 32 114 . 34 12 . 35 121 . 35 122 IF IN Data . 39 123 IN Data . 39 124 OUT Data . 41 13LEC . 42 131 LEC . 42 132 . 43 14/ . 44 15/ . 45 151 . 45 152 . 46 153 . 46 2 - 154 . 48 155 . 49 156 . 49 16/ . 50 161

Series CE1

Materials: 12, 20 Steel 32 to 63 Rolled steel 30 d (mm) Bore (mm) D C H d B C D Part No.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

CJ2Q

, 30, 45, 60, 75, 100, 125, 150 Refer to p.0-39 to 0-46 before handling. 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 1.3-53 Series CJ2Q Mounting Accessories/Refer to p.1.3-12 for details.

Multistage Ejector Series ZL112/212 1

MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

CJP

MB C95 CA1 CS1 Standard stroke (mm) Rod end thread With thread Without thread B 5, 10, 15, 20 5, 10, 15, 20, (25), 30 6 10, 15 CJP D 10 15 F CDJP D 10 15 F 90 S With Auto Switch Number of auto switches Action Air cylinder with auto switch S 2 1 Mounting Bore Size * 5 stroke: S type only With auto switch 6 10 15 6mm 10mm 15mm Symbol Mounting Standard B F L D T Basic Flange Foot Clevis Trunnion

1

: D Applicable cable O.D.: 6 to 12 G F G F Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5 48.5 52.5 99.5 50.5 68.5 XSA2-2P(N) 36 36 79 35 14 22 10 1/4 24 29.5

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

. 30 10, 20, 30, 40, 50, 75, 100 40 10, 20, 30, 40, 50, 75, 100 Bore size Strokes are available in 1 mm increments by installing spacers in standard stroke cylinders. 10 16 20 25 30 40 10 mm 16 mm 20 mm 25 mm 30 mm 40 mm Port thread type M thread Rc NPT G 10 to 20 Nil 25 to 40 TN TF Series MQQ is not auto switch capable.

PSxx-OML0002CN

) -46No.PS-OML0002CN-G , (1015 ) O -47No.PS-OML0002CN-G <> 5 UnLLoC 5 5 (30) 5 0 (30) 46/ 1 -48No.PS-OML0002CN-G ZSE30A(F)/ISE30A ( ) No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No.4 No.5 No.6 No.7 -49No.PS-OML0002CN-G No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 No.18 No.19 -50No.PS-OML0002CN-G No.

3 Port Air Operated Valve

16 17 18 19 20 stations Station n L1 L2 1571 VPA300/500/700 Series VPA500 Series/Dimensions Type 41/Common exhaust: VV3PA5-411-03 Stations 92.5 2 x 7.2 (For mounting) 30 N.C.

Tamper Proof and Flat Head Screw

55.3 22.4 1.5 49.3 AS32 0-N02-ST NPT 1/4 NPT 1/4 AS32 0-03-ST Rc 3/8 19 22.5 R 3/8 AS32 0-F03-ST PF 3/8 24.3 9.5 30 53.7 20.8 1.5 47.7 AS32 0-N03-ST NPT 3/8 NPT 3/8 AS42 0-04-ST Rc 1/2 24 27.5 R 1/2 AS42 0-F04-ST PF 1/2 28.5 12 38.5 63.8 26.7 1.5 55.8 AS42 0-N04-ST NPT 1/2 23.8 NPT 1/2 Reference dimension for threads after installation SMC Pneumatics, Inc. 15 Flat Head Screw Driver Adjustable

VXD21/22/23

Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively. Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Rubber seal 10.8 (0.6) VQZ232 20 or less 15 or less 58 VQZ200 Metal seal 7.2 (0.4) VQZ222 18 or less 14 or less N.O. Rubber seal 10.8 (0.6) VQZ242 20 or less 15 or less Metal seal 14.4 (0.8) VQZ312 22 or less 17 or less N.C. Rubber seal 16.2 (0.9) VQZ332 33 or less 25 or less 92 VQZ300 Metal seal 13.5 (0.75) VQZ322 22 or less 17 or less N.O.

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm Scale: 80% With auto switch: MDSUA3-S 1) 24 : When using D-90, 90A, S99, S99V, S9P, S9PV, T99, T99V 30 : When using D-97, 93A 2) 60: When using D-90, 90A, 97, 93A 69: When using D-S99, S99V, S9P, S9PV, T99, T99V 15.5 45 29 Angle adjustment bolt 2-M5 x 0.8 (Port position: Side port type only) A port B port 1 24 2 60 (69) 18.5 34 D-97, 93A 15 30 6 Series MSUA Rotary

Short Stroke Electric Actuator Series LX

) 20 20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1

Air Suction Filter With One-touch Fittings Series ZFB 1

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Recommended air flow Tubing size Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Unrestricted 360 piping tube mounting. The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 With XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 High temperature Without XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 With XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 Temperature

XL-OMY0001

-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 63 80 XLA63-30-1-2 XLA80-30-1-2 XLA63A-30-1-2 XLA80A-30-1-2 XLA63-30-1H-2 XLA80-30-1H-2 XLA63A-30-1H-2 XLA80A-30-1H-2 11,2 FKM:No.1349-80[ ]P8 XLA16A-30-1-2-XN1 2 M9

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A SOL.B SOL.A SOL.B (+) () () (+) 15 15 Oki Electric Cable Co,.