Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

52-SY7140 (R) -TTMax.10 02 03 L 135 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 17 ATEX Compliant Base Mounted Type Series 52-SY7000 Dimensions 2-position double L plug connector (L) 52-SY7240 (R) -L21 22.5 02 03 13.5 4 61 41.7 2 x 4.3 (Mounting holes) M5 x 0.8 (External pilot port) 21.5 21 Manual override 38 4 Insulation: Black () B A 23 23 E P B A 46 X Insulation

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side ported 1/8 (A) 4 (B) 2 Side ported

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Secondary Batteries

(Normally closed) A N.O.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

39.9 34.9 18.5 15 17 8 R 1/4 ASD430FG-02-08S 28.2 18.5 55 46.5 15.2 34.4 29.4 11 19.7 10 21 31 58 ASD430FG-02-10S 49.3 18.5 17 25.2 74 6 ASD530FG-02-06S 48.3 12.8 20.3 18.5 28.2 76 8 ASD530FG-02-08S 51.3 15.2 46.9 41.9 48.3 43.3 23 19.8 19 R 1/4 42.8 37.8 15.4 21 80 32.6 10 ASD530FG-02-10S 54.1 18.5 23.1 22 83 34.4 55.9 12 ASD530FG-02-12S 20.9 17 74 25.2 48.3 6 ASD530FG-03-06S 12.8 20.3 18.5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

FKM Needle Needle guide Stainless steel 316 Stainless steel 316 Body B Stainless steel 316 3 Series ASG Dimensions ASG22F-M5 H L4 (Width across flats) Applicable tubing O.D. d A L6 D L5 M L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

1/4 28.2 46.5 ASD430FG-02-08S 15.2 11 34.4 29.4 18.5 19.7 10 31 49.3 ASD430FG-02-10S 18.5 21 6 25.2 48.3 ASD530FG-02-06S 12.8 17 20.3 28.2 8 51.3 ASD530FG-02-08S 15.2 18.5 23 19.8 46.9 41.9 48.8 43.8 19 R 1/4 15.4 42.8 37.8 32.6 10 54.1 18.5 ASD530FG-02-10S 21 23.1 34.4 12 55.9 20.9 ASD530FG-02-12S 22 25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23 19.8

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

Modular Design with Uniform Body Style

drain cock C2SL-36-A With bowl guard C2SL-36C-A C3SL-36-A C4SL-36-A Nylon Drain cock with barb fitting With bowl guard C3SL-36W-A C4SL-36W-A Metal Without drain cock C2SL-2-A C3SL-2-A C4SL-2-A With level gauge C3LL-8-A C4LL-8-A With drain cock C2SL-23-A C3SL-23-A C4SL-23-A With level gauge C3LL-38-A C4LL-38-A *1 The bowl assembly comes with a bowl seal.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

When a 3 port valve is mounted on a 5 port manifold, The "A" port is the working port. The "B"port can either be plugged or unplugged.

Series AS-FM/AS-M/ASD-FM

Dimension AS220M01 02 AS120M H (width across flats) 8 L1 T2 24.8 (Max. 29.8) M5 x 0.8 28.2 (Max. 33.2) L2 A D1 9 10.3 L3 10 M5 x 0.8 10-32UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 Model D1 D2 Min. Min. Max. Max.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS3201F-02 Meter-in type Meter-in type AS3311F-02 AS3211F-02 AS ASP ASN AQ ASV AK ASS ASR ASF Component Parts Component Parts No.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 Metric Size L5 (1) A (2) M1 Weight (g) d T Model H D1 D2 D3 L1 L2 L3 L4 Max.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 70.7 B COM A B COM A B COM A B COM A B COM A DIN rail holding screw Manual override DIN rail (Press and turn for the locking type.) 4(A) port side:

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

3 i Meter-in type Meter-in type AS3211F-02 AS3311F-02 AS ASP ASN AQ ASV AK ASS ASR Component Parts Component Parts No. Description Material Note No.

HEC-OM-S008

range. 03Data field of a command is not normal.

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

IR1000/2000/3000

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.