M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

5 1 2 14.8 14.8 !

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LVN TI/ TIL Class Size combination Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8" No. 1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5

CV/MVGQ

1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

Free Mount Cylinder

5 5 1 pc. 10 5 10 2 pcs.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Table of Contents

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Series VQ Base Mounted Metal Seal/Rubber Seal

VS VQ 0 5 1 0 1 Y VS7 (Example) Enclosure Series With lead wire kit/cable (3m) VV5Q11-06C6L2 VQ1100-5 VQ1200-5 VQ1300-5 VVQ1000-10A-1 Dust-proof IP65 W VQ2000 1 2 1 setManifold base No. 2 setsValve No. (Stations 1 to 2) 2 setsValve No. (Stations 3 to 4) 1 setValve No. (Station 5) 1 setBlank plate No. (Station 6) VQ1000 Note) VQ2000 only.

Stability of suction position,

/With Male Thread Adapter: Vacuum Inlet Lateral Pad form Bellows type with groove ZP3E-Y32BMl-AL14 ZP3E-Y40BMl-AL14 ZP3E-Y50BMl-AL14 M14 x 1 Width across flats 19 Width across flats 19 M14 x 1 M14 x 1 Width across flats 19 M5 x 0.8/ Effective thread depth 5 5 5 26.5 44.1 69.1 25 M5 x 0.8/ Effective thread depth 5 23 40.6 65.6 25 5 5 M5 x 0.8/ Effective thread depth 5 21 38.6 63.6 25 5 5 M10

4/5 Port Air Operated Valve Series SYJA3000

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Micro Mechanical Valve Series VM1000

VZM400 5 port (A) (B) 2 4 Metal spool 12 3 1 5 14 Best Pneumaticsz-2 (EB) (P) (EA) Side ported 1/8 VZM500 5 port (A) (B) 2 4 Rubber spool 12 3 1 5 14 (R2) (P) (R1) VFM200 5 port (A) (B) 2 4 Metal spool 12 3 1 5 14 (EB) (P) (EA) Side ported 1/4 VFM300 5 port (C2) (C1) 2 4 Rubber spool 12 3 1 5 14 (E1) (S) (E2) Front matter 2 2/3 Port Mechanical Valve Series VM100 RoHS Compact size Piping

LJ1H

2 3 4 5 Transfer load m (kg) 30 L2 20 L2 (mm) Mer m Rolling Yawing 10 L2 0 1 2 3 4 5 Mer Transfer load m (kg) m 30 a = 1000 a = 500 20 L3 (mm) a = 2000 L3 10 m Mey a 0 1 2 3 4 5 Transfer load m (kg) Refer to page 145 for deflection data. 88 89 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

Hydraulic

) Load (kN) 126 Technical Data 2 Series CH2E, CH2F, CH2G, CH2H Stroke range limit charts: Bore sizes 50, 63, 80, 100 Bore size 50 B-rod C-rod 5 2 4 8 3 7 2 4 8 3 7 5 2000 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B-rod C-rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

5 D-X 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 20Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Data CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance

CRB2/CRBU2/CRB1

W1 = L3 = L1 = 10 10 4.5 to 14 0.5 to 2 Y-1 L2-1 6.5 to 14 X-3 L1-1 0.5 to 2 L4 = 15 15 Y = 5.5 to 18 Y-1.5 L2-1 0.5 to 2.5 X-4 L1-1 8 to 18 0.5 to 2.5 L2 = 20 20 Y-1.5 L2-1 6 to 20 0.5 to 3 9 to 20 X-4.5 L1-1 0.5 to 3 X = 30 30 0.5 to 4 Y-2 L2-2 8.5 to 22 0.5 to 4 X-5 L1-2 11.5 to 22 W2 = 40 40 0.5 to 5 Y-4.5 L2-2 13.5 to 30 0.5 to 5 15.5 to 30 X-5.5 L1-2 29 Series CRB2 Axial: Top (Long-shaft

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

F

32UNF KJW03-32 7 8.9 17.5 25.5 27 14.5 2.3 6.4 5/32 10-32UNF KJH03-32 8 18.5 15.5 2.3 2.4 5/32 1/16 KJW03-33S 9.5 8.9 17.5 25.5 26 14.5 2.5 8.7 5/32 1/16 KJH03-33S 9.5 22 18 3 5.2 5/32 1/8 KJW03-34S 11.11 8.9 17.5 25.5 26 14.5 2.5 10.6 5/32 1/8 KJH03-34S 11.11 17.5 13.5 3 5.1 1/4 10-32UNF KJW07-32 7 11.9 17.5 27 30 15.5 2.3 7.3 1/4 10-32UNF KJH07-32 20.5 17.5 2.3 5.1 1/4 1/16 KJW07-33S 9.5