SMC Corporation of America
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16DD-M9(W,A)V D-P3WA 56mm Nm D-M9(V) D-M9W(V) D-M9A(V) D-P3DWA 0.050.15 -12- (mm) L1 L2 L3 L4 L5 L6 16 5 MHM-16D 1 1 1 1 MHM-25D 36 34 MHM-32D 50 24 MHM-50D 23 25 80 41 / 3 NPN 3 PNP PLC PLC 2 2 PLC PLC PLC PLC -13- AND(),OR() *50ms 3 NPN OR 3 NPN AND 1 1 1 2 2 2 3 PNP AND 3 PNP OR 1 1 1 2 2 2 2 AND 2 OR 2 AND ON , 2 ON 20V 2 OR OFF OFF 1 1 ON 2 2 ON =-2 OFF =2

How to Order D-B3 1 J Heat resistant reed switch Series D-B3 Electrical entry Nil J Terminal conduit type Grommet type Note) Only grommet type has IP67 specification.

Note Weight Lead wire and M12 connector LFE-1-A3 Lead wire length 3 m Approx. 175 g Option Part no. Note Weight Bracket LFE-1-D Tapping screw for LFE1 (3 x 10), 4 pcs. Approx. 45 g LFE-2-D Tapping screw for LFE2 (3 x 10), 4 pcs. Approx. 70 g LFE-3-D Tapping screw for LFE3 (3 x 10), 4 pcs.

Product Profile: ISO Standard Solenoid Valve: Size 1, 2 Rubber Seal Series VP7-6/7-8 Solenoid valve conforming to ISO standard Size (1)/VP7-6 Size (2)/VP7-8 (Rubber seal) Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position Closed center (FHG-D) Exhaust center (FJG-D) Double pilot check (FPG-D) Pressure center (FLG-D) Courtesy

EX600-DX B M12 (5 )4 8 C M8 (3 )8 8 P PNP C1 M8 (3 )8 8 N NPN D M12 (5 )8 16 E D-sub (25 ) 16 F (32 ) 16 M12 (4 ) EX600-DXB No. 1 LED 2 () 3 4 5 () -17No.EX-OMN0035CN-A EX600-DXC No. 1 LED 2 () 3 4 5 () EX600-DXD No. 1 LED 2 () 3 4 5 () -18No.EX-OMN0035CN-A EX600-DXE No. 1 LED 2 () 3 4 D-sub (No.4-40 UNC) 5 6 () EX600-DXF No. 1 LED

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

400 W (Tap water)*1 510 W (Tap water)*1 800 W (Tap water)*2 1 kW (Tap water)*2 Heating capacity 600 W (Tap water)*1 1 kW (Tap water)*1 1.2 kW (Tap water)*1 1.4 kW (Tap water)*2 2 kW (Tap water)*2 Temperature stability*3 0.01 to 0.03C Pump capacity Refer to the performance charts.

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

A) Valve stations 1 station 01 Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 20 stations 20 Port A: Rc(PT) 1/8 4 3 Port Direct Operated Poppet Series VKF300 Dimensions/Manifolds Body Ported Type Common SUP, Common EXH/Top Ported Type 20 Manifold Grommet: G DIN terminal: D 4-Rc(PT) 1/8 (ports P, R) Manual override (non-locking) Applicable cord O.D. 4 to 6.5 Max .10 71.5 78.5 71 Light (DZ type only

MGF 40 MGF 63 30, 50, 75, 100 MGF100 Minimum Strokes for Mounting Auto Switches (mm) Switch type D-Z7, D-Z8 D-Y5, D-Y6, D-Y7 Number of pcs. 10 5 1 pc. 15 10 2 pcs.

LED R R NL (Built-in terminal) Marking AC, 12 VDC or less for DC For 24 V or more 1 2 + 1 2 1 2 NL: Neon bulb R: Resister LED: Light emitting diode R: Resister D: Protective diode LED: Light emitting diode R: Resister 1418 A

35) 10 (10) 16.5 19.2 18.4 21.6 20.5 23.2 22.4 25.6 05 20 10 A A 30 (25) 10 (10) 1 15 10 For D-F9, D-M9 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotating angle.

35) 10 (10) 16.5 19.2 18.4 21.6 20.5 23.2 22.4 25.6 05 20 10 A A 30 (25) 10 (10) 1 15 10 For D-F9, D-M9 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotating angle.

n = 1 + 2 + 3 < 1 Load factors n Note Item Examine W. W max. is maximum movable load at Va. 1 =W/Wmax. (1) Max. movable load Examine Mp,My,and Mr.

Select using the following procedures. 1 IDF100FS/125FS/150FS Selection Example Read the correction factors. Obtain the correction factors A to D suitable for your operating condition from the table on the next page.

Poppet Solenoid Valve Rubber Seal Series VK300 Type 21 Manifold Body Ported (Top ported) n1 = Number of VK300 VV3K3-21Stations Grommet: G DIN terminal: D Grommet: G DIN terminal: D Manual override (Non-locking) Applicable cable O.D: 3.5 to 7 V100 SY 300 (Lead wire length) 2-Rc 1/8 (P port) 2-Rc 1/8 (P port) n1-Rc 1/8 (A port) 2-4.5 (Mounting hole) SYJ VK (Pitch) VZ Courtesy of Steven Engineering

) I n case t hat set t i ng pressure i s 0. 3M Pa on I TV2030. ( 0. 5M Pa speci f i cat i on) ( 0. 3M Pa/0. 5M Pa) 1023 = 614 ( D EC) Bi nary dat a of 614 ( D EC) i s 10 0110 0110 VALU E 1 0 0 1 1 0 0 1 1 0 SI G N AL M SB 10bi t 9bi t 8bi t 7bi t 6bi t 5bi t 4bi t bi t 2bi t LSB 1bi t I N PU T O N O FF O FF O N O N O FF O FF O N O N O FF By i nput t i ng 1224VD C bet w een com m on and

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 -13- Auxiliary axis number Auxiliary axis number Axis selection rotary switch Axis selection rotary switch Control Control setting switch setting switch axis No. axis No.