180

(PAT.PEND) Over length L(mm) Gripping moment Weight (g) Bore size (mm) Model (Nm) L MHW2-20D 68 300 20 0.30 MHW2-25D 510 25 0.73 78 905 MHW2-32D 32 93.5 1.61 2135 MHW2-40D 117.5 40 3.70 5100 Auto switch mounting at 4 locations MHW2-50D 154 50 8.27 At the pressure of 0.5 MPa MHZ Two finger types available.

Ionizer Series IZS31

Bar type Bar length Sensor Emitter cartridge type/Emitter material Bar length 300 mm 380 mm 620 mm 780 mm 1100 mm 1260 mm 1500 mm 1900 mm 2300 mm Symbol 300 380 620 780 1100 1260 1500 1900 2300 Without sensor Autobalance sensor [Body-mounting type] Nil E F G Symbol Nil C S J K Emitter cartridge type Emitter material With feedback sensor Autobalance sensor [High-precision type] Tungsten Silicon

AZ1000

in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig V3 L 1 H 2 4 10 40 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa Ports Code Ports 2 ports 3 ports 4 ports 3) Not available with SHP material. 4) PTFE recommended for applications such as within a process tool. 5) Source pressure rating is limited to 300

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

Port size: (inch) Output specification 11 13 19 PF2D504 PF2D520 PF2D540 3/8 1/2 3/4 Specification PF2D200/300 series PF2D300 series Symbol 1 2 Applicable monitor unit (monitor) model Output for monitor unit + analog output (1 to 5 V) Output for monitor unit + analog output (4 to 20 mA) Refer to pages 202 and 203 for Flow Switch Precautions.

SYJ300

(For details, refer to page 4-4-11.) 4-4-6

VEX1

entry Port 1(P), 2(A) 3(R) 1 8 1 8 01 1 02 G Grommet (Lead wire length 300 mm) 1 4 1 4 H Grommet (Lead wire length 600 mm) 1 4 1 4 02 3 03 D DIN terminal 3 8 3 8 DO DIN terminal (Without connector) 04 1 2 1 2 1 2 3 4 1 2 3 4 1 04 5 06 Body ported G Grommet (Lead wire length 300 mm) 10 1 1 1 H Grommet (Lead wire length 600 mm) 10 7 12 14 9 20 2 E Grommet terminal 1 4 1 T Conduit terminal

IDX-OM-U022

. / 3.8 2A 80VA 100W DC5V,2mA IDFA100F150F 3 4 3.8 IDX-OM-U022 4. 4.1 5 310 4.2 4.2.1 () 300 300 4.2.2 IDFA100F150F 4 1 4.1 IDX-OM-U022 4. 501015 ( ) ,0 IDFA100F150F 4 2 4.2 IDX-OM-U022 4. OFF 1. 2. 3. 5 4 4. (4 ) () O 5. O 6. O O 7. 3mm ) 8. 4 5Nm 9. ADH-E400 1 IDFA100F150F 4 3 4.2 IDX-OM-U022 4. 4.2.3 V ON 1. 2. 3. 4.

AMX-OM-Q015E

500 25 50 100 200 300 500 6 12 25 50 60 86 3 6 11 22 29 50 Purge air flow rate L/min(ANR) *Note3 Inlet air pressure MPa 0.7 Inlet air temperature oC 25 Inlet air saturation temperature oC 25 Ambient temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} *Note4 Regulator construction (about Type V) Relief type Port size 1/8 1/4

AMX-OM-Q018E

500 25 50 100 200 300 500 Outlet air flow rate L/min(ANR) 6 12 25 50 60 86 3 6 11 22 29 50 Purge air flow rate L/min(ANR) *Note3 Inlet air pressure MPa 0.7 Inlet air temperature oC 25 Inlet air saturation temperature oC 25 Ambient temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} *Note4 Regulator construction (about Type V)

2.0

Inscribed number 3 3 x 1 3 3A 1/8" x 1/16" 4 4 x 2 4 4A 5/32" x 1/32" 6 6 x 4 6 6A 1/4" x 1/8" KO Plug connector, Without connector G (Option) Grommet, 300 mm y Lead wire length Nil 300 mm 6 600 mm 10 1000 mm The plug connector is included but does not come assembled.

90

Annual cost reduction effect [Calculation conditions] Electric power cost: 1.55 yen/m3 [Work model] Working hours: 6000 h (250 days/year) Supply pressure: 1.0 MPa Set pressure: 0.2 MPa Comparison between IR3000-A and the current IR3000 Comparison between IR1000-A/IR2000-A and the current IR1000/IR2000 300 300 Annual cost of power consumed by compressor [1000 yen/year] 250 250 When 20 units

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

EX600-SEN7_8eng

(PORT2) 11 The power supply for output is properly. Green ON PWR(V) The power supply voltage for output is below 19 VDC. (When diagnostic parameter is enabled) Red ON Assembly Either of the following conditions are detected: The unit has not been configured correctly. The PLC is idle state.

EX600-SPN3_4.eng

(PORT2) 11 Sink/NPN (Positive common) Source/PNP (Negative common) Output type Assembly Setting and Adjustment 32 outputs Number of outputs Output CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

Digital Flow Switch

If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12. Minimum setting unit O Operating fluid temperature The fluid temperature range within which the product will meet all published specifications. Operating humidity range The ambient humidity range within which the product will meet all published specifications.

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

PFxx-OMO0007CN

-2No.PF-OMO0007CN 1 1.5 3) 3) 1 1 () -3No.PF-OMO0007CN () () -4No.PF-OMO0007CN () * (100 ) :050 -5No.PF-OMO0007CN * (15 / ) FG 49 N () IN IN OUT OUT () IN () -6No.PF-OMO0007CN *) 6 33 2 () () 10 m DC(-)() () -7No.PF-OMO0007CN * ( ) () CE 050 -8No.PF-OMO0007CN * ON , 10 /23 3 OFF (19 ) * OUT -9No.PF-OMO0007CN (11 ) SI L/min L (11 ) 1/8 1/4 3/8 1/2 -10No.PF-OMO0007CN N

MHx-OMZ0003

M8 8 P .18 M8 8 () NPN PIN 1 +24V DC24V 2 3 4 5 ON/OFF 6 ON/OFF 7 8 GND DC0V M8 2 M8 1 11 - 3-7. Z Y Y X Z Z X X Y Z -0.4 -0.8 48.4 12 - 4 (www.smcworld.com) 4-1.

MHx-OMZ0005

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 3 4M40.7 8 3.4 8 2 14 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 15 - 4-3.