Direct Operated Precision Regulator Modular Style Series ARP3000 1

0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL ARX20

Low torque Metal seal type Rotary joint

(cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C] 0.3 Rotational torque [N.m] MQR12 MQR8 MQR8 20 MQR4 MQR2 MQR12 0.2 10 0.1 MQR1 0 0 0 1000 2000 3000 0 500 1000 1500 2000 2500 3000 Rotation speed [min-1

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IDG60M, IDG100M are fitted with AMH micro mist separator with pre-filter. 1.77 3.53 5.29 Flow Flow Flow 10 25 50 100 200 300 500 600 750 1000 110 170 240 300 100 150 75 50 Single Type 76F (60C) Dew point Single Type 40F (40C) Dew point Single Type 4F (20C) Dew point 3.53 5.29 8.02 11.3 14.12 2.72 5.44 8.29 0.44 1.09 2.19 4.41 8.83 13.24 22.07 25.6 31.78 42.02 Model Inlet Model Inlet Model

Low torque Metal seal type Rotary joint Series MQR

(cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C] 0.3 Rotational torque [N.m] MQR12 MQR8 MQR8 20 MQR4 MQR2 MQR12 0.2 10 0.1 MQR1 0 0 0 1000 2000 3000 0 500 1000 1500 2000 2500 3000 Rotation speed [min-1

Compact Electro-pneumatic Regulator Series ITV0000

angle type 2m N S L Option Option Input signal 0 Bracket (option for single unit only) Current type 4 to 20mADC Current type 0 to 20mADC Current type 0 to 5VDC Current type 0 to 10VDC 1 2 Without bracket Nil 3 Flat bracket PWR ERR Option Built-in One-touch fitting type B For single unit SUP (VAC) EXH (ATM) OUT Symbol L bracket Metric size (light gray) 4 Nil PWR ERR Inch size (orange) C

DOC1020530

Set the total current capacity to 300 mA. 300 mA is the value applicable when all I/O signals are used. The current capacity can be decreased by reducing the number of I/O points. The illustration of the 24 V DC power supply is divided between input signal and output signal for convenience. However, they can be configured by one. 11.

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: G, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: G, Control Side Plumbing Thread Nominal: 3/8, Standard

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: G, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: G, Control Side Plumbing Thread Nominal: 3/8, Standard

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: G, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: G, Control Side Plumbing Thread Nominal: 3/8, Standard

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: NPT, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: NPT, Control Side Plumbing Thread Nominal: 1/4, Standard

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: NPT, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: NPT, Control Side Plumbing Thread Nominal: 1/4, Standard