Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: Hastelloy® C-22), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Gauge Port Out; 4-Gauge Port Out)], Connections, Inlet: 8 (NPT 1/2 Inch), Connections, Outlet: 8 (NPT 1/2 Inch), Gauge Port, Outlet 3: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Outlet 4: V3 [-30 in.Hg to 30

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: Hastelloy® C-22), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Gauge Port Out; 4-Gauge Port Out)], Connections, Inlet: 6 (NPT 3/8 Inch), Connections, Outlet: 6 (NPT 3/8 Inch), Gauge Port, Outlet 3: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Outlet 4: V3 [-30 in.Hg to 30

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 3P [3 Ports (1-In; 2-Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 3P [3 Ports (1-In; 2-Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge

Model: 33, Orifice: 4 (4mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 4 (220VAC 50/60HZ), Electrical Entry: C (Conduit), Surge Suppressor: Non, Rectifier: R (AC Class B Coil w/Full-wave Rectifier)

Model: 33, Orifice: 4 (4mm), Style: 4 (COM, Single Unit), Option: S (C37/Cu, Seal: Poppet-FFKM, Fixed-PTFE, Class H, Steam), Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 4 (220VAC 50/60HZ), Electrical Entry: C (Conduit), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil)

Model: 33, Orifice: 4 (4mm), Style: 4 (COM, Single Unit), Option: S (C37/Cu, Seal: Poppet-FFKM, Fixed-PTFE, Class H, Steam), Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 4 (220VAC 50/60HZ), Electrical Entry: C (Conduit), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 33, Orifice: 4 (4mm), Style: 4 (COM, Single Unit), Option: S (C37/Cu, Seal: Poppet-FFKM, Fixed-PTFE, Class H, Steam), Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 4 (220VAC 50/60HZ), Electrical Entry: C (Conduit), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil)

Model: 33, Orifice: 4 (4mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 4 (220VAC 50/60HZ), Electrical Entry: G (Grommet), Surge Suppressor: Non, Rectifier: R (AC Class B Coil w/Full-wave Rectifier)

Model: 33, Orifice: 4 (4mm), Style: 4 (COM, Single Unit), Option: G (Stainless Steel, Seals: NBR, Class B), Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 4 (220VAC 50/60HZ), Electrical Entry: G (Grommet), Surge Suppressor: Non, Rectifier: R (AC Class B Coil w/Full-wave Rectifier)

Model: 33, Orifice: 4 (4mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 4 (220VAC 50/60HZ), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: Non, Rectifier: R (AC Class B Coil w/Full-wave Rectifier), Bracket: B (Bracket)

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Function: 4 (3 Position Exhaust Center), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 4 (220VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Sub-plate Plug-in 1/4, Non Plug-in 1/4, Direct Ported P,A,B Ports 1), Thread: T (NPTF

Function: 4 (3 Position Exhaust Center), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 4 (220VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Sub-plate Plug-in 1/4, Non Plug-in 1/4, Direct Ported P,A,B Ports

Function: 4 (3 Position Exhaust Center), Body Style: 1 (Base Mounted Non Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 4 (220VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Sub-plate Plug-in 1/4, Non Plug-in 1/4, Direct Ported P,A,B Ports 1), Thread