ZSE1/ISE1

x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

ML1C

Range (mm) No. of auto switches mounted Applicable auto switch Bore size (mm) 25 6 4 D-M5, D-M5W, D-M5T D-E7A, D-E80A Auto switch model 40 6 4 D-M5, M5W, M5T D-E7A, E80A 32 6 4 10 15 5 10 1 pc. 2 pcs.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18

MB

Thread size M2.5 x 0.45 x 25 l M3 x 0.5 x 30 l M5 x 0.8 x 40 l Bore size (mm) 32 40, 50, 63 80, 100 Stroke (mm) 2 3 3 Pulling force 4.9 N 10 N 24.5 N C76 C85 e Release lock when mounting or adjusting the cylinder. Remove bolt under normal operations. It may cause malfunction of locking and release. If mounting is done with lock engaged, lock mechanism may be damaged.

PF3A7xxH.eng

(If the button is pressed for less than 2 seconds, the setting will be returned to P.)

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Basic weight 0.74 P Additional weight 0.11/50 stroke P Cylinder stroke 100 stroke P Locking weight 0.08 (Locking at head end, manual release non-locking style) 0.74+0.11X100/50+0.08=1.04kg All mounting bracket 0.11 0.16 0.26 0.27 0.42 0.56 Additional weight per 50 stroke Single knuckle 0.15 0.23 0.26 0.26 0.60 0.83 Accessories Double knuckle (with pin) 0.22 0.37 0.43 0.43 0.87 1.27 1.7-

IDX-OM-W014

PRS AC200/200,220 (50/60Hz) OLR C01 2 2 1 L C11 N TB PRS PE PC TB P FM C11 200V C11200V IDU6E-10 IDU6E-20/23 ILS ILS PTC AC200/200 (50/60Hz) AC230V (50Hz) PTC AC200/200,220 (50/60Hz) AC100/100,110 (50/60Hz) C01 L CM CM PC N OLR OLR PE TB PRS PRS FM P P FM C11 6-5 6 2 IDU Series 6-4 6 4 IDX-OM-W014 7 C 7 C 7-1 7-2 1) 2) IDU Series 7-1 71 IDX-OM-W014 8 K 8 K 8-1 ( ) 8-2

VFR3000-OMY0001

N.O.3 3 1) 0.9MPa 2) 3) 50 4) 2 5) P ARBF3000,ARBF4000 ARBF3000,ARBF4000 ,P AB ARBF3050ARBF4050 A B P 1.0MPa 1) B A 0.10.83MPa 2) -560 () 3) N.C. N.O.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Reduced maintenance (No need for control or replacement) Positioning repeatability: 0.01 mm*3 *1 Compared with the LEFS *2 Size 40, Mep, Overhang: 300 mm *3 Excludes the lead H Step Motor Controller JXC Series p. 3 Battery-less Absolute Type (Step Motor 24 VDC) MDirect input type MStep data input type LEKFS Series P-E21-6 Electric Actuator High Rigidity and High Precision

CRJ

and steel piping P = Operating pressure [MPa] l = Length of piping [mm] Internal cross section a (mm2) Nominal size O.D.

AN

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. Design JIS symbol Warning 1 The exhaust port could become blocked by the clogging of the silencer. Therefore, make sure to provide a safe design so as not to cause the system as a whole to malfunction.

AMP

P-80 (YG)

Regulator AR30 to 60

AR30 Option Thread type Port size Symbol Nil B E G P Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 40 Contents With bracket With square embedded type pressure gauge (with limit indicator) Round pressure gauge (with limit indicator) Panel mount (with set nut) Metric thread (M5) Rc NPT G Nil Note 1) 1 4 02 03 04 06 10 N F 3 8 Note 2) 1 2 3 4 1 Note 1) Bracket assembly is not

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

and steel piping P = Operating pressure [MPa] l = Length of piping [mm] Internal cross section a (mm2) Nominal size O.D.

Filter Regulator AW30, 40

Note 3) For M5 and NPT thread types. Under the New Measurement Law, this type is only sold outside Japan. (The SI unit is used inside Japan.) Note 2) Note 1) Drain guide is NPT1/4 (applicable to AW30 and 40), and the exhaust port for auto drain comes with 3/8" Onetouch fitting (applicable to AW30 and 40). Note 2) Drain guide is G1/4 (applicable to AW30 and 40).

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Consult P/A.

SYJ300-OMU0003

No.SYJ300-OMU0003 -2- / *3) 1 1.5 *3)1 1 () No.SYJ300-OMU0003 -3- SYJ Series 3 / 1 DC () () () () EXH () () 4 No.SYJ300-OMU0003 SYJ Series 3 / ( ) 1 ( ),COMCOM 2 C-R () C-R Sol.1: DC 3% AC 8% Sol.2: (SSR)AC 1) (C-R) OFF 2) () 1.NPN 3) AC,, , SSR SSR 1) Sol.1: Sol.2: 2) ,1V + 2.NPN 5 No.SYJ300-OMU0003 SYJ Series 3 / 1 -10 1)M5 M3 1/4 0.4~0.5Nm M5 1/6~1/4 1~1.5Nm ()

High Vacuum L Type Valve

Refer to Chapter 3, Product Specific Precautions 3 (P. 7 to 8) and Chapter 5, Construction and Dimensions (P. 11) for maintenance parts. Parts with the indication of "Maintenance part" can be replaced. 4. SMC specified parts should be used for service. Refer to the Construction / Maintenance parts table. 5.

LEF-OM006xx

INP 1 INP ON 0.50 -35- 6.3 0.1mm [Nm] mm LEF16 M4x0.7 1.5 6 LEF25 M5x0.8 3.0 8 LEF32 M6x1 5.2 9 LEFS40 M8x1.25 12.5 14 A A mm) mm LEF16 M3 3.5 20 LEF25 M4 4.5 24 LEF32 M5 5.5 30 LEFS40 M6 6.6 31 40mm 6.4 6 /1000km /500 -36- 1. 2. 3. 1. 2. a. b. c. d.