LV50-OMQ0002

min 2.5 to 100 L/min 5 to 200 L/min Display range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Set point range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Zero-cut flow *2 0.4 L/min 2.0 L/min 4 L/min Min. setting unit 0.1 L/min 0.5 L/min 1 L/min Accumulated volume perpulse (Pulse width=50ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse Fluid temperature *3 0 to 85oC (No condensation or freezing

PFxx-OMO0004CN

min 2210 L/min 0999,999,999 L 1 L/min 1 L (50 msec.) 1 L/pulse 2 2 5 00.75 MPa 1.0 MPa 3 5F.S.(00.75 MPa0.35 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -65No.PF-OMO0004CN-E PFMB7201 15 V420 mA 1 k 6 24 V 600 12 V 300 7 0.4 V () 30 msec. 8 9

PFxx-OMO0007CN

min 550 L/min 10100 L/min 20200 L/min 50500 L/min / 12 0.510.5 L/min 2.552.5 L/min 5105 L/min 10210 L/min 25525 L/min / 0.1 L/min 0.5 L/min 1.0 L/min 2.0 L/min 5.0 L/min / 09 L / 1 L 3 4 -50 kPa0.5 MPa -50 kPa0.75 MPa 1.0 MPa NPN PNP 3 () 3 80 mA DC30 V(NPN ) NPN1 V (80 mA ) PNP1.5 V (80 mA ) 1 s 1F.S. 2F.S. 5F.S. 0 3 (3 digits) 50 ms 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

(mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., DIGITAL PRESSURE SWITCH, PRESSURE SWITCH, ISE1-6, 43 lb

Compact Cylinder High Magnetic Field Design CDQ2BP Series

P8 Auto Switch Mountinq Position Minimum Allowable Stroke 23.5 12.5 poEirioninq oder lo maximizelhe high magneticlield rcsist Ulity. ;' l^t',. .1 ffiR '-T lls.{ +-!! : : l FA Jfr-_'+i Li:t CQ2 Single Rod Clevis CQ2 Double Rod Clevis !-{ TJ H l ! k CQ2 Double Rod Clevis Pin fhldfls$isfirco $enies Handling precautions 1 .

CDQ2BP series

P8 Auto Switch Mountinq Position Minimum Allowable Stroke 23.5 12.5 poEirioninq oder lo maximizelhe high magneticlield rcsist Ulity. ;' l^t',. .1 ffiR '-T lls.{ +-!! : : l FA Jfr-_'+i Li:t CQ2 Single Rod Clevis CQ2 Double Rod Clevis !-{ TJ H l ! k CQ2 Double Rod Clevis Pin fhldfls$isfirco $enies Handling precautions 1 .

PFMB.eng

[L/min] PF-OMP0003-A

Peltier-type Chiller Thermo-con/ Compact Type

) [mg/L] 50 or less p Standard item Acid consumption amount (at pH4.8) [mg/L] 50 or less p Total hardness [mg/L] 70 or less p Calcium hardness (CaCO3) [mg/L] 50 or less p Ionic state silica (SiO2) [mg/L] 30 or less p Iron (Fe) [mg/L] 0.3 or less p p Copper (Cu) [mg/L] 0.1 or less p Sulfide ion (S2) [mg/L] Should not be detected. p Ammonium ion (NH4+) [mg/L] 0.1 or less p Residual chlorine

Electro-Pneumatic Valve NVEP/NVEF Series

A Flow Rate Type (NVEfl which controls air flow by varying current through the solenoid. fi#fr $.E#E ,q Ff i l F l E K f:-J r r l tr-t NVEF2l2c) vEF2isO a t{YEF2l4O Flow Rate (NVEF:I) B -P{ Reasure ryp (l{vEP3t d | | vEP3r20 F'---r-. .l t EBrrO Index 2. 3 Port Electro-Pneumatic Proportional Valve NVEF, NVEP Specifications P O H o w t o O r d e r . . . . . . . .

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

IDX-OM-W093

O K H IDX-OM-W093 7.3 Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J M N O L K H mm A B C D E F G H J K L M N O P IDF60 R1 307 745 605 161 405 681 71 330 704 355 126 46 12. 94 5 IDF70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDF80 R2 438 957 863 169 480 958 219 78 100 11. 0 463 916 485 170 IDF90 13 IDF80 IDF90 mm IDF60 745 957 () () 704 916

NVEPA|VEFseies

A Flow Rate Type (NVEfl which controls air flow by varying current through the solenoid. fi#fr $.E#E ,q Ff i l F l E K f:-J r r l tr-t NVEF2l2c) vEF2isO a t{YEF2l4O Flow Rate (NVEF:I) B -P{ Reasure ryp (l{vEP3t d | | vEP3r20 F'---r-. .l t EBrrO Index 2. 3 Port Electro-Pneumatic Proportional Valve NVEF, NVEP Specifications P O H o w t o O r d e r . . . . . . . .

70pvvna

170 28.3 33.3 LVH Port size 32A, 40A, 50A LVD LVQ Applicable cable O.D. 6 to 8 (D, DL) LQ LVN K (Terminal with indicator light: DL) TI/ TIL Manual override (Non-locking) Pilot port L (Conduit terminal: T) PA J (DIN terminal: D) I (Conduit: C) H (Grommet: G) PAX G (Air operated) PB Main port Main port Rc Pilot port Rc A B C D E F G H I J K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1

IC

AV 12 VDC (Max. 300 mA) with accuracy of 12 to 14.4 VDC Note 2) AU Power supply output 24 VDC (Max. 300 mA) with accuracy of 22.0 to 26.8 VDC q0 to 10 VDC (Output resistance: 6.5 k or more with accuracy of 0.5%F .S. or less) w4 to 20 mA (Output resistance: 800 or less with accuracy of 0.5%F .S. or less) Output: 4 points AF Command output AR Courtesy of Steven Engineering, Inc.-230 Ryan Way

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(

IDX-OM-V020

O K H IDX-OM-V020 Chapter 7 Documents 7.3 Dimensions Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J Unit: mm M N O L K H Unit: mm Model Port Size A B C D E F G H J K L M [N] O P IDFA60 R1 307 745 605 161 405 681 71 330 704 355 126 94 46 12.5 IDFA70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFA80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916

VXA21/22

(P1+0.1013) l/min(ANR) Calculation by effective area Q=109.6.S.(P1+0.1013) l/min(ANR) Water How to Read the Graph In case of a flow of 2 l/min.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Front matter 8 Applicable Fluid Check List Direct Operated 2 Port Solenoid Valve Series VX21/22/23 All Options (Single Unit) Body, Shading coil material Option symbol Seal material Coil insulation type Note NBR FKM EPDM PTFE FKM EPDM NBR FKM EPDM PTFE FKM FKM FKM EPDM PTFE PTFE FKM Nil A B C D E G H J K L M N P Q S V Note 1) B Brass/Copper H B Note 1) Stainless steel/Silver High corrosive