2

Example) IS10M-30-6LP Symbol Description Nq Body size 20 30 40 50 a Set pressure range Nil 0.1 to 0.4 MPa V V V V 6 Note 1) 0.1 to 0.6 MPa V V V V + Semi-standard Nil 0.5 m V V V V L 3 m V V V V Z 5 m V V V V + b Lead wire length Nw 23 15 (13) c Pressure unit of the scale plate Nil MPa V V V V P Note 2) MPa/psi dual scale V V V V (23) (5000) (3000) (500) Note 1) Set pressure range of 6P (

A

I S T O N R O D C L E V I S GKM: S T E E L, Z I N C C H R O M AT E P L AT E D Cyl.

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D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style .

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Rated voltage S L Z For VX21: VVX21-3A-P For VX22: VVX22-3A-P For VX23: VVX23-3A-P Voltage With surge voltage suppressor With light and surge voltage suppressor AC/ DC Voltage symbol 1 2 3 4 7 8 J 5 6 With light 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V Seal material: PTFE AC How to Order Manifold Assemblies (Example) Enter the valve and blanking plate to be mounted under the manifold

Battery-less

LEFS v v E339743 v v v v 11-LEFS v v E339743 v v v v 25A-LEFS v v E339743 v v v v LEFB v v E339743 v v v v LEJS v v E339743 v v v v 11-LEJS v v E339743 v v v v 25A-LEJS v v E339743 v v v v LEJB v v E339743 v v v v LEY25/32/63 v v E339743 v v v v LEY100 v LEYG v v E339743 v v v v LESYH v v AC servo motor Compatible

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EB-(T/Y)1JB10 V V V V V V ZP3EB (T/Y)1JB30 V V V V V V ZP3EB-(T/Y)1JB50 V V V V V V ZP3EB-(T/Y)2JB10 V V V V V V V V ZP3EB-(T/Y)2JB30 V V V V V V V V ZP3EB-(T/Y)2JB50 V V V V V V V V * Select "T" when selecting a T type buffer assembly.

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Standard equipped with shock absorber -X 75 100 125 150 200 250 300 20 25 32 40 50 63 80 100 20 25 32 40 50 20Series MGC P . 8-21-6 Data Series MGG V V V V V V V V V V V V V V Guide Cylinder Guide Table Cylinder with Turntable Series MGC Long stroke Bore size (mm) Standard stroke (mm) Compact type of series MGG Lightweight, space-saving 250 300 350 400 450 500 600 700 800 900 1000 1100 1200

V100

0.5 (With indicator light: 0.55) (A) 2 0.9 (With indicator light: 1.0) 100 V 110 V [115 V] 1.0 (With indicator light: 1.1) [1.1 (With indicator light: 1.2)] 3 (R) 1 (P) 1 (R) 3 (P) Apparent power (VA) AC 1.8 (With indicator light: 1.9) 200 V 1.9 (With indicator light: 2.0) [2.2 (With indicator light: 2.3)] 220 V [230 V] Made to Order Specifications (For details, refer to page 4-3-17.)

SV

0 V 0 V 24 V G D G D SI unit SI unit Master unit D 0 V24 V G D 0 V24 V G D 0V 24V G D 0V 24V L2 L1 G LINE1 LINE2 SHIELD L1 L2 Power supply 24 V 0 V 0 V 24 V SHIELD SHIELD Transmission line L1 L2 FG 24 V 0 V L1 L2 FG 24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Crimped connector SL-J1A Power supply 24 V 0 V 0 V 24 V Type 3 ground Type 3 ground

Modular Design with Uniform Body Style

Series AWmK Series p. 76 p. 76 p. 94 p. 94 Port size Port size Port size Port size 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 Size 20 V V V V V V V V Size 30 V V V V V V V V Size 40 V V V V V V V V V V V V Size 40-06 V V V V Size 50 V V V V Size 60 V V V V V V Lubricator New Spacer p. 48 AL Series p. 87 Port size 1/8 1/4 3/8 1/2 3/4 1 Size 20

Vacuum Unit

V V p. 13 Pressure switch for vacuum V Manifold Manifold p. 14 V V V With valve V V Single unit p. 15 V V Pressure sensor Vacuum Pump System V V V V With valve V V For Manifold p. 16 V V Pressure sensor V Manifold Manifold p. 17 7 C O N T E N T S Vacuum Unit ZK2mA Series VEjector System Single Unit Ejector + With Valve + Without Energy Saving Function p. 9 Single Unit Ejector

Air Cylinder

V V V V V V V V Standard V V V V V V V V V D v v v v v v v V v CM2lF v v v V V v CM2l-l J K V CM2lH V v v V v v v V 10-, 11v v v v v v v 25ANote 6) CM3 CG1 CG3 Note 5) JMB V V V v V v 20Note 4) v v v V v CM2l R V V v V CM2lX v v CM2lM Note 5) MB MB1 v XB6 CA2 v v XB7 v v v v v XB9 v v v v v v XB12 CS1 v v v XB13 CS2 v XC3 v v v XC4 Note 5) v v v XC5 v v XC6 v v v v v XC8

Smooth Cylinder/Low Speed Cylinder

V IC circuit 12 V 5 V, 12 V 5 V IC circuit IC circuit IC circuit MQ With diagnostic output (2-color indication) A96V A93V A90V 100 V 100 V or less 100 V, 200 V 200 V or less 24 V or less 3-wire (NPN equivalent) Yes RHC No Yes No Yes No Grommet 12 V Relay, PLC RZQ Connector 24 V 2-wire IC circuit PLC 12 V Terminal conduit Yes 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic

5

V V V V V V V MB 20 V V V V V V Tie-rod V CA2 25 V V V V V V V CS2 32 V V V V V V V Compact V V V CQS 40 V V V V V V V V V V CQ2 Free mount V V CU 50 V V V V V 63 V V V V V v: Standard 80 V V V V V 100 V V V V V 125 V 140 V D160 V P. 141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot

smcmaintenancepartslist

12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161 Sine Rodless Cylinder/Direct Mount Type Series REAR 10, 15 Replacement Procedure is P.316 Construction @2 @3 @6 @7 !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal Closed center Exhaust center 6 V Grommet 4/25/3 (A/BEA/EB) Double 5 V Single { } 3 V SJ P.108 SY3 20 0.65 SY Body ported Base mounted Body ported Base mounted SY5 20 2.4 SV SY7 20 3.3 SYJ SY9 20 SZ 8.6 P

&snac

i n o f e a c n s e p a r a t 0 t i n s t a l l e d i n l D G 3 * M ( V ) , i DGSxl.l(v ) at teast 0nce a rn0nth ' f o l t o v i n g t h e c l e a n i n g P r o c e d u r e b e l o w , t 0 G 5 l ( M ( v ) , s h o u l d b e d o n e a f t e f o p e r a t i o n o f a o P r o x i m a t e 2 Y e a r s ' R e f e r t o t h e r e P t a c e i n s P r o c e d u f e b e l o v / . l f P r e s s u r e

2/3 Port Valve

M G H J K A H G, J S Q E P K K A H B J V M V M E, X N, P Polyacetal B Stainless steel L Stainless steel, Silver Trichloro ethane Trichloroethylene Polyacetal M (Non-leak) N P Q S T Perchloroethylene Brake oil Helium Non-leak(105atm cc/sec) Water Stainless steel H Brass, Copper (High temperature) B Polyacetal X V (Non-leak) Note 1) The leakage amount(105atm cc/sec) of "V", "M" option is

Modular F.R.L. Units

Nq Body size 20 30 40 50 60 Symbol Description Nw Pipe thread type Nil Rc V V V V V N*1 NPT V V V V V F*2 G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V V 10 1 V V + Ne Port size a Mounting Nil Without mounting option V V V V V B*3 With bracket V V V V V + Option Nr Nil Without auto drain V V V V V C*4 N.C.

High Vacuum Angle Valve

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 427 B XLF/XLFV Series Specifications Model XLF(V)-16 XLF(V)-25 XLF(V)-40 XLF(V)-50 XLF(V)-63 XLF(V)-80 XLF(V)-100 XLF(V)-160 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLF 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLFV 5 to 50 Operating pressure