CC

Model CCVS CCVL Intermediate stop accuracy of CCVS: 50mm/s X 0.015sec.= 0.75mm in case of 50mm/s Response time 0.070.015sec. 0.110.02sec.

/OTHER), 1.10231 lb, ModelPressure rangeProof pressureFluidDimensionsPower supplyInputPower supply outputCommand outputSwitch outputSwitch responseDisplayDisplay accuracy Note 1)Display sampling rateTemperature characteristicsError indicationEnvironmentSensor typeSet value retentionPort sizeMaterialWeightIC30.5 MPa1.5 MPaAir/Non-corrosive gas48 x 48 x 100.512 to 24 VDC (15 W or more), Ripple

/OTHER), 1.10231 lb, ModelPressure rangeProof pressureFluidDimensionsPower supplyInputPower supply outputCommand outputSwitch outputSwitch responseDisplayDisplay accuracy Note 1)Display sampling rateTemperature characteristicsError indicationEnvironmentSensor typeSet value retentionPort sizeMaterialWeightIC50.9 MPa1.5 MPaAir/Non-corrosive gas48 x 48 x 100.512 to 24 VDC (15 W or more), Ripple

HRX-OM-Y098

Table 3.3-1 Power supply cable and earth leakage breaker (Recommended) Earth leakage breaker Terminal Power Recommended Cable Sensitivity block Model supply crimp Specifications Breaker of screw voltage terminal 1 size leakage diameter (A) current (mA) 4 cores x AWG10 HRL100-A-20 3-phase (4 cores x 5.5 mm2) R5.5-5 30 200V AC including (50Hz) ground M5 30 4 cores x 3-phase HRL200-A-20 40 AWG8

MLGP

Note 3117 2805 2494 2182 1870 1559 1247 935 623 3117 OUT 20 63 2803 2523 2242 1962 1682 1402 1121 841 561 2803 IN Switch mounting bracket Hexagon socket head cap screw (M2.5 x 0.45 x 8l) 2 pcs. Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

SY3000/5000/7000/9000

5 Port Solenoid Valve Body Ported/Single Unit Series SY3000/5000/7000/9000 How to Order 5 L SY 5 1 20 01 Series Bracket 3 SY3000 5 SY5000 Nil: Without bracket F1: With foot bracket A, B port size Thread piping 7 9 SY7000 SY9000 2 position single only Symbol Port size M5 x 0.8 SY3000 Applicable series M5 1 8 01 SY5000 1 4 SY7000 02 02 03 Type of actuation Coil specifications 1 4 Standard Nil

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

How to Order 10 SY 5 L 5 1 20 01 Clean series Bracket Series Nil: Without bracket F1: With foot bracket A, B port size 3 10-SY3000 5 10-SY5000 Thread piping 2 position single only Coil type Symbol Port size M5 x 0.8 10-SY3000 Applicable series 7 9 10-SY7000 10-SY9000 M5 Standard Nil 1 8 01 10-SY5000 T With power saving circuit (24, 12 VDC only) Actuation type 1 4 10-SY7000 02 02 03 2 position

Manifold Specifications

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) q Description Material Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

Manifold Specifications

VVZS3000-4-1 VVZS3000-4-2 18 x 15 x 1.5 7.5 x 4.5 x 1.5 VVZS3000-5-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS3000-5-1-1 (2) Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. Assembly part no.

Compact Proportional Solenoid Valve Series PVQ

Series PVQ10 Dimensions L plug connector PVQ13-L--M5 & + ! ! ' "()* % "#$ % ! ! ' ()* ( + #$ ( + Interface "#$ % & ' "()* % & ' M plug connector PVQ13-M--M5 , . & + ! ! ' "()* % "#$ % ! !

VK300

Port size (A port) Option M5 M5 x 0.8 01 1 8 Nil None With bracket (Not assembled) P, R port: M5 Note1) Applicable only for DIN terminal type Note2) For other rated voltages, please consult with SMC. F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.

LEF-OM002xx

) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400

HEC-OM-U015

HECR008-W HECR012-W 3000 3000 mentioned above. Switch off electrical supplies and ensure any high temperature parts have cooled to ambient temperature.

Air Slide Table Series MXS

Auto switches are shipped together (not assembled). 54 Air Slide Table Series MXS Specifications Bore size (mm) 8 12 16 25 6 20 M3 x 0.5 M5 x 0.8 Piping port size Rc 1/8, NPT 1/8, G 1/8 Air Fluid Double acting Action 0.15 to 0.7 MPa Operating pressure MXH 1.05 MPa Proof pressure 10 to 60C Ambient and fluid temperature MXU 50 to 500 mm/s Piston speed Rubber bumper (Standard, With stroke adjuster

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Spacer Bolt Top cover Top Cover Mounting Bolt Tightening Torque Bore size Tightening torque 25, 32 0.46 to 0.60 lbfft [0.63 to 0.82 Nm] 2 CKZT -X2797 -X2798 Dimensions CKZT S-X2797 Clamp arm (Refer to page 5 for details.) 16 93 52 53 40 10 34 13 250.1 34 3 170.05 44 A 50.1 180.1 28 +0.1 0 C B Proximity switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size

XLA Series

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

XLA- ∗ -F7NJ ∗ - ∗ Series

consumption cm3 Note 2 for 0.5MPa 19 46 200 360 660 1350 3000 5150 Port size M5 Rc 1/8 Rc 1/4 Weight kg 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 7 XL*-OML0013-B 3-2.

XLF Series

Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the

High Vacuum L Type Valve

to 8 2.5 to 11 4 to 18 4 to 18 6.5 to31.5 6.5 to 31.5 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM

XLG Series

1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2 Surface treatment for body Outside: hard anodized Inside