MHF2

1 w u MHZ MHF MHL MHR MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS !7 @0 !2 !5 o MHC MHT MHY MHW MRHQ Misc. !8 y !9 !4 r t e !6 DComponent Parts 20Material Note Material No. Description No.

Auto Switch Guide

L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.25 f-t-+-t---t-+--j--+--:--t--+-I Set point -~V '" Q. ::; O Mount vertically. c.> 0.2 :; :2 l' Q. Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

Vacuum Module Series ZX

Electrical entry 3 Note) Compatible with ZX1-VJ324Mand ZX1-VJ314only. 5 6 V S R L LN LO M MN MO G H Connector (0.3 m) Connector (w/o lead wire) Without connector Connector (0.3 m) Connector (w/o lead wire) Without connector Grommet (0.3 m) Grommet (0.6 m) Note) In the case of ZX1-VJ114, M, MN and MO cannot be used.

AWM20 to AWM40

w t t q q IN OUT IN OUT e y y e r u r u Drain Drain Component Parts No.

AWM20 to AWM40

w t t q q IN OUT IN OUT e y y e r u r u Drain Drain Component Parts No.

MK

e r t y u i o !

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ In addition to the models in the above table, there are some other auto switches that are applicable.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ In addition to the models in the above table, there are some other auto switches that are applicable.

One-touch Fittings

type 8 to 16 4, 6 M M L Release button dimensions X X *1: D is maximum diameter.

SMC Pneumatic Clean Series

3.3 through B 3 3 3 11.5 + Stroke 18 + Stroke 24 + Stroke A Built-in magnet [O] [Auto switch] [P] 16.5 + Stroke 23 + Stroke 29 + Stroke Rod end male thread Rod end nut / Accessory (Option) Rod end nut S X W V U Q R T (mm) (mm) Rod end male thread Applicable bore size V W X U R S T Q Part no.

Manifold Specifications

Round head combination screw VQ7 ( ) M3 x 8 With spring washer EVS Blanking plate VZ5000-68-1A VZ5000-68-1A VFN Manifold gasket Applicable Plug Assembly (D-sub connector cable assembly) Cable length 1.5 m 3 m 5 m 8 m Assembly part no.

CP95

1q ye t !5 !9 !4 !7 !3 w A @0 A' Sectional view A-A' iu Component Parts No. Description Material q Rod cover Aluminum die-casted w Head cover Aluminum die-casted e Cylinder tube Aluminum alloy r Piston rod Carbon steel t Piston Aluminum alloy y Cushion ring Brass u Tie-rod Steel i Tie-rod nut Steel o Rod end nut Steel !0 Snap ring Steel for spring !1 Bushing Lead-bronze casted !

CP95

1q ye t !5 !9 !4 !7 !3 w A @0 A' Sectional view A-A' iu Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts No.

NCRBIBwserbs

Switch with left hand mounting A t r t fit gI Switch with right hand mounting t[ n-r ffi I+l+| + t 2 switches With right hand moun0ng D-8G&2 D6A&1 Rotation Speed Range Model 20--{.03-0.3sec/90' Model 30-O.04-0.3sec/90" lf a rotation speed is used slower than 0. 3sec/90" sticking may occur. _n_ | d l l"l l l n , t d .

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 86.00000 lb