C95Series

0.8 V or less 3 V or less 14 Vorless Leak current 24 VDC: 10).1A or less 24 VDC 10).1A or less 24 VDC: lmA or less 100 VAC: 1mA or less 200 VAC: 1.5mA or less Indlcetor lamp.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50, 63 80, 100 125 GKM10-20 GKM12-24 GKM16-32 GKM20-40 GKM30-54 +0.5 +0.15 +0.5 +0.15 +0.5 +0.15 +0.5 +0.15 +0.5 +0.15 M10 x 1.25 10 40 10 10 52 20 20 12 12 62 M12 x 1.25 12 48 24 24 16 16 83 M16 x 1.5 16 64 32 32 M20 x 1.5 20 80 20 20 105 40 40 M27 x 2 30 110 30 30 148 54 55 Piston Rod Ball Joint KJ (ISO 8139) l l3 d6 (Max.) l d3 b1 h12 h d1 H9 l3 Part no.

Multi-Axis Step Motor Controller

PLC VElectric actuators *1 Power supply for I/O signal 24 VDC VI/O cable (Option) p. 15 Part no.

10

143 40 M14 x 1.5 19 27 40 1/4 11 97 4 9 24 152 50 M18 x 1.5 19 31.5 43.5 1/4 11 106 5 10.5 24 168 63 M18 x 1.5 19 31.5 43.5 3/8 11 106 9 12 24 168 80 M22 x 1.5 23 38 56 3/8 21 132 11.5 14 40 208 100 M26 x 1.5 23 38 56 1/2 21 132 17 15 40 208 100 151 110 165 118 180 118 180 150 226 150 226 420 Air Cylinder: With End Lock MBB Series With Mounting Bracket Axial foot: (L) / Locking at head end

CQS

D-F9BAL Symbol A B W HS CQ2 Double acting: single rod, Single acting: single rod/spring return, spring extend 4.5 3.5 14.5 16.5 12 MU Bore size (mm) 5 3 15 18.5 16 9 6.5 11.5 22 20 10 8.5 9.5 24 25 Long stroke 8 10 16.5 8 12 8.5 9.5 8.5 18.5 16 Bore size (mm) 12 15 22 3 20 13 17 1 24 25 Anti-lateral load 9 4 14 16.5 12 8.5 4.5 13.5 18.5 16 Bore size (mm) 12 8.5 9.5 22 20 13 10.5 7.5 24 25

Compact Type

Auto Switch Specifications Grommet PLC: Programable Logic Controller D-F9BAL (with indicator light) Water (coolant) resistant type D-F9BAL Switch model 2-wire Wiring type Output type Applicable load 24 VDC relay, PLC Power supply voltage Current consumption Load voltage 24 VDC (10 to 28 VDC) Load current 5 to 30 mA Internal voltage drop 5 V or less Leakage current 1 mA or less at 24 VDC

Table of Contents

(Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No. VVQ1000-57A-3 2 pcs. per one 16 16 24 18 24 16 stations 16 stations 16 stations 14 14 8 Max. points When ordering DIN rail only Negative Common Specifications DIN rail no.: AXT100-DR-n Refer to the DIN rail dimension table for determining the length.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Stations are counted starting with station 1 on the D side. 60P Flat cable type (26 pins) Without power supply terminals With power supply terminals Positive common Negative common Common 26 26 26 Pos. pin Pos. pin (common) 25 25 25 SOL.B 24 24 Neg. pin (common) Neg. pin Station 12 24 23 23 SOL.A 23 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

DC Dimensions page 24 (manifold) 18 19 Low Power Consumption Type Series VX21/22/23 For Water, Air Solenoid Coil Electricity Specifications Electric Circuit Diagram Power saving circuit Applied voltage 24 V With power saving circuit (There is the polarity.

V

83.1 75.6 81.1 73.6 52.8 45.3 30.7 26.7 19 21 39 ASV410F-01-10S 10 R(PT)1/8 12 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 30.7 26.7 21 23 41 T H R E A D ASV410F-02-08S 8 R(PT)1/4 14 19.3 15.2 24 83.1 75.6 81.1 73.6 52.8 45.3 34.7 28.7 19 21 47 ASV410F-02-10S 10 R(PT)1/4 14 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 34.7 28.7 21 23 49 PT* Remove (N) when ordering N NPT ASV410F-03-08S 8 R(

CL

24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

Modular Design with Uniform Body Style

77.8 60.3 42 24 AC20-D IS10E-30-D 1/4, 3/8, 1/2 27 85.8 64.3 53 30 AC30-D IS10E-40-D 1/4, 3/8, 1/2, 3/4 30 93.8 68.3 71 36 AC40-D Max. operating current 24 VAC, DC or less: 50 mA 48 VAC, DC or less: 40 mA 100 VAC, DC or less: 20 mA 8.5 IS10E-50-D 3/4 31 96.8 69.8 71 36 AC40-06-D 1 46 * For detailed specifications of the IS10 series, refer to the IS10 series section on the SMC website: https

Support Guide/11-LEFG Series

Note 4) When the suction flow rate is 0 L/min, the particle concentration is measured during operation without suction. 510 A Particle Generation Characteristics 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Particle Generation Characteristics Step Motor (Servo/24 VDC), Servo Motor (24 VDC) 11-LEFS16 Speed 500 mm/s 11-LEFS25 Speed 500 mm/s 10 10 LEF

2–4

Wiring type 2-wire Output type Applicable load 24 VDC relay, PLC Power supply voltage Current consumption Load voltage 24 VDC (10 to 28 VDC) Load current 5 to 30 mA Internal voltage drop 5 V or less Leakage current 1 mA or less at 24 VDC Caution Actuated position . Red LED lights up Optimum operating position .

AC

Model Port size Q M B B A B C D P E F G H J K L M5 x 0.8 25 40 53 70 75 90 95 66 97.5 129 165 169 244 258 7 11 14 18 20 24 24 25 40 53 70 70 90 95 86.5 120.5 27.5 40 56 73 73 AF1000 AF2000 AF3000 AF4000 AF4000-06 AF5000 AF6000 8, 1 4 1 17 16 17 14 23 23 30 41 50 50 70 70 27 40 54 54 66 66 22 23 26 25 35 35 5.4 6.5 8.5 8.5 11 11 8.4 8 10.5 10.5 13 13 40 53 70 70 90 90 2.3 2.3 2.3 2.3 3.2 3.2

Round Type Low Pressure Hydraulic Cylinder Series CH
M

1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

SZ3000

Co., Ltd. 6 Cassette Type Manifold Series SZ3000 Manifold Electrical Wiring 60F D-sub connector type (25 pins) Without power supply terminals With power supply terminals Positive common Negative common 13 13 13 Common Pos. pin Pos. pin (common) SOL.B Station 12 12 25 12 25 12 25 SOL.A Light/Surge voltage suppressor Neg. pin (common) Neg. pin 24 24 24 SOL.B Light/Surge voltage suppressor

Tie-rod Type Hydraulic Cylinder

34 35 1/2 77 140 12 20 16 100 340 160 43 100 M16 x 2 M33 x 2 42 9 174 140 45 38 36 22 28 27 38 40 3/4 94 159 12 24 20 108 375 420 CHAW Series Tie-rod Type Hydraulic Cylinder Double Acting/Double Rod Foot type: CHAWL CHQ CHK CHN H + Stroke H K F T T V V 2 x Rc P 4 x J GA F GA A MA a CHM A MA a Cushion adjustment screw Air release R (max.)

ISO Standard Hydraulic Cylinder

27.5 Hs 25 29 37 43 54 Hs 31 34 41 47.5 55.5 Hs 32.5 36 41 46.5 57 66 Ht 25 30 37.5 43.5 56.5 64.5 Hs 38.5 43.5 49 59.5 69 Ht 30 37.5 43.5 56.5 64.5 Ht 28.5 36 42 54.5 61.5 A 14 22.5 22.5 24.5 27.5 B 4.5 7 6 8 10 14.5 A 15.5 24 24 26 29 32.5 B 9.5 12 11 13 15 19.5 A 16 16 18 21 24.5 B 4 3 5 7 11.5 A 12.5 12.5 14.5 17.5 21 B 0.5 0 1.5 3.5 8 A 16.5 16.5 18.5 21.5 25 B 4.5 3.5 5.5

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

38 11 13 20 26 22 31 41 50 59.5 79 6 7.5 9.5 11.5 14 11 14 19 24 30 0.15 0.29 0.56 1.04 2.6 11 13.5 16 20 22 22 27 32 41 46 0.75 1 1.25 2 2.5 1300 3100 5000 7900 15300 6000 11000 18000 28000 54000 8-25-25 25 Series MGZ/MGZR Proper Auto Switch Mounting Position (Detection at stroke end) D-M9N/M9P/M9B D-F9NW/F9PW/F9BW A 28 28 26 D-A9, A9V D-F9BAL Bore size (mm) A 27 27 25 A 24 24 22 B 7 7