Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder 63: L 0 -0.2 8 x V Effective thread depth Y H A B E G Mounting nut width across flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22
C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108
Bellows protection structure Wiper Detail drawing OPEN 528 Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Height
For polyurethane tubes, 22 colors other than the ones above are available. 1114 Series ZFC100/200 Made to Order Specifications Please contact SMC for detailed specifications, dimensions and delivery. Air Suction Filter with Metal Case 1 Max. operating pressure 0.5 MPa For the standard type, the max. operating pressure is up to 0 kPa.
Applicable dryer Capacity Model Inlet voltage Outlet voltage A B C D E F Weight (kg) 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) IDF-TR500-3 15 Single phase Single turn 100 VAC (50 Hz) 110 VAC (60 Hz) IDF1E-10 to 8E-10 IDU3E-10, 4E-10 500 VA 230 207 190 210 160 9 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) IDF-TR500-4 22 11 13 Accessory (Option) Base Integrated with a Transformer
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J K Draft air outlet A B D E Power cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M HA AT Model IDUS3E IDUS4E Port size A B C D H K J L M E F G 297 330 315 380 260 470 540 85 130 350 325 440 Rc 1/2 ID 85 130 Rc 1/2 440 260 560 540 297 330
Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 11-5-22 22 Rotary Table: Basic Type Vane Style Series MSUB These drawings indicate the condition when the B port is pressurized.
.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m RE A B Flow control valve Flow control valve Throttle valve Throttle valve Stop valve REC CX CCVS20/21/22/23 CCVS02 CCVS10/11/12/13 CY Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MQQ M Courtesy of Steven Engineering, Inc
Applicable bore A 1.08 B 0.38 C 5/8-18 UNF D 20JM-08 0.94 3/4", 7/8" 1 1/16" JM-10 1.12 1.30 0.42 3/4-16 UNF 1 1/4", 1 1/2" Data JM-14 1.61 1.86 0.43 1 1/4 -12 UNF 2" 6-14-21 22 Series NCM Double Acting/Single Rod/Band Mounting Auto Switch Mounting Position and Mounting Height D-H7/H7W/H7F/H7BAL D-C7/C8 HS HS 0.63 0.63 SMC SMC 1.02 A B A B 1.14 (1.42) ( ): D-H7LF D-G59/K59 D-B5/B6/B59W
If a greater rotational torque is applied, the non-rotating rod (page 8-23-9) bends, exceeding the value of the nonrotating accuracy. 100 13 17 22 30 8-23-4 5 Guide Table Series MGF Operating Conditions Allowable horizontal load Allowable eccentric load The maximum value of load which can be applied at an eccentric position at a distance of l (mm) from the cylinder center. l l m m0 MX MTS
7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4-M5 x 0.8 depth 8 10 + Stroke 15 20 (mm) Stroke (mm) LB LT NS LA J 5 64 20 4 10 10 20 64 4 10 15 25 20 74 4 20 74 25 20 4 25 84 40 4 30 30 40 84 4 30 40 50 20 20 94 6 50 25 104 70 25 6 60 114 70 30 6 30 8-2-18 17 Compact Slide Series MXH Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height A 22
(mm) Connection tubing size TLM TILM Standard size 3.0 4.0 6.0 8.0 10.0 12.0 19.0 25.0 3.18 4.75 6.35 9.53 12.7 19.0 25.4 31.75 38.1 Tolerance Standard size Tolerance 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" 1 1/4" x 1.1" 1 1/2" x 1.33" 0.06 0.5 TD TID +0.2 0.1 Metric sizes TH TIH 0.1 1.0 a
diameter NPT1/8 Symbol 25A 32A 40A 50A 65A 80A 6 32 PA 38 8 48 60 B A 9 75 89 PB Standard Specifications Model LVW60 LVW80 LVW90 Nominal diameter 80A 40A 65A 32A 50A 25A Applicable pipe size external diameter 89 48 75 38 60 32 Operating pressure 0 to 0.02 MPa Orifice size 80 65 25 40 Pilot pressure 0.3 to 0.5 MPa Kv 169.7 43.7 131.1 18.8 71.1 8.5 Flow rate characteristics Cv 198 51 153 22
Contents Model CX2N10-PS CX2N15-PS CX2N25-PS CX2N10 CX2N15 CX2N25 CX2N10-PS CX2N15-PS CX2N25-PS @0 @1 22 @3 Rod seal Set of left nos. @0, @1, @3 22 is a non-replaceable part, so it is not included in the seal kit. Piston seal NBR Piston gasket Seal kit includes @0, @1, @3. Order the seal kit, based on each bore size. (The piston gasket @2 is not replaceable.)
Contents Model @0 @1 22 @3 NBR Cylinder body Rod seal 22 is a non-replaceable part, so it is not included in the seal kit. NBR CXWM10-PS Piston seal CXWM10 CXWM16 CXWM25 CXWM10-PS CXWM16-PS CXWM25-PS Set of left nos. @0, @1, @3 CXWM16-PS NBR Piston gasket CXWM25-PS NBR Cylinder tube gasket Seal kit includes @0, @1, @3. Order the seal kit, based on each bore size.
Contents Bore size (mm) MGZ20-PS 20 25 32 40 50 63 80 MGZ20-PS MGZ25-PS MGZ32-PS MGZ40-PS MGZ50-PS MGZ63-PS MGZ80-PS @0 21 Rod seal A MGZ25-PS Rod seal B 21, 22, 23 and 24 are non-replaceable parts, so they are not included in the seal kit.
When re-tightening, tighten approximately 2 degrees more than the original position. 16, 18 and 22 are non-replaceable parts, so they are not included in the seal kit. 174
distance range 0.01 to 0.03 mm 0.02 to 0.15 mm 0.05 to 0.30 mm Displayable/Settable range (Distance reference) *1 0 to 60 *4 10 to 300 *4 30 to 500 *4 Minimum display unit (Distance reference) *1 1 Rated pressure range 100 to 200 kPa Displayable range (Pressure value) *2 20 to 220 kPa Withstand pressure 600 kPa Detection nozzle 1.5 *3 Consumption flow rate 5 L/min or less 12 L/min or less 22
Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5
Tightening Torque for Piping Size Wrench tightening angle Tightening torque 1 (25A) 10 to 15 50 to 100 Nm Procedure for installing the valve on the tank Connection thread Proper tightening torque [Nm] Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/2 40 to 42 5.