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Pressure units conversion (Approximation) 17 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1

NPN ) 1.5 V 0.01 mm 0.01 mm () (0.010.15 mm (0.030.15 mm 100200 kPa) 100200 kPa) 1 0.01 mm 0.01 mm (0.010.15 mm) (0.30.15 mm) 2 1 2 LED (11+2) LED 1 2 () IP66 IP40 060 -2070 () 3585RH() AC1000 V 50/60 Hz 1 2 M(DC500 V ) Rc1/8 NNPT1/8 FG1/8 2)5m () M12 4 4 (0.64 mm () (21) ()253 g()250 g 205 g278 g+4 g 1 2LED -26No.PS-OMF0005CN-E EXH 1 1 2 3 4 5 6 L1 46 84 122

12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 VCB21 18 36 67.5 1/4 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 22 40 81.5 1/4, 3/8 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48

-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VF1000-OMP0001 / / / / 1 1 1 1 1.5 1.5 1.5 1.5 * * * *3 3 3 3) ) ) ) * * * *3 3 3 3) ) ) ) 1 1 1 1 1 1 1 1 () 3 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / / / / / 3 () () () 1 DC AC VT307 3

3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 VX2 7.1 86 8.7 110 10.6 190 14.3 15 3.9 29 5.2 38 6.2 58 7.3 54 8 75 9.5 140 13 210 15.7 Rc 46 Pilot port size Weight (kg) Face-to-face dimension (mm) VX 1 8 Rc 1 4 Rc 1 8 Rc 1 4 Rc 1 8 Rc 1 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Grase No.1 Multinoc Grease No.2 Grease No.1 Grase No.2 Gemico Grease MP-1 Gemico Grease MP-2 Dynamic Dynamic Dynamic Gemico Grease MH-1 Gemico Greass MH-2 Nols 1) The Erse nam No. shows the const$ency Series NCY2S Slider Type: Dimensions A _ ---+!

D-M9/ M9W/ Y59/ Y7P/ Y7W D-M9/ M9W/ Y59/ Y7P/ Y7W D-M9 D-M9V L (mm) D-M9 D-M9W D-M9V D-M9WV D-M9A D-M9AV MHY2-10D 3 1 5 3 MHY2-16D 3 1 5 3 MHY2-20D 3 1 MHY2-25D 1 ) 11 8. 1 2 ON ON 1 1),2)1 A 2 B 1),2) C 1 1 12 2) 3) 4) 0.30.5mm 2) 0.30.5mm 0.30.5mm 0.30.5mm 13 2-4. 1.

LQ Hexagon width across flats Bracket 2-Rc , , 4 1 8 3 2 1 LVN TI/ TIL Conduit terminal: T PA PAX PB Bracket 2-Rc , , 4 1 8 3 2 1 : Port size Rc 1/2 17-3-39 8 The VX series will be revised shortly.

Grase No.1 Multinoc Grease No.2 Grease No.1 Grase No.2 Gemico Grease MP-1 Gemico Grease MP-2 Dynamic Dynamic Dynamic Gemico Grease MH-1 Gemico Greass MH-2 Nols 1) The Erse nam No. shows the const$ency Series NCY2S Slider Type: Dimensions A _ ---+!

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

Rc 1 1 2 2160 10 2280 14 Z Refer to the table (1) given below for availability.

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at pressure of 0.7 MPa. It varies depending on operating pressure.

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) : : : 1. 2. 3. 1. 2. 3. 4

1 #0 t u r w @3 !9 MSZAA (High precision type) $1 e $0 @7 @1 @9 !0 !2 #2 !6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.

211 277 321 B 260 298 366 432 T 9 9 11 11 S 8 7 10 15 R 78 97 98 115 P 50 35 45 46.5 AL 1 4, 3 8 1 4, 3 8 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 103 121 131 161 10 10 70 70 264 302 370 436 100 120 130 160 180 210 246 290 AMR3000 AMR4000 AMR5000 AMR6000 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 3 4, 1 3 4, 1 Adapter

Chamfered port size D (Recommended value) Rc, G NPT, NPTF Female thread size 1 8 1 4 3 8 1 2 10.5 to 11.8 14.1 to 15.8 17.4 to 19.4 21.7 to 25.1 10.2 to 11.8 13.6 to 15.8 17.1 to 19.4 21.4 to 25.1 15-1-11

(n) does not exceed "1". n = 1 + 2 + 3 1 Load factor n 1 = m/m max Note Item Review m. m max is the maximum load mass. 1.

Model AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 Model Note) Rated flow (l /min (ANR)) 300 750 1500 2200 3500 6000 12000 Port size (Nominal size B) , , , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

6 6 Series IDUS/IDFS Option Specification Refer to pages 1 and 5 for "How to Order" of options.