SMC Corporation of America
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Features 4 RoHS Blow Gun Series VMG How to Order VMG1 1 02 32 W C With nozzle cover (Only for male thread nozzle, 6 extension nozzle) Piping entry Bottom Top 1 2 C CF None With nozzle cover/HNBR With nozzle cover/Fluororubber Body color Nozzle White Dark blue W BU Type Symbol Nozzle part no.

(Refer to Section 6 Parts Replacement Procedure (pages 13 to 15) for details.) Piping Caution Maintenance Warning Caution 5 XL*-OMI0010-E 2. Product Specific Precautions 2 Common Precautions 2 Be sure to read before handling Maintenance Parts SMC specified parts should be used for service.Refer to the construction drawing. 1.

Note) Model no. for base mounted style without sub-plate is SYJA5 4, SYJA7 4. 1 2 1 2 5-4-7 6 Series SYJA500/700 Dimensions Series SYJA500 Body ported: SYJA52-M5(-F) Base mounted: SYJA54-01 18 2-2.6 15.5 (For manifold mounting) 24 8.5 2.5 A 15 11 1 13 8.5 M5 x 0.8 34 (External pilot port) (Pilot port) (Bracket) (For solenoid valve) 2-4.5 Manual override (Non-locking) (Pilot port) (For mounting

2 outputs F Digital pressure switch for vacuum SI unit only Note 10) 0 to 101 Digital pressure switch for Vacuum Unit selection function Note 9) PNP 2 outputs SI unit only Note 10) Note 1) PS port size of pump system: mm: 4 inch: 5/32" Port size of exhaust port: mm: 8 inch: 5/16" Unit selection function Note 9) NPN 2 outputs SI unit only Note 10) Digital pressure switch for vacuum with energy

Safety Instructions 2-6 2. Application 7 3. Standard Specifications 7 4. How to Order 8 5. Options 9 6. Structural Drawing and Replacement Parts 10 7. Assembly of Optional Parts 11-12 8. Operation and Adjustment 13-14 9. Trouble Shooting 15-16 10. How to Replace the Components 17-24 10-1. Diaphragm Assembly Replacement 17 10-2.

23.8 25.4 28.6 50.1 57.6 25.4 24 57.6 49.6 50.1 49.6 42.1 42.1 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 34.6 48.9 20.9 21.7 12 1/2" 22 101 Reference dimensions of M5 x 0.8, R threads after installation.

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27

Other dimensions are same as grommet type. 4-3-8 9 Series SY100 Base Mounted (With sub-plate) Grommet (G), (H): SY1 4(A)-M3 1 2 G H 15.6 Manual override 9 (Light/Surge voltage suppressor) 5 V100 + 13 15.5 SY P SYJ 2-2.6 (Mounting hole) 13 3 28 (For DC) VK 34.5 (For AC) VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Other dimensions are same as grommet type. 4-3-8 Series SY100 Base Mounted (With sub-plate) Grommet (G), (H): SY1 4(A)-M3 1 2 G H 15.6 Manual override 9 (Light/Surge voltage suppressor) 5 V100 + 13 15.5 SY P SYJ 2-2.6 (Mounting hole) 13 3 28 (For DC) VK 34.5 (For AC) VZ VT G: 300 H: 600 (Lead wire length) G, H: 26.1 G, H: 26.8 (For DC) VP 10 VG VP 27.8 (For AC) S070 25.3 21.2 VQ 9 6 A

Other dimensions are same as grommet style. 2.1-8 Series SY100 Base Mounted (With Sub-plate) Grommet (G), (H): SY1 4 (A)-l ll-M3 1 2 G H 15.6 Monual override (Indicator light and surge voltage suppressor) 9 5 SY + 13 15.5 SYJ P VK 2-2.6 (Mounting holes) 13 3 28 (In case of DC) VZ 34.5 (In case of AC) VT VT G: 300 H: 600 (Lead wire length) G, H: 26.1 Gl, Hl: 26.8 (In case of DC) VP 10 VG VP

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

Direct Operated Solenoid Valve Metal Seal Series VS4 10 Model Flow characteristics Max. (1) operating cycle (cpm) (3) VK Response (2) time (ms) Weight (kg) Model Port size Rc (Nominal size) Number of positions JIS Symbol P A/B A/B EA/EB VZ C [dm 3/(sbar)] C [dm 3/(sbar)] b b Cv Cv AC DC AC DC AC DC VS4110-01 (6A) 3.2 3.2 0.42 0.37 0.86 0.80 1 8 2 (Single) 1,200 180 13 or less 45 or less

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

IN20267 PRODUCT NAME Ethernet MPC Ethernet/IPTM MODEL / Series / Product Number MPC Multi Position Cylinder MPCXX-XXX-XXX-XX-DUT01607 1 - IN20267 2 - IN20267 Table of Contents 1. Table of Contents . 3 1. Safety Instructions . 5 2. About this Manual . 10 3. MPC . 10 3.1. Purpose . 10 3.2. Terminology . 11 4. Product Summary . 12 5. How to Order . 13 6. Accessories . 13 6.1.

150 H 166 187 187 218 218 241 241 277 334 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 5.5 6 6 7 7 9 9 9 11 10 10 10 10 10 10 10 10 10 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 100 113 119 145 151 166 173 200 253 13 13 16 16 19 19 22 22 32 159 172 178 204 210 225 232 259 311 AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG150

SET SET To measuring mode 16-3-13 13 Series PSE530/200 Operation 2: Pressure Setting Auto preset Channel selection MPa Measuring mode kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE CH1 CH2 CH3 CH4 SET Adsorption Verification SET High Suction Auto preset mode Vacuum Work 1 Work 2 Work n OUT1 auto preset preparation Prepare the equipment to be set in this mode. Max.

Remarks Sensor connector (For PFMB) ZS-28-C-1 Sensor connector (For PFMC and PF3A7) ZS-28-CA-4 Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5L 5 cores, 2 m Front protective cover ZS-27-01