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t0 I Recommended Circuits I q+"'"' A,.r rr.nv . . . 1 1 I I I Construction/Parts List .12 l J l / 18-20 I nuto Switch Specif ications . .21 I nuto Switch Circuit Diagrams. .22 I Ruto Switch Dimensions/Operating Range .23 I Ruto Switch Connection . .24 I Ruto Switch MountinS. . .25 r"-"--'-""' I Annaccnriac I Pranar riinne .26 r "-"-" tri*,t l x}$x:? xxxs !

IDX-OM-W032-D / Series IDFA22E-23C,K,L,R,T,V IDFA37E-23C,K,L,R,T,V IDFA55E-23C,L,R,T,V IDFA75E-23C,L,R,T,V URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC () * 1 ) JIS B8370 * 2 ) ISO4414 *1) ISO4414Pneumatic fluid power General rules and safety requirements for systems and their components *2) JIS B8370 URLhttps:/

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

+ 1/2 stroke l l ZZ + l + 2 stroke (With rod boot on one side) ZZ + 2l + 2 stroke (With rod boot on both sides) Stroke range (mm) Type Bore size (mm) 125 140 160 180 200 250 300 A C D K N P AL E KA R B EA M S F MM FA G J Without rod boot With rod boot 1/2 25 to 1000 30 to 1000 145 115 M14 x 1.5 M30 x 1.5 50 36 15 35 47 90 31 1 59 19 98 43 14 16 Lube Non-lube Air-hydro 1/2 30 to 1000 30 to

[I (mm) c l BonI.1iIi (mm) A L[) R N X Y LG L 0 ~ t::;r H LH L1 . 50s 107 .2 15 39 18 9 5 Ml0Xl.S 14.7 43.5 MSl(l .25 14 M8x 1.25 B 15 46 18 Ml0xl.5 16.2 43.5 Ml0xl .5 18 9 11 5 Ml0Xl.5 63 112.7 M12xl .75 22 M12xt.75 19.5 11 53.5 13 7 MI6X2.0 59 20 21 80 133 .5 Rod Side Flange: COQ2FP 0-0 OM-DO 4-oFO 40 Thread d Ih A SpeCIal cap bolt 4-N . rBote size A L 0 R N FD FT FV FX F2 Ll H C !

type plug connector (L), M type plug connector (M) Electrical entry A A 24, 12, 6, 5, 3 Coil rated voltage V DC 100, 110, 200, 220 AC 50/60Hz P R P R 10% rated voltage Allowable voltage 0.5 (With light : 0.55 ) Power consumption W Note) DC 0.9 ( With light : 1.0) 100V External pilot 110V [115V] 1.0 (With light : 1.10) [1.1 ( With light : 1.2) ] SYJ71 R 2 4 SYJ72 R 2 4 Apparent power VA AC

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Bore size [mm] Dd9 L l m d Part no.

: 1/4 inch face seal male) 0 r e FV4 MV4 FV6 MV6 TW6 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa V3 L w q 1) Other range available.

Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct

I t r i : : O _ _ a r ! P ! ! : o : L o a d F = I Ll|acxo re 3 riire syslom (Wren pol9l sqJme lor swioh and load s nol cofimom) Fled ^ | | ,.,",.-" a-a ao | | :".'*: ' "l Load l *lrlii + | | t r a ! ! ! ^ _ a _ r 4 Wiring/current.voltage 1 Auto switch: connect first a load and then connect the power soulce. 2 The switches with 24VDC, indicator lamp have polarity.

I t r i : : O _ _ a r ! P ! ! : o : L o a d F = I Ll|acxo re 3 riire syslom (Wren pol9l sqJme lor swioh and load s nol cofimom) Fled ^ | | ,.,",.-" a-a ao | | :".'*: ' "l Load l *lrlii + | | t r a ! ! ! ^ _ a _ r 4 Wiring/current.voltage 1 Auto switch: connect first a load and then connect the power soulce. 2 The switches with 24VDC, indicator lamp have polarity.

Y (mm) St: Stroke (mm) Allowable end load F (N) MGCL50Stroke -R (Ball busing bearing type) Deflection Y (mm) St: Stroke (mm) Allowable end load F (N) 8-22-11 12 Series MGC Allowable Eccentric Load Slide bearing MGCMStroke -R Ball bushing bearing MGCLStroke -R l l Allowable eccentric load W (N) Allowable eccentric load W (N) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

water (Vessel material: Stainless steel) Oil-based coolant, Cutting oil (Vessel material: Carbon steel) Cover Case Legs Seal Stainless steel 304 [FGFS/L] Stainless steel 304 Note 6) Material Carbon steel NBR or FKM Note 2) [FGFC/R] Carbon steel 100(4B)JIS10KFF Rc2 150(6B)JIS10KFF Port size Internal volume Weight Pressure gauge Note 4) Note 3) 23 L 13 kg 35 L 16 kg 104 L 170 kg 156 L 190 kg