NCRAI seies

Lubrication not required; pre-lubed at factory 150 PSI(9.gkgrf/cm,) 15 PSI(1kgrf/cm'z) 40 -140'F(5-60"C) Max.ryattng pressure Min. operating pressure Operating ternperature Cushion Tubebore mm(inch) Mounting Optional & (2), 63 (2 %1, 80 (31/a),1O O @l Basic AirVolume (inch3) tVodel Rotation 90" 180' 100" 190' NCnAATWO 0.45 0.85 NCRAlO50 1.95 3.97 2.20 415 l{cRAl0trt 3.66 7.32 4.09 7.75 r{

SYA3000/5000/7000

exhaust center 4 3 position pressure center 5 1728 5 Port Air Operated Valve Series SYA3000/5000/7000 Specifications Fluid Operating pressure range MPa Air 0.15 to 0.7 100 kPa to 0.7 100 kPa to 0.7 (0.7 x P + 0.1) to 0.7 P: Operating pressure range 0.1 to 0.7 0.2 to 0.7 10 to 60 (No freezing.)

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

(Variable) 3% F .S. or less (Fixed) 1 to 10% of set prss.

Exhaust Cleaner for Clean Rooms AMP Series

N101 Exhaust Cleaner for Clean Rooms AMPSeries Exhaust Air Cleanliness Equivalent to Class 100 Piping Labor Reduced Increased Space Savings Worry Free Two Stage Element Construction Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult SMC in advance, as this will differ depending on the

AC Servo Motor Driver (MECHATROLINK-III type)

Station Address S1 S2 00H to 02H: Disabled 0 0 to 2 (Do not use these addresses.) 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled F 0 to F (Do not use these addresses.) (2) Settings of the DIP Switch S3 The following table shows the settings of the DIP switch (S3). Switch No.

JXCx-OMU0024

For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100. Caution When the parameter is selected for stroke which is longer than that of the actuator to be used, the Position entered in the step data must not exceed the actual actuator stroke range.

SFOD-OMT0012

For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100. Caution When the parameter is selected for stroke which is longer than that of the actuator to be used, the Position entered in the step data must not exceed the actual actuator stroke range.

ATX-OM-F003E

Outside tube AC2A-F 1 Flower fin tube assembly C1220T Flower fin 2 Housing AC2A-F 3 Water chamber cover FC200 4 Replacement parts HAW2 HAW7 No.

Exhaust Cleaner for Clean Rooms AMP Series

Exhaust Cleaner for Clean Rooms AMPSeries Exhaust Air Cleanliness Equivalent to Class 100 Piping Labor Reduced Increased Space Savings Worry Free Two Stage Element Construction Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult P/A in advance, as this will differ depending on the operating

AMH

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMH150 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122

Compact Type

V = over 400 mm/s; up to 100 mm stroke 14 15 CXSJM CXSJL Graph V = over 400 mm/s; up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 6 Series CXSJ Construction: Standard Piping CXSJM (Slide bearing) CXSJL (Ball bushing bearing) CXSJM6 CXSJL6 !

JXCx-OMY0008

Movement Speed Position Acceleration Trigger LV Area 1 Area 2 In pos Deceleration force speed force mm/s2 mode mm/s (mm) mm/s2 % (mm) (mm) (mm) % mm/s % 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 -38No.

Compact Type Dual-Rod Cylinder Series CXSJ

V = over 400 mm/s; up to 100 mm stroke 14 15 CXSJM CXSJL Graph V = over 400 mm/s; up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 6 Series CXSJ Construction: Standard Piping CXSJM (Slide bearing) CXSJL (Ball bushing bearing) CXSJM6 CXSJL6 !

JXCx-OMY0004

Movement Speed Position Acceleration Trigger LV Area 1 Area 2 In pos Deceleration force speed force mm/s2 mode mm/s (mm) mm/s2 % (mm) (mm) (mm) % mm/s % 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 -42No.

CC

When selecting a converter by its nominal diameter, the converter's oil level speed should be 0.2m/s or less. 300 25 600 500 400 100 200 20 300 CRA1H100-180 300 100 200 CRA1H100-90 200 150 CRA1H80-180 50 eSelect required function for valve unit 100 100 80 CRA1H80-90 Select a model from data , by determining the functions that

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Fieldbus system EtherNet/IP TM compatible SI Unit

0x02 0X06 0002 0064: Force 100 Mbps/Full duplex Ex.

Step Motor Controller (Servo / 24 VDC)

Move mm/s mm mm/s2 mm/s2 mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped. 35 - Details of step data Setting name Range Description No. 0 to 63 Number of the step data.

Electric Actuator / Slider Type 《 AC Servo Motor 》

LECSA LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para No Initial value Recommended value Number of command input pulses per revolution *3 PA05 100 100 Electronic gear numerator *3 PA06 1 100(Positioning mode: 10) Electronic gear denominator *3 PA07 1 20 12 6 24 16 8 30 20 10 Feel length multiplication (STM) (Multiplier) PE02 0 0(Less

High performance type Step Motor Controller (Servo/24 VDC)

Move Speed Position Accel Decel PushingF TriggerLV PushingSp Moving F Area1 Area2 In posn mm/s mm mm/s2 mm/s2 mm/s mm mm mm 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped. 37 No.JXC-OMY0002-A Details