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The proof pressure is double the operating pressure range. -28No.LFE*-OMZ0012 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out of range -29No.LFE*-OMZ0012 Dimensions 2XPort size Note) The electrical

6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3

90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

) Optional Accessories [Foundation bolt set] [Piping adapter] E (Width across flats) Female thread B side For fixing the air dryer to the foundations.

Note Bracket B and the bracket assembly make up one set.

125 14-150 18-150 1 Series JS Construction 10, 16 20 to 63 Parts list Parts list No.

Refer to CAT.E824A "Pressure Switch" Series ZR How to Order Ejector Systems ZR1 20 S 25 M Z 1 5 K1 D1 Ejector unit nozzle size 1.0mm 10 Digital vacuum switch specifications (D1, D2, D3) 1.3mm 13 Symbol Lead wire length 1.5mm 15 Applicable switch Output specifications 25 (L) Lead wire length 0.6 (3.0) m 1.8mm NPN output 18 D1 D2 26 (L) Lead wire length 0.6 (3.0) m Analog output 2.0mm 20 65

System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2

241 4.86 (123.5) (5s) lz3;.(1s) (20) nm2[ , t % 7.62 6.8i] 4!

0.14 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5

a) b GR-S-010(10g )GR-S-020(20g ) P18, 4. (XC85,X446)P19 c) 4. 17 - 3-2. 3-2-1. 1 2 3 3-2-2. 1 2 3 4 5 6 7) 8 1) 2) 33. 331. 4. 20 25 32 40 CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS 1 3-3-2. 1 2 3 4 18 - 4. (XC85,X446) 4-1. -XC85 GR-H-010(10g) <> <> 4-2. PTFE X446 GR-F-005(5g) 1) 19 - 2) () 5. 5. 20 - 6. 1.

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Auto Switch Proper Mounting Position (Detection at Stroke End) A B Proper Mounting Position (mm) Bore size A B 40 63 100 32.5 0 16 0 27.5 0 Note) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection.

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 2.20462 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

-General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / 1 1.5 () 3 - M6234 (610)1 1 (M410) 4 1 1 (510)1 (M510) 4 1 (KQ2H04-06A1) 1 (TCU0425B-1) 1 (KQ2L04-M3G1) 1

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .92076 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .88184 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?