2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note Note No. q Description Material No. Description Material Bushing B !
2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !
Ionizer Additional air blow Air blow Ionized air 497 ZVB Series Dimensions C B D A C B A D F E [ZVB20] F E [ZVB40] Model A B C D D Note 1) E F F Note 2) ZVB20 211 202 212 310 351 210 297 341 ZVB40 248 392 298 349 390 400 384 428 Note 1) Dimension D is the overall height including the knob of the regulator.
0 i q y !3 !2 !1 u !4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.
External pilot solenoid Air operated Pilot Solenoid Valve Specifications Port size 6A to 25A 32A to 50A VO307-1 VO307D DZ-Q Pilot solenoid valve SF4--23 SF4D DZ-23-Q Symbol Grommet, Grommet terminal Conduit terminal DIN terminal Grommet, DIN terminal VNA VNA Valve type Type N.C. N.O. C.O.
Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface
200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55
-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2-RA Both ends tapped style (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33
59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136)
Nil: Rc thread, N: NPT thread, F: G thread Please consult with SMC separately for psi and F unit display spccifications. Including the bowl O-ring. 4 AD402-A Series Working Principle: Float Type Auto Drain N.O. (Normally open) N.C. (Normally closed) q Bowl r Valve e Lever t Valve seat w Float i Tube y Spring u Diaphragm o Chamber !0 Main valve !
Nil V Standard For vacuum X505 VPA500 series Port size Symbol Port size VPA300 1/8 1/4 3/8 1/2 VPA500 VPA700 01 02 03 04 Bracket Nil F Without bracket With bracket Thread type Type of actuation A B N.C. (Normally closed) N.O. (Normally open) Nil F N T Rc G NPT NPTF VPA700 series Specifications Fluid Air Type of actuation N.C. or N.O.
fitting for 1 4" One-touch fitting for SYA5000 One-touch fitting (Metric size) Bracket 5 16" One-touch fitting for VM Symbol Port size Applicable series C4 C6 C4 C6 C8 C8 C10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without bracket 1 4" One-touch fitting
side bracket Series SYA5000 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 3 SYA3000 5 SYA5000 SYA7000 7 SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Rc Nil G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1
3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !
In this way fine pressure variations are detected by the nozzle/flapper type pilot mechanism, and precise pressure adjustment is performed. q i o !4 !5 o SUP side passage OUT side passage SUP side passage !5 OUT side passage IN q IN q w y Bleed Bleed !1 !3 !2 e w r Exhaust SUP(1) OUT(2) SUP(1) OUT(2) u !0 !2 !
6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !
H J K u 1 5 7 {40) 1 1 8 1 0 0 0 8 ( 3 0 1 0 2 ) 1 8510008 (47 lO 2t 1 3 2 {33 5) ) 7 1 I t a t 0 9 6 t24 E\ r 1 8 t30l 1 3 0 7 5 ) 0 7 5 fi9 0 008 o2l , 2 C (s) 224 157) Millimeters in Parentheses Millimeters in Parentheses NVM830-N01-13 Nylon Roller Loosen hex socket screw and adjust NVM830-N01-14 Rod may b6 bent: bending is 0 39" {1 omm) I I J F O F 0 5 1 l b s ( 0 2 3 k q ) F O F ' 4
H J K u 1 5 7 {40) 1 1 8 1 0 0 0 8 ( 3 0 1 0 2 ) 1 8510008 (47 lO 2t 1 3 2 {33 5) ) 7 1 I t a t 0 9 6 t24 E\ r 1 8 t30l 1 3 0 7 5 ) 0 7 5 fi9 0 008 o2l , 2 C (s) 224 157) Millimeters in Parentheses Millimeters in Parentheses NVM830-N01-13 Nylon Roller Loosen hex socket screw and adjust NVM830-N01-14 Rod may b6 bent: bending is 0 39" {1 omm) I I J F O F 0 5 1 l b s ( 0 2 3 k q ) F O F ' 4
Ethylene-Propylene Rubber Elastomer Oil Resistance Excellent Excellent Good up to Fails up to 225 F. up to 400 F. 225 F. Water Resistance Excellent Good up to Good up to Excellent up to 150 F. 180 F. 150 F. 210 F. Air Resistance Excellent Excellent Excellent Good (no oi) up to 180 F. up to 350 F. up to 180 F. up to 180 F.
-05B-C6 1 set (manifold part no.)