ZSE40/ISE40

Automatically sets the pressure for the adsorption confirmation or supply pressure confirmation. 16-2-19 6 Series ZSE40/ISE40 Calibration Procedures Initial Setting 1. Initial condition mode 2. Selection of output mode OUT1 3. Selection of output mode OUT2 SET Press the SET button. Press the SET button for more than 2 seconds until is displayed. Release it when the display turns to .

3 Port Air Operated Valve Series SYJA300 1

Valve Precautions, refer to pages 5-11-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

PSxx-OMU0002CN

V 1 50 M(DC500 V ) -550 -1060 () 3585RH() UL/CSA(E216656)CE(EMC RoHS ) 2 m 1(0 ms) 2 3MPa/kPa 490% 5 -76No.PS-OMU0002CN-D M5 01 N01 C4H C6H N7H C4L C6L N7L M5X0.8 R1/8 NPT1/8 4 mm 6 mm 1/4 inch 5/32 inch 4 mm 6 mm 1/4 inch 5/32 inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 24 g 34 g 36 g 27 g 28 g 29 g 30 g 30 g 36 g +39 g 0.15mm 2(AWG26) 1.0 mm (5 ) 3.5

INFORMATION Step Motor Controller 5 types of communication protocols New New

Terminal name Details 1 L+ +24 V 2 NC N/A 3 L 0 V 4 C/Q IO-Link signal * For , enter a number from the No. line in the table on page 6. Refer to the dimension drawings on page 6 for the mounting dimensions.

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

For equiangular acceleration, the angular velocity, , after t seconds are obtained using the following equations. 1 ( 2 ( C : Integration constant Because the displacement angle in t=0 becomes =0, it becomes C=0.

VSA4

hole 3-7 Mounting hole 5-3-32 3 4/5 Port Air Operated Valve Series VSA430 Model Valve model Body size Function Flow characteristics P A/B C[dm3/(sbar)] 6.4 8.7 9.2 6.4 8.7 9.2 6.2 8.1 10 6.6 8.9 11 Port size Rc 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 Note) Weight (kg) A/B EA/EB Pilot port size SA C[dm3/(sbar)] 6.3 8.2 9.6 6.3 8.2 9.6 5.8 7.5 9.5 5.5 6.7 9.4 b 0.16 0.28 0.14 0.16

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Please refer to p.4.5-7 for with pressure differential gauge (GD40-2-01). 4.6-6

CC

S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

SY3000/5000/7000 Series Plug-in Type

As a guide, insert bolts in 2 positions for 2-5 stations, 3 positions for 6-10 stations, 4 positions for 11-15 stations, 5 positions for 16-20 stations and 6 positions for 21-24 stations. Take the same measures for horizontal mounting if the mounting surface vibrates. 2.

VT315-OMH0005

DCDIN No.1 +No.2 1) () 2) 3) , 4) DIN DIN DIN DIN DIN GDM2B 2. 2. 2. 2. 1) 2) 3) Y )0.5Nm15% a b O 1.25 3.5 Y 1.25 4 c 612mm 912mm 1. 2. 3. 3. 3. 3. 3. 1 ) 2) 3) )0.5Nm20% AC100V AC200V DC + DC DC 7 VT315**-OMH0005-A V V V VT315 Series/ T315 Series/ T315 Series/ T315 Series/ 1. 1. 1. 1. 1 1 1 230 1 18VA50Hz 16 P R 2PR 3/8 AC AC100V110V200V220V50/60Hz O P8 4 DC DC12V24V48V100

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

VQ1000V-OMV0001

No.VQ1000V-OMV0001 VQ1000/2000 V100 / / / / 2 3 4 5 4 5 5 5 6 6 6 6 7 89 10 11 -1No.VQ1000V-OMV0001 (ISO/IEC) (JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

In-line Type Flow rate and effective area AS2001FM Model AS1001FM AS2051FM 8 6 3.2, 4, 6 4 6 Metric sizes Tubing O.D.

Clean Air Filter

Note this point for use. 6 Document No.DOC1018377 1. Application This product aims at eliminating solid foreign matter in the air line. 2.

POWER CLAMP CYLINDER

Stopper Bolt Tightening Torque Bore size Tightening Torque(Nm) 5063 45 to 65 2.

NCRBIBwserbs

t{cRBl0w20 NCRBl0W30 * c it E F .E lE 6 IE 1 2 3 4 5 6 7 8 X 10.61.21.8 2.4 3.0 3.6 5.2 4.4 XlO-41 o.a 1.2 1.6 2.O 2.4 2.4 Moment ol Inertie (ln-lbs-s2) | | : tndica's nomenl ot jrertja $,hen usiDg an intrnsl rubtr bumpr : No inlernel rubbr bumper ... : llse of an intemal rubber bumper (llsing al end ot rolation) (Wth auto switch) Nole: No ifitrnal bumpr is usd on NCRA1BWTo.

Two Hand Control Valve

7 A(2) port P2(12) port w !2 !6 !4 !

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

t{cRBl0w20 NCRBl0W30 * c it E F .E lE 6 IE 1 2 3 4 5 6 7 8 X 10.61.21.8 2.4 3.0 3.6 5.2 4.4 XlO-41 o.a 1.2 1.6 2.O 2.4 2.4 Moment ol Inertie (ln-lbs-s2) | | : tndica's nomenl ot jrertja $,hen usiDg an intrnsl rubtr bumpr : No inlernel rubbr bumper ... : llse of an intemal rubber bumper (llsing al end ot rolation) (Wth auto switch) Nole: No ifitrnal bumpr is usd on NCRA1BWTo.