VQ7-6/7-8

size ISO size 2 Series VQ7-8 ISO size 2 0.96n + 0.77 (n: Stations) Max. 10 stations 3/8 1/2 1/2 3/4 3-10-27 28 Series VQ7-8 DIN Terminal Type VV72-2n-3/8, 1/2 118 142 67 9 118 142 9 34 20 2-1/8 14 Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy

Smooth Cylinder/Low Speed Cylinder

n-2) (n = 4, 6) Note 5) D-M9V 5 5 10 + 15 (n-2) (n = 4, 6) Note 5) D-A9V 10 5 D-M9 D-A9 15 + 15 (n-2) (n = 4, 6) Note 5) 10 10 (5) D-M9WV D-M9AV D-M9W D-M9A 15 + 15 (n-2) (n = 4, 6) Note 5) 15 10 20 + 15 (n-2) (n = 4, 6) Note 5) 15 15 (10) D-A7/A80 D-A7H/A80H D-A73C/A80C 15 + 10 (n-2) (n = 4, 6) Note 5) 10 5 Rail mounting D-A7H D-A80H 15 + 15 (n-2) (n = 4, 6) Note 5) 10 5 10

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

LEC-OM02704CN

RX(n+2)1 RY(n+2)1 RX(n+2)2 1 RY(n+2)2 RX(n+2)3 2 RY(n+2)3 6 RX(n+2)4 3 RY(n+2)4 7 RX(n+2)5 4 RY(n+2)5 8 RX(n+2)6 5 RY(n+2)6 RX(n+2)7 6 RY(n+2)7 RX(n+2)8 7 RY(n+2)8 RX(n+2)9 8 RY(n+2)9 RX(n+2)A RY(n+2)A RY(n+2)B RX(n+3)9 RY(n2)C 1 RX(n+3)A RY(n2)D 2 RX(n+3)B Ready RY(n2)E 3 RX(n+3)C RY(n+2)F RX(n+3)F RY(n+3)9 RY(n+3)A RY(n+3)B RY(n+3)F . n 15 5 15 (RWwn) (RWrn) (1) (1) RWwn

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

b 0.26 0.20 0.22 0.19 b 0.35 0.18 0.21 0.18 C6 C8 C10 C12 C8 C10 C12 C12 10-SS5V1-10 10-SS5V2-10 10-SS5V3-10 10-SS5V4-10 Note) The values are for individually operated 2 position type manifold bases with 5 stations.

Series SV

A B A B 29.6 17.5 56.3 COM PWR Manual override Press and turn for the locking type. 4(A) port side: Orange 2(B) port side: Green SI unit ( ) Silencer (air discharge port) (with built-in silencer specification) L2 5 (Rail mounting hole pitch: 12.5) L1 Light/Surge voltage suppressor (Station n) (Station 1) 85.5 79.4 61.8 16.2 (for DIN rail mounting) (10) 14.7 L dimensions n: Stations L n 2

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) CP95 Hs 24.5 27 30.5 35 40.5 47.5 A 27.5 27.5 28.5 33 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 B 27.5 27.5 28.5 31.5 39.5 39.5 B 27.5 27.5 28.5 31.5 39.5 39.5 B 26 26 27 30 38 38 A 29 29 30 34.5 42 42 Hs 27.5 30 33.5 38 43.5 50.5 20 25 32 40 50 63 NCM NCA DOperating Range -X Bore size (mm) Auto switch model 20 D-C7/C80/C73C/C80C D-B5/B64 50 63 25 32 40 208 10 9 10 10 11 D-B59W

5

= 2, 3, 4, 5) D-M9V 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9V 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9 D-A9 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9W 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9A 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7/A80 D-A7H/A80H D-A73C/A80C 5 10 15 + 10 (n 2) (n = 4, 6) Note 4) Rail mounting

Digital Flow Switches

specification Nil N F Rc NPT G Nil N Lead wire with connector 3m Without lead wire Port size Applicable models Flow rate (l/min) Port size Symbol 40 100 4 16 03 04 06 10 3/8 1/2 3/4 1 PF2W504, PF2W520 PF2W520, PF2W540 PF2W540, PF2W511 PF2W511 Specifications PF2W504 PF2W520 PF2W540 PF2W511 Model Measured fluid Water Detection type Karman vortex 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-8 9 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Example of Application Circuit Caution Handling of application circuits 1.

VCC

) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 VNA 122.2 <124.2> 142.2 <144.2> VNB 22.6 100 120 80 25 75 SGC SGH VNC n 6 4 2 3 Gate valve Aluminum + hard anodized containing PTFE and POM are used for a part of the manifold material.

PF2A/PF2W

type Nil N F Rc NPT G Wiring specifications Nil N 3 m lead wire with connector Without lead wire Port size Applicable model Flow rate (l/min) Port size Symbol 100 200 500 50 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 01 02 03 04 1/8 1/4 3/8 1/2 PF2A510

Digital Flow Switches, Series PF2A, Series PF2W

specification Nil N F Rc NPT G Nil N Lead wire with connector 3m Without lead wire Port size Applicable models Flow rate (l/min) Port size Symbol 40 100 4 16 03 04 06 10 3/8 1/2 3/4 1 PF2W504, PF2W520 PF2W520, PF2W540 PF2W540, PF2W511 PF2W511 Specifications PF2W504 PF2W520 PF2W540 PF2W511 Model Measured fluid Water Detection type Karman vortex 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10

SYJ3000/5000/7000

(Pitch) P = 10.5 For (Built-in One-touch fitting) C4 N3 For M5 14.5 Manual override 32.5 14.8 0.5 2.7 91.9 [96.3] 1/8 (P port) 78.8 [83.2] 10 A A A A A 53.9 [56.1] 54.7 [56.9] 31.7 25 25 P 35 P B B B B B 34.9 18.9 2-4.5 (For mounting) 4 L2 L1 (4.4) (Light/Surge voltage suppressor) (Station n) (Station 1) (Station n) (Station 1) + + + + + (Light/Surge voltage suppressor) + + + + + B B B B

Speed Controller with Indicator

06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Series VQ Base Mounted Metal Seal/Rubber Seal

L n Equation L1=10.5n+44.5, L2=10.5n+72.5 n: Station (Max.16) Dustproof SI unit: L5=10.5n+97 L6=L3+25, L7=L4+25 Dimensions (mm) Manifold S kitSV5Q11M, #8 Valve 2 position single SV5Q11V, #9 2 position doubleSV5Q11V, #10 3 position SV5Q11V, #10 16 212.5 240.5 262.5 273 15 202 230 250 260.5 14 191.5 219.5 250 260.5 13 181 209 237.5 248 12 170.5 198.5 225 235.5 11 160 188 212.5 223 10 149.5

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

None S F 03 N 2 GS D B A E3 04 F 3 DN JSXD31 3 Cannot be used in combination with body material symbol A 4 WN 5 6 7 8 B J Series/ Valve type Body material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD41 C N 03 R 1 G None None S F 04 N 2 GS D B E F 3 DN 4 WN 5 6 7 8 B J JSXD41 Series/ Valve type Body material Seal material Port

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.

125

x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN103-01 AN203-02 AN303-03 AN403-04 5-10-3 4 Silencer Metal Case Type Series 25 How to Order Exhaust in only one direction Prevents scattering of mist and noise. 25 10 002 Port size Thread type Body size 002 003 004 006 010 1/4 3/8 1/2 3/4 1 R NPT Nil N 04 05 06 07 08 10 11 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside