MY1

MX 6.0 3.0 2.0 18 7 2.1 16 200 10 5.0 3.0 25 10 3 20 40 50 40 50 MTS 15 8.5 5.0 35 14 4.2 25 MY1C 30 14 10 49 21 6 32 100 30 MY 30 60 23 20 68 30 8.2 40 115 35 35 93 42 11.5 50 20 20 CY 150 50 50 130 60 16 63 50 The above values are the maximum allowable values for moment and load.

LX

The dimension inside [ ] shows the location at which the home position switch operates. 9 10 [16.5] 10 21.5 4-M6 x 1 depth 10 Section C 18 7.5 Section F B 4-M6 x 1 4.5 LJ1 LG1 LC1 LX LC6D/LC6C Switches 1 30.5 34 47.5 4-9.5 4-5.6 +0.1 0 8.4 5.4 34 0.02 78 91 94 64 50 10 B 4H9 +0.030 0 depth 6 26 63 73 30 D Stroke + 181 (Stroke: 50 to 100 mm) Stroke + 198 (Stroke: 125 to 200mm) 5.5 12 43

Modular F.R.L. Units

Model 1 Port size A B D Applicable model E100-M5-A M5 x 0.8 10 14 14 AC10l-A E200-l01-A 1/8 Port size 29.8 23.5 28 AC20l-B E200-l02-A 1/4 E200-l03-A 3/8 E300-l02-A 1/4 B Center of F.R.L. body 31.8 30 30 AC25l-B, AC30l-B E300-l03-A 3/8 E300-l04-A 1/2 E400-l02-A 1/4 D A 31.8 36 36 AC40l-B E400-l03-A 3/8 E400-l04-A 1/2 E400-l06-A 3/4 E500-l06-A 3/4 31.8 40 44 AC40l-06-B E600-l06-A 3/4 35 48

15

Motorless Motorless 400 500 200 LAT 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LZ Work load [kg] Work load [kg] 2000 1000 LC3F2 800 1500 L5 [mm] L5 [mm] Bottom m Me 600 1000 Y 400 L5 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 2000 1000 800 1500 L6 [mm] L6 [mm] 600 1000 Z L6 400 m Me 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work

5 Port Solenoid Valve Series SY3000/5000/7000/9000

-SY3000/5000 Type 45 Dimensions: Series 10-SY5000 Note) [ ]: AC 10-SS5Y5-45Stations DC4,N3 C6,N7 C8,N9 10-SS5Y5-45Stations UC4,N3 C6,N7 C8,N9 (Pitch) (Pitch) DIN rail release button 14.5 26 17 25 P=16 26 17 P=16 DIN rail release button 14.5 15.5 31.5 31.5 15.5 32 32 R A A A A A R A A A A A B P B B B B B B B B B P Applicable tubing O.D.: 10, 3/8" (P, R port) One-touch fitting Applicable tubing

Modular F.R.L. Unit

Metal bowl Optional specifications B B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B O S 1/4 10 One-touch fitting Width across flats 17 O S Standard specification Accessory specification With bracket With auto drain Model Port size A B C D P E F G H J K L M B AFD20 1/8, 1/4 40 97 10 40 18 30 27 22 5.4 8.4 40 2.3 115 AFD30 1/4, 3/8 53 129 14 53 57 16 41 40

Aluminum High Vacuum Angle Valve

magnet) Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-7 1.3 x 10-9 (FKM) None A B C Note 1) Standard lead wire length is 0.5 m.

Table of Contents

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

Electric Actuator with Integrated Guide

2 in case of 500 to 600 mm strokes 22.5 19 B: Stroke + 75 10 19 Stroke + 95 64 Motor unit2 D section detail (Sensor rail dimensions) Stroke + 169 40 10 Work piece mounting reference plane1 30 5 5.8 3.3 4.9 1 4 15 30 33 E section detail (Switch rail T-slot dimensions) Body mounting reference plane1 17.5 Pitch = 100 60 (n1-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2

Fluoropolymer Piping Equipment

LVP LVW Size combination (Metric) Size combination (Inch) B side (Center) C side (Right) A side (Left) LQ1 LQ1 B side (Center) C side (Right) A side (Left) Class Model Applicable tubing size (mm) Class Model Applicable tubing size (inch) LQ3 10 x 8 8 x 6 10 x 8 10 x 8 10 x 8 8 x 6 10 x 8 8 x 6 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 6 x 4 3 x 2 19 x 16 19 x

Modular F.R.L. Unit

Model Description AC10B G27-10-R1 AC20B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 Y200 IS1000M-20 AC25B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD37 Y300 IS1000M-30 AC30B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD37 Y300 IS1000M-30 AC40B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD47 Y400 IS1000M-40 AC40B-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD47 Y500 IS1000M-50 AC50B G46-10-02 GC3

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: J X = (mm) (mm) Short shaft side Y Y X X Size Size Long shaft side 10 10 1 to 14 1 to 12 1 to 14 1 to 10 Body (B) 15 15 1.5 to 18 1.5 to 15.5 1.5 to 18 1.5 to 11.5 Body (A) Body (B) 20 20 1.5 to 20 1.5 to 17 1.5 to 20 1.5 to 13 Body (A) Y = 30 30 2 to 22 2 to 19 2 to 22 2 to 16 Long shaft side 40 40 4.5 to 30 4.5 to 28 3 to 30 3 to 17 Short shaft side 112 Series CRBU2

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

31.5 20 Stations 228.5 220.5 513 10-SYJ3000 Manifold specifications Flat ribbon cable manifold [ ]: AC 10-SS5YJ3-21PStations -00 L1 L2 4 Manual override + + + M3 x 0.5 (A, B port) + 10 2 2 5.2 111.5[115.9] 17.3 30 17 7.5 7 8.5 3 98.6[103] B A B A B A B A B A B A 16 R P R P 29.2 31.5 61.3[63.5] 62.1[64.3] 45.5 65.3 2-4.5 (For mounting) + + + + + + Triangle mark (Pitch) P=12.5 1/8 (P, R port

LJ1H

Motor Mounting 143 Deflection Data 145 Part Number Designations N 1 1 B G LJ1 H 10 100 F W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 None B contact specification 2 pcs.

Air Cylinder

Rod Trunnion (U) with Pivot Bracket TS Bracket mounting range B TH TT 4 x TF Z TW TY TX TV +0.10 0 TE Male Thread Female Thread (mm) (mm) Bore size B TE TF TH TS TT TV TW TX TY Z 20 38 10 5.5 25 28 3.2 35.8 42 16 28 46 25 45.5 10 5.5 30 33 3.2 39.8 42 20 28 51 32 54 10 6.6 35 40 4.5 49.4 48 22 28 51 40 63.5 10 6.6 40 49 4.5 58.4 56 30 30 62 50 79 20 9 50 60 6 72.4 64 36 36 71 63 96 20 11

Air Cylinder

19 8 20 0 0.033 13 10.5 8 41 5 28 5 6 30 M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39 M14

MGP

20 30 40 50 51 100 200 10 10 20 30 40 50 51 100 200 Stroke (mm) Stroke (mm) 7 l = 50mm V = 400mm/s 8 l = 100mm V = 400mm/s 50 50 80 80 80 80 40 40 30 30 20 20 50 50 50 50 10 10 50 20 30 40 51 100 200 10 10 50 20 30 40 51 100 200 47 Series MGP Compact Guide Cylinder: Heavy Duty Guide Rod Type Operating Range when Used as Stopper 2000 l: Approx. 50mm l: Approx. 50mm MGPS80 1000 m m Weight

Environment

300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 30 50 Lead B Lead B 40 Work load: W [kg] Work load: W [kg] 20 30 Lead A Lead A 20 Lead H 10 Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 70 Lead B 30 60 Lead B Work load:

SY

24.8 13.5 P = 10.5 (Pitch) 78.3 [84.8] 42 34.5 DIN rail 90.5 (64) 38.5 B B B 34 77 30 17 35 A A A Manual override 15 77.5 SS5Y3-45-D .