Manifold Specifications

Internal wiring 1 3 5 6 M5 C4 C6 VZ323MOZApplicable valve model Rated voltage 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Note ) Withstand voltage specifications of wiring unit part is equivalent to JIS C 0704 class 1.

0.

Blanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 L Dimensions (mm) A Applicable fitting size d Model A L D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 D L DIN rail AXT100-DR-l 7.5 As for l, enter the number from the DIN rail dimensions table.

3 Port Solenoid Valve

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Response Time Response time ms (at 0.5 MPa) 7 or less Mass Valve model Number of solenoids 1 pc. (Single) 2 pcs.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread U side D side Stations 1 2 3 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L1 L2 L3 31 50 60.5 53 75 85.5

Fieldbus System

(C12: 12 One-touch fitting) Output connector 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 56.6 30 R R 8 11.5 76.5 3 3 X X 49.5 B B B B B B B B 12 P12 P 30 25 1 A 1 A A A A A A A 13.5 10 (12) 25 (7.5) C10: 10 One-touch fitting C10 [1(P) SUP port] 45 P = 16 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

Valve Single Unit

C10 C4 C6 C6 C8 SX3000 12 12 stations Note) For SS5X3: 4 to 12 stations.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

C4 Type 10-SS3YJ3-S42-M5 Type 10-SS3YJ3-S42-C4 Base mounted for internal pilot 0.17 0.36 0.3 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.2 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 10-SYJ34M 1/8 C4 M5 x 0.8 C4 10-SYJ34M 1/8 Note) The values are for individually operated 2 position type manifold bases.

7.4

(Stations 7 to 8) SS0752-08C S0712-5G-C4 S0722-5G-C4 S0732-5G-C4 S07A2-5G-C4 Body Ported Manifold Bar Base Voltage Symbol Type 5 24 VDC 6 12 VDC Note) The valve cannot be used as a standalone unit. Prefix the asterisk to the part numbers of the solenoid valve etc. Write sequentially from the 1st station on the D side.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 Color: White 3.2 4 6 8 10 D VP VG VP DIN rail AXT100-DRS070 L As for , enter the number from the DIN rail dimensions table.

3 Port Solenoid Valve Series SYJ300/500/700

Station n L1 L2 3 46 39 Station 20 224.5 217.5 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 Station 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 11 Series SYJ300 C4 N3 Type 42 Manifold: Side Ported/SS3YJ3-42Stations -M5, [ ] for AC Grommet (G) For M5 C4 N3 For (Built-in one-touch

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

Table of Contents

11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

200 176.5 17 7 210.5 200 187 12 8 223 212.5 197.5 13 9 235.5 225 208 14 L1 L2 L3 L4 L1 L2 L3 L4 L n 12 260.5 250 229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Flat ribbon cable connector SOL.A () (+) 20 1 station SOL.B () 18 (+) SOL.A 20 19 () 16 (+) 2 stations SOL.B 18 17 () 14 (+) 16 15 SOL.A 12 () (+) 3 stations 14 13 SOL.B () (+) 10 12 11 SOL.A 8 () (+) 10 9 4 stations SOL.B () 6 (+) 8 7 Connector terminal no.

7.5

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Serial wiring: EX180 Response Time Type of actuation Response time ms (at 0.5 MPa) SJ2000 SJ3000 2 position single 2 position double 3 position 4 position dual 3 port valve 16 or less 10 or less 34 or less 30 or less 16 or less 10 or less 22 or less 30 or less Gateway system Serial transmission system

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 to 100 2 to 200 Power supply voltage Rated flow range [L/min] 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 2 to 200 5 to 500 10 to 1000 20 to 2000 5 to 500 10 to 1000 20 to 2000 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 1 to 1 3 to 3 30 to 3000 10 to 1000 20 to 2000 60 to 6000 120 to 12000 24 VDC 10% PF3A7 H 12 to 24 VDC 10% 12 to 24 VDC PF2M7 PFMC 10% 18 to 30 VDC 10% PF3A7 H-L 12 to 24 VDC

Compact Vacuum Unit

Supply from one side 8 10 10 M5 x 0.8 Supply from both sides 10 12 12 Note) These values are obtained under the standard supply pressure.

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.