0.4

A B A B A B A B A A 93.5 116 42 (35) 66 75 80 (54) 36 (40) (5.5) 2 11 2 x M5 mounting hole 4 x M4 mounting hole 8 7 6 5 4 3 2 1 n D side Stations U side 4 x G 1/2 Conduit port 90.7 2.6 C8: 8 One-touch fitting 2 x C8: [3(R) EXH port] DIN rail clamp screw R R 62.5 X 3 X 3 55.5 7.7 40.5 B B B B B B B B 12 12 P P 25 1 1 A A A A A A A A 18.7 9.5 (12) 33.5 (7.5) C8: 8 One-touch fitting C8 [1(P

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

C95

GD GC EE SW EE SW1 KK WA WA WB B D B ??

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5

VFS

[dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Weight (kg) Plug-in Non plug-in VF 2.6 2.8 2.6 2.8 2.5 2.7 2.6 2.9 2.7 2.9 2.8 3.1 2.8 3.1 2.3 2.6 2.3 2.4 2.7 2.8 3 8 0.20 0.22 0.20 0.22 0.14 0.22 0.15 0.15 0.22 0.22 VFS4110 11 12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000

Floating Joint

-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 71000 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 7 8 8 11 11 11 14 14 19 24 24 24 36 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16

C76

A B 32 8 7 7 6 40 14 12 13 11 Aim at this number.

C76

A B A B A B A B A 32 8 (6) 7 (5) 8.5 (6.5) 14.5 (11.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (5) 12 (9) 40 10 (11) 12 (9) 7.5 (5.5) 12.5 (9.5) 15 (12) 13 (10) 13 (10) 11 (8) 5 (3) 11 (7) Aim at this number ( ) For air cushion type Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BAL D-F79F D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-A7 D-A80 D-A7H D-A80H D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators FT F 4 x FD 0 E0.05 FX0.15 B B FX0.15 (mm) FT 6 7 7 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 80 104 40 3 82 11 11 100 128 50 3 100 14 14 FD 5.5 5.5 6.6 6.6 FX 28 32 38 46 F 2 2 2 2 E 12 14 18 25 B 40 44 53 61 Bore size 20 25 32 40 Note) End boss is machined on the flange for E. Other dimensions are the same as basic type.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Applicable Auto Switch Model

10 12 12 13 13 13 CD-P11 CD-P12 OUT( ) Blue(Black) B P CDXW 6 6 6 CDY1S CY1L RSDQ MDU CE1 MK, MK2 CXT 6 6 6 6 6 6 11 13 11 11 11 Note) qIn the case operation load is an inductive load. wIn the case the wiring length to load is > 5m. eIn the case the load voltage is 100 or 200V AC.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1-B 270 LE-CA-3-B 520 LE-CA-5-B 870 LE-CA-8-B 1370 LE-CA-A-B 1710 LE-CA-B-B 2560 LE-CA-C-B 3400 U V W Red White Black Connector A2 terminal no. B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Series KV2 Fittings

100/200 100/200 100/200 100/200 100/200 100/200 * Dimension A reference after installation. 11 Series KV2 Union Y KV2U_ _-_ _ Applicable Tube A Applicable Tube B P MB MA L2 L1 4.2 8 Q MC D1 Applicable Tube C D2 L3 D3 App.

LEC-OM07605CN

(c) AERSBAN-_SET SD [:mm] (A B) 40 [mm] [mm] 2-5 17.5 30 B0.3 10 L A 35 C +0.3 6 -0.2 24 0 24 0 3 7 6 22 ()M4 3 5 11 . A B C L AERSBAN-DSET 100 86 30 2 A 70 AERSBAN-ESET 70 56 B1 B 45 11 22 11.

HRX-OM-X037

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

Booster Regulator/Air Tank

VY1 Connected to VBA20A, 40A VBAT20A1 VBA VBAT VBA VBAT Material: Carbon steel Connected to VBA22A, 42A AP100 Tank IN port Rc 1/2 Booster regulator IN port Booster regulator IN port Tank OUT port Rc 1/2 C C Spare port Rc 1/2 EXH: C EXH: C (A) (B) (A) D (B) OUT OUT 305 180 206 206 4 x 13 4 x 13 50 50 200 100 100 400 Drain port Rc 1/4 200 674 (mm) D Note) 469 493 685 A 481 520 444 477 B 394