Tie-rod Type Hydraulic Cylinder

14 17.5 9.5 M8 x 1.25 18 10 20 M14 x 1.5 30 22 1/4 37 106 11 15 50 19 50 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 10 22 M16 x 1.5 30 26 3/8 43 112 11 15 63 21 55 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 10 25 M18 x 1.5 30 26 3/8 47 116 11 15 80 26 65 M12 x 1.75 32 8 100 75 28 32 22 20 15 26 13 29 M22 x 1.5 35 30 1/2 57 127 11 25 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 90 35.5 35 27 19 16 27

Electric Actuator/Slider Type

(mm) T U Y V Without lock With lock F G W X Z W X Z 25 15 to 100 92 1 26.5 40 82.5 115.5 11 127.5 160.5 11 2 4 105 to 400 32 20 to 100 118 1 34 60 80 120 14 120 160 14 2 4 105 to 500 63 50 to 200 146 4 32.2 60 98.5 138.5 12.5 (13.5)138.5 178.5 12.5 (13.5) 4 8 205 to 500 505 to 800 L lead Motor left side parallel type: LEY L 25 32 63 Motor right side parallel type: LEY R 25 32 63 U S1 U S1

CNA

Up to 600 +0.3 +0.1 7 M10 x 1.25 18 35 32 86 27 115 1/4 1/4 64 16 25 49 20 40 10 102 17 67 20 18 12 15 11 Up to 600 +0.3 +0.1 11 M12 x 1.75 22 40 37 102 32 139 1/4 1/4 78 20 31.5 61 25 52 14 123 21 83 20 23 18 17 13 Up to 750 +0.3 +0.1 11 M12 x 1.75 26 40 37 116 41 160 1/4 1/4 92 25 35.5 64 30 52 14 144 21 98 22 25 20 19 16 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range

CNA

Up to 600 +0.3 +0.1 7 M10 x 1.25 18 25 35 32 86 27 115 1/4 1/4 64 16 49 20 40 10 102 17 67 20 18 12 15 11 Up to 600 +0.3 +0.1 11 M12 x 1.75 22 31.5 40 37 102 32 139 1/4 1/4 78 20 61 25 52 14 123 21 83 20 23 18 17 13 Up to 750 +0.3 +0.1 11 M12 x 1.75 26 35.5 40 37 116 41 160 1/4 1/4 92 25 64 30 52 14 144 21 98 22 25 20 19 16 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

LEC-OM07605CN

(FR-BSF01FR-BLF) 7) 8) 11 20 11.

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

CY1

of adjustment (both sides) (mm) Bore size (mm) 40 1500 6 10 15 20 25 32 40 12 11 7 Magnetic Holding Force (N) 11 1N: Approx. 0.102kgf 10 6 10 15 20 25 32 40 Bore size (mm) 11 19.6 53.9 137 231 363 588 922 H type 9 Holding force type 81.4 154 221 358 569 L type Since the cylinder is in an intermediate stop condition when stroke adjustment is performed, use caution regarding the operating

MU

Single clevis MUC25SMU25, #5 (#1+#5+#11) MUC32SMU32, #5 (#1+#5+#11) MUC40SMU40, #5 (#1+#5+#11) MUC50SMU50, #5 (#1+#5+#11) MUC63SMU63, #5 (#1+#5+#11) 2.4-5 Plate Cylinder/Double Acting Double Rod Series MUW 20, 32, 40, 50, 63 How to Order Standard MUW B 25 30 D M MDUW B 25 30 D M A73 S With auto switch Built-in magnet Number of auto switches 2 1 n Double rod S n Mounting B L F Basic Foot

Air Fittings & Tubing

(inch) Min. hole dia. (1) Fitting size d (inch) D1 D2 M A L2 L1 KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 9.6 7 10 10 8 15.5 1 8 21.5 22.5 14.5 15.5 23 24.5 23.5 33 33.5 26 26.5 35.5 36.5 39.5 40.5 41.5 43 16 18 10.4

Compact 5-Port Solenoid Valve

Note SOL.a SOL.b (+) (+) () () 24 11 Station 11 1.5 m SY30M-DS25-015 Cable 0.3 mm2 x 25 cores 3 m SY30M-DS25-030 5 m SY30M-DS25-050 1.5 m AXT100-DS25-015 Cable 0.3 mm2 x 25 cores 3 m AXT100-DS25-030 5 m AXT100-DS25-050 Station 12 SOL.b SOL.a (+) (+) () () 25 12 * Be sure to use the connector cable in the table, to satisfy enclosure IP67. * Cannot be used for movable wiring * When using

MHZ

Internal Grip MHZ2, 11-MHZ2 MHZ2-6 MHZ2-25/11-MHZ2-25 40 100 Pressure 0.2 MPa Pressure 0.2 MPa 30 Overhang H (mm) Overhang H (mm) 80 H H 0.5 MPa 0.5 MPa Pressure 0.2 MPa Pressure 0.2 MPa 0.6 MPa 0.6 MPa 60 0.3MPa 0.3MPa 20 0.7 MPa 0.7 MPa 0.7 MPa 0.7 MPa 0.3 MPa 0.3 MPa 0.4 MPa 0.4 MPa Gripping point L 40 0.4 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.6 MPa 10 20 MHZAJ2, MHZJ2 0 20 40 60 80 100

MHZ

Internal Grip MHZ2, 11-MHZ2 MHZ2-6 MHZ2-25/11-MHZ2-25 40 100 Pressure 0.2 MPa Pressure 0.2 MPa 30 Overhang H (mm) Overhang H (mm) 80 H H 0.5 MPa 0.5 MPa Pressure 0.2 MPa Pressure 0.2 MPa 0.6 MPa 0.6 MPa 60 0.3MPa 0.3MPa 20 0.7 MPa 0.7 MPa 0.7 MPa 0.7 MPa 0.3 MPa 0.3 MPa 0.4 MPa 0.4 MPa Gripping point L 40 0.4 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.6 MPa 10 20 MHZAJ2, MHZJ2 0 20 40 60 80 100

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ110 can be mounted on VV4Z1-25 and VV4Z1-25F .

42

w AXT632-25-11 (M4 x 66) 2 q AXT632-25-6 (M4 x 114) 4 For manifold * The individual EXH cannot be mounted on the top. w AXT632-25-11 (M4 x 66) 2 Valve + Restrictor (Top) (Bottom) + Individual SUP or Individual EXH (Top) (Bottom) q w Valve + SUP stop valve (Top) + Individual SUP, Individual EXH or Restrictor (Bottom) q AXT632-25-6 (M4 x 114) 4 For manifold w AXT632-25-11 (M4 x 66) 2 Valve

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

11 20.5 41 (P, EA, EB port) 1/8 L plug connector (L): 10-SY3240(R)-L-01 M8 connector (WO): 10-SY3240(R)-WO-01 M plug connector (M): 10-SY3240(R)-M-01 108.6 [113] Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6 [71.6] 79 89 [93.4] 20.5 11 11 20.5 11 92 106.8 20.5 11 11 11 7.5 16.5 7.5 16.5 24.5 7.5 16.5 24.5 24.5 50 Note) Refer to page 176

Table of Contents

(Refer to page 14-19-11.)

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10-SYJ5223-WO-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107[111.4] 3 3 3 3 87.4[91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.