Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 40mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: M (Slide Bearing), Bore Size: 10mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 40mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 40mm

Specification: 11 (Clean Series, Vacuum Suction), Bearing: M (Slide Bearing), Bore Size: 6mm, Stroke: 40mm

Specification: 11 (Clean Series, Vacuum Suction), Bearing: L (Ball Bushing Bearing), Bore Size: 6mm, Stroke: 40mm

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (vacuum type), Port

Cylinder (Tube) Inner Diameter(φ): 15, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (vacuum type), Port

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (vacuum type), Port

Cylinder (Tube) Inner Diameter(φ): 15, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (vacuum type), Port

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Slide Bearing, Bore Size: 10mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 40mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

CATALOG

11 M5x0.8 20 106 35 25 ~300 19.5 22 16.5 10 14 2 12 12 31 M5x0.8 Depth 7.5 5 8 M10x1.25 29 18 69 11 11 M6x0.75 25 111 40 32 ~300 19.5 22 20 12 18 2 12 11 38 M5x0.8 Depth 8 5.5 10 M10x1.25 36 18 71 11 10 M8x1.0 40 32 113 40 ~300 27 30 26 16 25 2 13 12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13

2

) v Note 11) v Note 11) Note 1) Drain guide is NPT1/8 (applicable to the AFM20-A, AFD20-A) and NPT1/4 (applicable to the AFM30-A/40-A, AFD30-A/40-A).

Table of Contents

Therefore, also check the allowable load for the selected conditions. 6.1 10 16 20 25 32 40 MX 0.8 6.1 1.1 0.8 6.1 10.8 3.7 10.8 4.9 3.7 10.8 40 50 40 50 40 50 17.6 MTS 11 17.6 16 11 17.6 MY1H 27.5 23 27.5 26 23 27.5 30 30 30 39.2 MY 39 39.2 50 39 39.2 20 50 39 50 50 50 50 20 20 CY The above values are the maximum allowable values for moment and load.

A

11 M5x0.8 20 106 35 25 ~300 19.5 22 16.5 10 14 2 12 12 31 M5x0.8 Depth 7.5 5 8 M10x1.25 29 18 69 11 11 M6x0.75 25 111 40 32 ~300 19.5 22 20 12 18 2 12 11 38 M5x0.8 Depth 8 5.5 10 M10x1.25 36 18 71 11 10 M8x1.0 40 32 113 40 ~300 27 30 26 16 25 2 13 12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13

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32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to