Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

ZP

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

MGG

50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 150, 200, 250 14 depth 10 19 21 22 150 45 50 M10 x 1.5 depth 20 182 194 37 120 170 11 55 103 M14 x 2 depth 25 38 7 11 12 7 300 17 depth 12 For long strokes Bore size (mm) Stroke range (mm) Bore size (mm) PG PL W X XA Y Z R Y K L M N O Q R S V T U 20 25 32 40 250 to 400 350 to 500 350 to 600 350 to 800 30.5 74 52 30 3 152 194 14 160 20 25 32 40 80 106

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0.43 0.73 0.63 0.73 0.2 JSX21-S Cm503 320 360 7.1 3.15 0.44 0.88 0.76 0.88 0.1 JSX21-S Cm703 320 360 3/8 1/4 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm402 450 490 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm502 450 490 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm702 450 490 30 3/8 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm403 450 520 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm503 450 520

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

C95

2 2 1 100 200 300 400 500 1000 1 100 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 6-12-28 29 Series C95N Specific Product Precautions 1 Be sure to read before handing.

Compact

Dynamic Allowable Moment (LEMB Series) Acceleration/Deceleration 2500 mm/s2 5000 mm/s2 10 mm/s2 20 mm/s2 Load overhanging direction m : Work load [mm] Me: Dynamic allowable moment [Nm] L : Overhang to the work load center of gravity [mm] Orientation Model: LEMB25/LEMB32 Speed: 300 mm/s or less Speed: 500 mm/s Speed: 800 mm/s Speed: 1000 mm/s 300 300 300 300 200 200 200 200 L1 L1 [mm] L1 [

5

58 M8 x 1.25 depth 16 7 18 M18 x 1.5 55 63 35 32 27 38 20 32 2 58 11 72 M10 x 1.5 depth 16 7 18 M18 x 1.5 69 80 40 37 32 50 25 40 3 71 13 89 M10 x 1.5 depth 22 10 22 M22 x 1.5 86 100 40 37 41 60 30 50 3 71 16 110 M12 x 1.75 depth 22 10 26 M26 x 1.5 106 (mm) Bore size (mm) Stroke range (mm) S TA TB ZZ Rc, NPT port G port GA GB P GA GB P 20 77 11 11 114 12 12 1/8 12 12 M5 x 0.8 25 77 11 11

C95

] 10 10 CS1 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m [kg] 32 Load weight: m [kg] 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000

51

22 22 30 35 35 40 40 15.5 19.5 19.5 27 32 32 37 37 35 40 40 50 58 58 71 71 94 102 104 114 144 144 178 179 Up to 300 CG3 CG3 Up to 300 Up to 300 Up to 300 JMB AL Up to 300 H A Up to 300 ZZ + Stroke ZZ + Stroke H MB Up to 300 Basic (mm) MB1 Bore size (mm) Standard stroke A AL B1 C D E F GA GB H1 H ZZ I J KA MM NA P S CA2 20 25 32 40 50 63 80 100 79 85 87 93 121 121 151 152 12 12.5 11 10.5

C85

-25 6-11-25 25 Series C85 Construction [First angle projection] Single acting, Single rod Spring return: C858 to 16-S (Disassembly is not possible.) !

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Manual override A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (Pilot EXH port) 41 11.3 (L = 300 to 5000) 97.8 92.2 M12 waterproof connector 53.5 48.5 24.5 16.5 11 11 7.5 1/8 (Piping port) 20.5 268 Single Unit/Sub-plate Type 10-SV Dimensions: Series 10-SV2000 2 position single/double, 4 position dual 3 port [M12 waterproof connector type]

SMC Pneumatic Clean Series

25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150

MNB

/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 1000 1000 100 80 500 400 300 500 400 300 63 63 100 80 200 200 50 40 50 100 100 63 Load weight: m(kg) Load weight: m(kg) 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V(mm /s) Maximum speed: V(mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

7.4 28 [35] M3 x 0.5 (A port) (Light/surge voltage suppressor) 28 [35] + 22.1 48.6 [50.8] 13.5 12.6 15 M3 x 0.5 (P, R port) 2 (Bracket) 15 11 10 P R 22.1 6.7 7 9.2 L plug connector (L): 10-SYJ32M-L-M3 M plug connector (M): 10-SYJ32M-M-M3 M8 connector (WO): 10-SYJ32M-WO-M3 58.5 [60.7] Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15 39.1 [46.1] Approx. 300 (Lead wire length) 48.7

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Without rod boot With rod boot (One side) (Both sides) H ZZ d* e f h l ZZ ZZ 40 8 M8 x 1.25 6 14 71 11 M14 x 1.5 27 1/4 42 11 20 45 153 51 255 52 43 15 59 1/4 stroke 263 271 50 11 M8 x 1.25 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50 168 58 284 58 52 15 66 1/4 stroke 292 300 63 11 M10 x 1.25 7 18 99 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 58 298 58 52 17.5 66 1/4 stroke 306 314 80 13 M12 x 1.75

VFS

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Environment

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

LEY-OM007

320%(F.S.) 4LEYG1635%85%LEYG2535%65%LEYG3235%85% 7.2[]P41 LEY 55m 5m 10% 15m 20% 6 7() 452000Hz 1 () 8 9 10 11 12 -13- (2)(DC24V) M LA LEYG 25 M LA LEYG 16 [mm] 1) 30,50,100,150,200 30,50,100,150,200,250,300 (3000[mm/s 2]) 3 6 12 7 15 30 [kg] 2) (3000[mm/s 2]) 1.5 3.5 7.5 2 5 11 [N] 3) 4) 1630 3058 57111 1835 3772 66130 [mm/s] 15500 8250 4125 18500 9250 5125 [mm/s 2] 3,000 [mm/s