Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Indicator light Lead wire Oil resistant vinyl heavy-duty cord, 2.7 x 3.2 ellipse 0.15 mm2, 2 cores (D-M9B), 3 cores (D-M9N, D-M9P) Note 1) Regarding the common specifications of the solid state switches, refer to page 12-13-5. Note 2) Regarding the lead wire length, refer to page 12-13-5.

2–4

6 17 12 4.5 25.5 5.4 9 9 10 7 1 26 8 22 15.6 5 28 5.4 9 11 10 7 1 30 8 Note) For the following bore/stroke sizes, the through-hole is threaded.

Air Slide Table

Metal stopper with bumper Rubber stopper Shock absorber L1 L1 L1 10 5.5 22.5 9 10 5 20 10.5 22.5 10 11 6 30 20 22.5 10 11 6 40 24.5 22.5 10 11 6 50 17.5 22.5 10 11 6 75 46.5 46.5 10 11 6 Stroke K MZ MZ K 14 Low thrust with high rigidity type MXQB Single side-ported type MXQC Height interchangeable type MXQ Auto Switch Mounting Made to Order Model Selection Common Adjuster Options 5 Adjustment

Compact Type

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

Compact Type Dual-Rod Cylinder Series CXSJ

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

XM, XY

type: 5 to 150) 1 x 10-6 up to atmospheric pressure Operating pressure (Pa)(abs) Conductance (L/s) Note 1) 14 45 80 160 200 5 1.3 x 10-10 {1 x 10-10} at ambient temperature, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam 3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperature, excluding gas permeation (Standard material: FKM) External Operating time (s) 0.1 0.21 0.24

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(different sides) D-M9N/M9P/M9B 15 3 3 3.5 2 pcs. (same side) D-F9NW/F9PW/F9BW 55 5 5 4.5 D-M9N/M9P/M9B 1 or 2 pcs. (different sides) D-F9BAL 15 5 6 5 2 pcs. (same side) The operating range for the MGZP series is under examination. 55 Solid state switch D-F9NW/F9PW/F9BW 1 or 2 pcs. (different sides) 15 2 pcs. (same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs.

Integrated Controller

supply connector (M12) 7.5 Auto switch groove (1 row per side)5 M4 x 0.7 thread depth 8 (F.G. terminal) 46.8 60 34.2 27.8 21.1 Motor option: With lock (16) (219.9) B + Stroke D x 150 (= E) 15 15 5 H9 (+0.030 0 ) depth 5 150 n x 5.5 60 5 6 5 H9 (+0.030 0 ) depth 5 5 H9 (+0.030 0 ) depth 5 10 G 25 1 When mounting the actuator using the body mounting reference plane, set the height of the

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

1263.5 906 960 12 4 800 180 11-LEJS40S-10001323.5 1363.5 1006 1060 14 5 1000 80 11-LEJS40S-12001523.5 1563.5 1206 1260 16 6 1200 80 535 11-LEJS Series AC Servo Motor Clean Room Specication Dimensions: Ball Screw Drive 11-LEJS63 Body mounting reference plane Note 2) 4 x M8 x 1.25 depth 12 6H9 ( ) depth 7 +0.030 0 (172) 122 M4 x 0.7 depth 8 (F.G. terminal) 25 (3.1) 90 129 Motor cable (6) 68

NCQ8

/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/

CHKD/CHKG

CHS CH2 Minimum Auto Switch Mounting Stroke CHA (mm) Related Products D-M9 D-M9V D-Y59 D-Y69 D-Y7P D-Y7PV D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-Z7 D-Z80 Auto Switch Mounting Number DD-Y7W D-Y7WV D-Y7BA 1 pc. 2 pcs. 5 5 10 10 15 5 10 10 15 15 Operating Range (mm) Auto switch models Bore size 20 25 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 4.5 4.5 4 7 5 5.5 7.5 11 D-Y59/Y69 D-Y7/Y7V

ISO Standard Hydraulic Cylinder

5 !6 @9 @8 !4 !3 @1 @3 @2 e o !8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

Compact Cylinder

5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2 17 8 46.5 6.6 M8 x 1.25 10.5 13.5 11 5 1.6 17 57 49 16 20 74 14.5 M10 x 1.5 96 3 17 8 56.5 6.6 M8 x 1.25 10.5 15.5 11 5 1.6 17 7 ISO Standards [ISO/21287] Compact Cylinder Series C55 Mounting Bracket Foot bracket Flange bracket Hexagon socket head cap screw (accessory) 2 x FD

Auto Switch Guide

CS1 Main circuit of switch OUT Black C76 Weight C85 DC () Blue (g) C95 D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 CP95 Lead wire length (m) 3 54 54 54 DC (+) Brown NCM 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions NCA OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DDC () Blue -X 3.4 2.5 D-Y7BW, D-Y7BWV SMC

Compact

Acceleration [mm/s2] 0 250 1 500 2 1000 3 1500 4 2000 5 2500 6 3000 7 4000 8 5000 9 6000 10 7500 11 10 12 12500 13 15000 14 17500 15 20 Note) The factory default setting for the switch is No.0.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Note MXP6-5 MXP-AD6-5 MXP6-10 MXP10-10 MXP-AD10-10 With magnet and MXP10-20 MXP-AD10-20 mounting screw MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 MXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !

JIS Standard Hydraulic Cylinder

100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F D-F5W/J59W D-F5BA/F5NT D-G5/K59/G59F D-G5W/K59W D-G5BA/G5NT D-G39/K39 D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 5 5 5.5 5 5 D4.5 4 4.5 4.5 4.5 4.5 4.5 5 5 6.5 6.5 8 12 9.5 11 10.5 8.5 8.5 13 10.5 12 9.5 11 8.5 9.5 13.5 11 13 10 11.5 9.5 9.5 14.5 12.5 14 11 11.5 9.5 10 14.5 13 14 11 12.5 10.5 11 15.5 14.5 15 12 Note 1) Auto switch

Tie-rod Type Hydraulic Cylinder

50 19 50 25 9 73 17 M10 x 1.5 20 M16 x 1.5 10 9 53 20 13 16 11 28 22 3/8 17 30 26 43 112 5 63 21 55 28 8 80 17 M10 x 1.5 22 M18 x 1.5 12 10 60 22.4 13 16 11 30 25 3/8 17 30 26 47 116 5 80 26 65 M12 x 1.75 32 8 100 20 26 M22 x 1.5 16 13 75 28 15 19 11 32 29 1/2 22 35 30 57 127 5 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 19 27 20 16 90 35.5 16 21 12 35 34 1/2 27 35 32 66 137 8 125 34 80 M14 x

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 11-9-20 21 Rotary Table Series MSQ Dimensions: Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type: MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA counterbore depth JB 22.5 CRB2 BE CRBU2 CRB1 WF 2-M5 x 0.8 Piping port (Plugged)

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

B1 Bore size (mm) 32 40 50 63 80 100 125 l2 E B2 B3 L1 TG1 T FL d1 d2 d3 CN R 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32