Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Applicable Auto Switch Model

Refer to the p.5.3-6 for the details of contact protection box. 13 13 13 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 14 14 16 15 17 17 17 17 14 16 16 13 13 13 13 Note) Average value at normal temperature including hysteresis.

Rotary Clamp Cylinders

D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W 12 12 12 11 10 12 13 13 13 14 14 16 5 5 5 D-P4DWL 16 Series MK/MK2 Auto Switch Mounting Bracket/Part No.

Hydraulic

Nil (Example) A93 3m . L (Example) A93L 5m .

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6.

MY1

67 83 106 129 30 32 38 50 57 3.6 3.6 3.5 4.5 4.5 5.8 5.8 6.5 8.5 10 14 14 40.8 40.8 46.7 67.3 67.3 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) RB0806 RB0806 RB1007 RB1412 RB1412 6 6 7 12 12 10 12 14 17 MY1M25 MY1M32 MY1M40 66 80 91 6 6 6 54 67 78 13 16 17.5 MY1M50 MY1M63 6 6 40 52 20 26 66 77 26 31 5.5 5.5 73.2 73.2 15 15 13 (Max. 33) 13 (Max. 38) 128 152 RB2015 RB2015

Compact Cylinder

Indicator light CE marking Standard Auto Switch Internal Circuit Lead wires D-A90(V)/D-A93(V)Oilproof heavy-duty vinyl cord, 2.7, 0.18 mm2 x 2 cores (Brown, Blue), 0.5 m D-A96(V)Oilproof heavy-duty vinyl cord, 2.7, 0.15 mm2 x 3 cores (Brown, Black, Blue), 0.5 m Note 1) Refer to page 13 for reed auto switch common specifications. Note 2) Refer to page 13 for lead wire lengths.

Air Cylinder Series CA2

13 14 15 16 14 14 17 18 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 8 7 5.5 6.5 6.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Auto Switch Guide

/A96 D-A90V/A93V/A96V D-90/97 D-90A/93A D-Z73/Z76/Z80* 10-20-10 Grommet 10-20-11 Connector 10-20-12 Band 10-20-13 Terminal conduit 10-20-14 10-20-13 DIN terminal 10-20-14 10-20-15 Grommet Rail 10-20-16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector 10-20

Auto Switch Guide

/A96 D-A90V/A93V/A96V D-90/97 D-90A/93A D-Z73/Z76/Z80* 6-16-10 Grommet 6-16-11 Connector 6-16-12 Band 6-16-13 Terminal conduit 6-16-14 6-16-13 DIN terminal 6-16-14 6-16-15 Grommet Rail 6-16-16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector 6-16-17 Reed

Auto Switch Guide

/A96 D-A90V/A93V/A96V D-90/97 D-90A/93A D-Z73/Z76/Z80* 9-15-10 Grommet 9-15-11 Connector 9-15-12 Band 9-15-13 Terminal conduit 9-15-14 9-15-13 DIN terminal 9-15-14 9-15-15 Grommet Rail 9-15-16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector 9-15-17 Reed

CQ2

16 16 18.5 13.5 11.5 14 D-F9W D-F9WV D-F9BAL D-A7 D-A80 D-A9 D-A9V D-F9 D-F9V D-A79W Bore (mm) A 9.5 12.5 15.5 15.5 18 13 11 13.5 A 7 10 13 13 15.5 10.5 8.5 11 B 5.5 5 6.5 7 6 8.5 11.5 14.5 B 6 5.5 7 7.5 6.5 9 12 15 B 3 2.5 4 4.5 3.5 6 9 12 B 10 9.5 11 11.5 10.5 13 16 19 A 17 12 10 12.5 B 5 7.5 10.5 13.5 A 21 16 14 16.5 B 9 11.5 14.5 17.5 A 20 15 13 15.5 B 8 10.5 13.5 16.5 12 16 20 25 32

NCM

Note 2) When two D-M9, M9W, or A93 type auto switches are mounted on models with bore size 044.

Air Slide Table Series MXS P.319

MXS6-PS 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS !7 !8 !9 Piston seal MXS8-PS Rod seal NBR MXS12-PS Set of left nos. !7, !8, !9 O-ring MXS16-PS With end lock MXS20-PS MXS25-PS #2 #3 #4 #5 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

01-mxs-e

MXS6-PS 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS !7 !8 !9 Piston seal MXS8-PS Rod seal NBR MXS12-PS Set of left nos. !7, !8, !9 O-ring MXS16-PS With end lock MXS20-PS MXS25-PS #2 #3 #4 #5 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

24

PA + Stroke GA PB MGPM-Z, MGPL-Z, MGPA-Z Common Dimensions 2 x P (Plug) Bore size [mm] GA PA PB 12 10 13 8 16 10.5 14.5 10 20 11.5 13.5 10.5 25 11.5 12.5 13.5 32 12 6.5 16 40 15 13 18 50 15 9 21.5 63 15.5 13 28 80 19 14.5 25.5 100 22.5 17.5 32.5 MGJ JMGP MGP MGP MGPW MGQ Symbol MGG Side Porting Type (Plug location changed) 2 -X867 MGC Ports on the top plugged in order to use the piping port

Compact Cylinder

6 12 6.5 7 51 15 3 5 to 100 56 49.5 14 31 80 12 M8 x 1.25 depth 13 6 12 6.5 7 69 15 3 Rod End Male Thread (mm) X C1 B1 L1 H1 Size 20 25 32 40 18 15.5 13 24.5 M8 x 1.25 18 15.5 13 24.5 M8 x 1.25 26 23.5 19 32.5 M12 x 1.25 26 23.5 19 32.5 M12 x 1.25 For details about the rod end nut, refer to page 8. 6 Series CQU Compact Cylinder: Plate Type Double Acting, Single Rod Dimensions Vertical foot