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Controller Mounting: D (DIN Rail Mouting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603)

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: AN10-01, 62 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: -

. 600 0.51000(0.4 + 0.4) 1000 LEC = T1: Acceleration time [s] Time until reaching the set speed LEC S = 0.2 [s] T1 = V/a1 [s] T3 = V/a2 [s] T4 = 0.3 [s] T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed LEC

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

62 5.5 48 30 31 1 90 74 44 22 135.9 144.5 151 40 36 72 6.5 60 35 39.5 External pilot solenoid type (Conduit terminal) P Pilot port 2 x 1/8" (Back side PE: Filter standard installation) J N I Manual override 2.3 12 Bracket G O L M F E 4 x K 2 1 D C H (2 locations) Main port A B A B C D E F G H I J K L M N O P Main port Model SGC2lll-ll10 SGC2lll-ll15 SGC3lll-ll20 SGC4lll-ll25 3/8 63 49.6

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

1090 2 -67No.PF-OMM0004-D (PVC ) PF3W711 PF3W721 (3 mPas(3 cP)) 1 10100 L/min 30250 L/min 7140 L/min(7 L/min 0) 20350 L/min(20 L/min 0) 7140 L/min 20350 L/min 1 L/min 2 L/min (50 ms) 1 L/pulse 070 () L/minL 3F.S. 3F.S. 2F.S. 2 5%F.S.(25 ) 3 3 9 L 4 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Port size E F G H I L M P Q A Model B J R T U C D K N O S Port 2 (A),1 (P) Port 3 (R) VEX5500 VEX5501 133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions

Z S L, Z S Note ) PAX 1 1 4 1 2 PB AC Ordering example (Example) Series VXR21, Rc 3/4, 24 VDC, Conduit terminal (Part no.)

Note 1) Note 2) Note 3) 2-6-27 Base Mounted Series VQ5000 Kit (Serial transmission unit) S 83 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 12 21 47.5 36 PE R2 5 R1 3 1 P SMC 6-Rc 3/4 1(P), 5(R1), 3(R2) port 179 106 46.8 59.2 9 9 146 111 83.5 55.5 M5 ground screw 2-G1/2 Note) U side Conduit port 19 32.5 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 6 TM B 2 A 4 5 Indicator light B 2 A 4 A B 4

Z S L, Z S Note ) PAX 1 1 4 1 2 PB AC Ordering example (Example) Series VXR21, Rc 3/4, 24 VDC, Conduit terminal (Part no.)

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type (400 V type only) (Option S only) (UL Standards) (Option S only) RoHS HRSH090 Series How to Order A HRSH090 20 Cooling capacity 090 9.5 kW Option Nil None B Note 1) With earth leakage breaker J With automatic uid ll function M Applicable to deionized water piping S Note 2) Conforming to CE/UL standards Cooling method A Air-cooled refrigeration

F Kit P Kit T Kit S Kit 1 to 12 (24) Special wiring specifications Note 3) (except for double wiring) With name plate External pilot Note 4) K N R S Cylinder port size 2 C3 C4 C6 M5 CM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread 1 to 12 (24) Direct exhaust with built-in silencer Note 5) When specifying two or more options, list symbols in alphabetical

OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) Mitsubishi Electric Corp.: CC-LINK System Note 2) BB Note) Add 2 stations for serial unit mounting.

-1 (Plug-in type) VVQ5000-25A-5 (Plug lead type) Specifications Handling Precautions Intermediate stop Drop prevention VVQ5000-25A1 5 Double check spacer part no.