Tamper Proof and Flat Head Screw

JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Coil temperature: 20C, at rated voltage) SY3000 SY7000 With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) Type of actuation Without light/surge voltage suppressor 12 or less Type of actuation Without light/surge voltage suppressor 31 or less Type R, U Type S, Z 12 or less

80

Low temperature operation 1) The valve can be used in an ambient temperature of between 10 to 20C.

Digital Flow Switches

Flow rate conversion NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3kPa Standard state: 20C, 101.3kPa, 65%RH (ANR) Switchable between these states.

PF2A/PF2W

Flow rate conversion PF2 NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3 kPa Standard state: 20C, 101.3 kPa, 65%RH (ANR) Switchable between these states.

V

M km, 20C 5m VVZS3000-21A-3 x 24AWG * For other commercial connectors, use a 25-pole female connector made in conformity with MIL-C-24308.

Refrigerated Air Dryers

drain Float type (Normally closed) Float type (Normally open) Refrigerant R407C (HFC) IDF D Port size Rc3/8 Rc1/2 Rc3/4 Rc1 Weight [kg] 16 17 18 22 23 27 28 46 Coating color Body panel: White 1 Base: Gray 2 Applicable air compressor output [kW] (Reference) For screw type 0.75 1.5 2.2 3.7 5.5 7.5 11 15 Refrigerant R134a (HFC) IDU E *1 Air flow capacity under the standard condition (ANR) [20C

HRX-OM-X037

[Example of setting] Circulating fluid SP: 20C (1) High Temp. CH1 circulating fluid temperature rise (AL10): 22C (2) Low Temp.

MHZ

0.7 MPa Pressure 0.7 MPa 50 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 400 0.6 MPa 0.6 MPa Gripping force (N) Gripping force (N) 0.6 MPa 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa 40 300 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 20 0.3 MPa 0.3 MPa 0.25 MPa 0.25 MPa 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20C

MHZ

0.7 MPa Pressure 0.7 MPa 50 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 400 0.6 MPa 0.6 MPa Gripping force (N) Gripping force (N) 0.6 MPa 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa 40 300 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 20 0.3 MPa 0.3 MPa 0.25 MPa 0.25 MPa 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20C

IDU/IDF

Note) l/min (ANR) is for reference conditions of 20C, 1 ATM and 65% relative humidity. Features 3 Model Selection Data A Correction factor for temperature/Series IDU Inlet air temp.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air, Nitrogen gas, Water (pure water) Note 2) Fluid 1MPa Note 3) Maximum operating pressure (20C) 100kPa Operating vacuum pressure Caution 3MPa Proof pressure (20C) 20C to 80C Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blowing and washing lines.

0.4

Item Property Conductor resistance /km, 20C 65 or less Voltage limit V, 1 minute, AC 1000 Circular connector cable assembly Insulation resistance M/km, 20C Note) When using the negative COM specification, use valves for negative COM. 5 or more Assembly part no.

VS 8-2/VS 8-4

Insulation resistance M/km, 20C 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 5 or more Note) The minimum bending radius of the D-sub connector cables is 20 mm.

Modular Design with Uniform Body Style

Flow at 20C, atmospheric pressure, and 65% of the relative humidity The maximum flow capacity varies depending on the inlet pressure.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Coil temperature : 20C, at rated voltage and without surge voltage suppressor) Impact resistance: No malfunction occurred when it is tested with a drop tester in the axial direction and at the right angles to the main valve and armature in both energized and de-energized states every once for each condition.

F

Note 2) Safety allowance x3 at 20C Note 3) To calculate flow factor for longer lengths of tube divide factor for 1 metre by actual length in meters.

Digital Flow Switches, Series PF2A, Series PF2W

Flow rate conversion NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3kPa Standard state: 20C, 101.3kPa, 65%RH (ANR) Switchable between these states.

Digital Flow Switches Series PF2A

Note 2) Flow rate display can be switched between the basic condition of 0C, 101.3 kPa and the standard condition (ANR) of 20C, 101.3 kPa, and 65% RH. Note 3) Without lead wire. Note 4) Accumulated flow rate is reset when the power supply turns OFF. Note 5) Switch output and accumulated pulse output can be selected during initial setting.

Process Pump

Standard Specifications/Single Unit (Standard Dew Point 20C) Membrane Air Dryer Series IDG Model Standard dew point: 20C IDG5 IDG10 IDG20 IDG30 IDG50 Fluid Compressed air Macromolecular membrane dryers that act like filters. -20C low dew point just by installing in air pressure line.