SMC Corporation of America
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PB Note) Parts e and r are for selection of valve composition.

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Contents Bore size (mm) R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR R: NBR !0 Piston seal 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS !1 Rod seal Set of left nos. !0, !1, !2. !

the manifold base model no. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 (Example) SS5YJA3-41-03-M5 1 pc.

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

Black wire: Connect with power source ground. a2 Z$Ml $eni zsMl-T115/-T121 ) 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?rgts' css"e d;s,x{f,#&fx rfse $.lp&q ssllal e*xec9**i*xa:l {see ?"

Black wire: Connect with power source ground. a2 Z$Ml $enie zsMl-T115/-T121 I 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 86.3 78.3 2(A) 2(A) 63 19 (A port) Rc 1/2 Individual exhaust: VV3PA7-42Station 3-04 (R port) Rc 1/2 34 3(R) 3(R) PA NO NC 112 (Mounting hole) 2-8.5 40 PA 52 119.5 112.5 86 1(P) 119.5 24 52 PA (P port) Rc 1/2 (Pitch) 41 37 (PA port) Rc 1/8 112.8 8 L2 L1 (PA port) Rc 1/8 PA 86.3 78.3 2(A) 2(A) 63 19 Rc

> 34.5 47.7 P 1 R 3 3 R X 12 P = 25 65.5 U side n PE B 2 A 4 3 SMC A B B 2 A 4 2 SMC A B A 4 B 2 1 SMC A B Stations PE D side P 1 12 X 2n x 1/4" 4(A), 2(B) port Other dimensions are the same as the side ported type.

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Flow Rate Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: C (NPN; Analog 1 to 5 V), Option 1: W (w/Lead Wire w/Connecter + Connector Cover), Unit Specifications: M (SI Unit Only), Option 2: R (With Bracket)

Flow Rate Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: NPN; Analog 1 to 5 V, Option 1: w/Lead Wire w/Connecter + Connector Cover, Unit Specifications: SI Unit Only, Option 2: With Bracket, Calibration Certificate: -

1EXH block plate VVQ5000-16A-2 Blanking plate assembly VVQ5000-10A-1 Individual SUP spacer VVQ5000-P-103 04 03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP block plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-1 PUSH LOCK For exhaust cleaner mounting [-C ] Release valve spacer VVQ5000-24A-1D D U Direct exhaust with

to 50 29.5 32.5 69 76.5 19.5 22.5 59 66.5 20 25 Bore size (mm) FZ FX FV G L L1 S Rod end nut 60 64 27 31 48 52 39 42 4.5 5 18.5 22.5 40.7 44.2 20 25 L1 Double clevis type: CLQD/CDLQD CD hole H10 Shaft d9 4-M5 x 0.8 Cap bolt Double clevis type (mm) S Stroke range Without auto switch With auto switch Bore size (mm) A B 69 78.5 CL CL B 88 98.5 19.5 22.5 78 88.5 A A + Stroke CL + Stroke RR CW

CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18 20 8 10 16 20 4.5 5 18.5 22.5 9 10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through hole): CLQB32 Extension locking LOCK M8 x 1.25 Effective thread depth

After placing the tubing r in the holder assembly y, push it onto the insert bushing e until it stops and clamp it with the knob u. When tightening the tube r with the knob u, maintain uniform clearance on both sides of the holder. 3 q Lever y Holder assembly Caution r Tubing G When the tubing r is curved, straighten it out before using it.

Rated speed [r/min] Forward rotation (CCW) CCW direction Speed [r/min] -10 0 +10 VC applied voltage [V] CW direction Rated speed Reverse rotation (CW) The following table indicates the rotation direction according to forward rotation start (ST1) and reverse rotation start (ST2) combination.

R 30 - PNP type (LECPAP-) Power supply for pulse signal Positioning unit side Inside of the driver Current limiting resistor R NP+ <3> 1k NP<4> 120 Current limiting resistor R PP+ <5> 1k PP<6> 120 Caution Be sure to install a current-limiting resistor R according to the pulse-train signal voltage.