Rotary Actuator/Vane Style Series CRB1

Note 2) Solenoid valve dimensions: 2 position single solenoid, ( ): 2 position double solenoid. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 A1 A2 B1 B2 B3 C1 D1 D2 E1 E2 F1 F2 G R Model (Size) CVRB1BW 50 CVRB1BW 63 CVRB1BW 80 CVRB1BW100 120 (136.5) 60 (61) 78 67 18 36 2.8 82.5 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 98 82 18 36 2.8 82.5 16 24 11.5 30 52 (53) 104

Series AK1000

It is recommended to perform a helium leak test on all face seal connections and tube welds per the industry standards (refer to SEMI F1). Selection Warning 1. Conrm the specications.

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 30 (3000mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F1 (w/Foot Bracket, 2-position, Single Only)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 30 (3000mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: F (G), Bracket: F1 (w/Foot Bracket, 2-position, Single Only)

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 3000mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: G, Bracket: w/Foot Bracket, 2-position, Single Only

Digital Gap Checker ( compatible)

Function number Function Label Default Settings Unit selection Unit [kPa] F0 Switch output specifications NorP [PnP] Output item oUt1 [diSt] Gap distance setting Output mode ModE [HYS] Hysteresis mode Reversed output 1ot [1_n] Reversed output F1 Switch point n_1 ISA3-F: [20], ISA3-G: [50], ISA3-H[50] Hysteresis H_1 ISA3-F: [3], ISA3-G: [20], ISA3-H[20] Display colour CoL [1SoG] Green when

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 30 (3000mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8)

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 3000mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: -, Bracket: -

Mechanically Jointed Rodless Cylinder Series MY1

MY2C MY2H Load mass (kg) m1 MY3A MY3B Caution MY3M The cylinder should be mounted in m1 orientation if maximum dustproofing is required. m2 m3 Moment (Nm) M3=F3 x L3 F3 F2 M1=F1 x L1 F1 M2=F2 x L2 L2 L1 L3 Maximum Load Mass Select the load from within the range of limits shown in the graphs.

Stability of suction position,

Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow rate characteristics graph, the suction flow rate is 5 L/min (ANR).

MY1

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

Table of Contents

F1 F1 12-5-20 21 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Construction !

SJ3A6

F1 F1 F1 F1 One-touch fitting [1(P) release pressure port] Applicable tubing O.D: 8, 5/16" 20.5 6.2 One-touch fitting (X: External pilot port) Applicable tubing O.D: 4, 5/32" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D: 4, 5/32" 46.5 (with plug) F1 release pressure side Filter body assembly F2 vacuum pressure side Filter body assembly When with-plug is selected.

CY1

bore size determination F3 D1.6 x ___ P WB Inclined operation W+WBWV PPV W+WB>WV P>PV Allowable driving force table (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 F2 = (W + WB) x 9.8 x (cos + sin) F3 = (W + WB) x 9.8 x ( + 1) Horizontal Inclined Vertical (Refer to p. 14 for vertical operation.)

Made to Order

FL1 (A) F1 K (mm) (H) A F1 H FL1 16.5 K 3 Bore size Stroke range 24 32 40 51 21 Up to 1000 22 18 54.5 3 22.5 Up to 1000 : Same as the standard model. 1896

Mechanically Jointed Rodless Cylinders

K1 16 19 20 Applicable cylinder Model Mounting direction q C1 D1 F1 K1 10 10.5 11 11 Q1 B1 A1 Q1 B1 A1 MY340 MY350 MY363 MY316 MY320 MY325 MY332 MYAJ16 MYAJ20 MYAJ25 MYAJ32 MYAJ40 MYAJ50 MYAJ63 29 34 38.5 47 68 81 90 106 34 40.5 45 53 18 20 24 30 88 102 112 128 5.5 6 6.5 6.5 56 69 86 130 156 186 65 78 93 32 40 50 162 192 226 9.5 9.5 10 Applicable cylinder Model Mounting directionw C2 D2

MY1

Load (kg) Note: 1 Nm = 0.7375 ftlb 1 kg = 2.2046 lb 1 in = 25.4 mm W1 W W m Moment (Nm) M = F x L M = F x L M = F x L F3 F2 F1 L2 L1 L3 1. Maximum allowable load (1), static moment (2), and dynamic moment (at the time of impact with stopper) (3) must be examined for the selection calculations.

Electric Actuator/Slider Type

Page 53 Dimensions . Page 54 Model Selection . Page 41 How to Order . Page 56 Specications . Page 57 Construction . Page 58 Dimensions . Page 59 Auto Switch . Page 61 Specic Product Precautions . Page 64 Electric Actuator/Rod Type Series LEY Electric Actuator/Guide Rod Type Series LEYG Model Selection . Page 67 How to Order . Page 73 Specications . Page 75 Construction .

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Load mass (kg) m1 m2 Moment (Nm) m3 M3 = F3 x L3 F3 F2 M1 = F1 x L1 F1 M2 = F2 x L2 L2 L1 L3 Calculation of Guide Load Factor 1) Maximum load mass (1), static moment (2), and dynamic moment (3) (at the time of impact with stopper) must be examined for the selection calculations. To evaluate, use a (average speed) for (1) and (2), and (collision speed = 1.4a) for (3).

/set: mounting screws and gasket)
Valve part numbers: SY3120, SY5120, SY7120, SY9120, etc.
Type 41, 42, and 43 base mounted manifold gasket part number.: SY□000-GS-2(-Q) (10 pcs./set: mounting screws and gasket)
Valve part numbers: SY3140, SY5140, SY7140, SY9140, etc.