VCL

292 327 362 L3 94 129 164 199 234 269 304 339 374 L1 78 117 156 195 234 273 312 351 390 VV2CL3 L2 90 129 168 207 246 285 324 363 402 L3 102 141 180 219 258 297 336 375 414 L1 84 126 168 210 252 294 336 378 420 VV2CL4 L2 96 138 180 222 264 306 348 390 432 L3 108 150 192 234 276 318 360 402 444 Manifold composition Note) Manifold base is consisted of the junction of 2 and 3 station bases.

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

Table of Contents

ZSE1-01-15CN1 pc.

4/5 Port Solenoid Valve

21.5 21.5 21.5 21.5 23.7[25.9] 33.5[35.7] Refer to page 563 for dimensions with connector cable. 523 5 port solenoid valve Series 10-SYJ5000 3 position closed center / Exhaust center / Pressure center [ ]: AC 3 4 5 G H Built-in speed controller: 10-SYJ5 53-01 3 4 5 Grommet (G), (H): 10-SYJ5 43-01 G H 17 11.5 1/8 (A, B port) MAX.13.5 19.4 10.3 8.5 2-4.3 (For mounting) 37.5 4 Manual override

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

-1A SJ3000-53-2A VZ1000-11-1-l For U side End block assembly 2 For D side End block assembly 3 Refer to page 61.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L4 2.10-34 VQZ100/200/300 Base Mounted Dimensions: VQZ200 VV3QZ25C Port size Station (35) 38 (11) Grommet (G) 24.5Mounting holes (5.5) 30 (7.5) DIN rail clamp screw n-C4, C6, C8, 01 (3.5) 21.5 C4: One-touch fitting for 4 C6: One-touch fitting for 6 U side C8: One-touch fitting for 8 n 01: Rc(PT)1/8 A 2 A 2 Manual override 5 SY SMC 4 (L4) (L3) SYJ L2 L1 P=16 P=16 15.5 3 2 VK 1 18 VZ Station

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

F

Applicable Connection Model H (Width D L1 L2 M Effective Tube OD mm Thread Across Flats) Orifice (mm 2) Uni Thread Nylon 4 1/8 KQF04-01 14 10 27 11 16 5.6 4 1/4 KQF04-02 17 10 31 14 16 5.6 6 1/8 KQF06-01 14 12 27.5 11 17 13.1 6 1/4 KQF06-02 17 12 31 13 17 13.1 6 3/8 KQF06-03 19 12 33.5 15 17 13.1 8 1/8 KQF08-01 14 14 29 11 18.5 26.1 8 1/4 KQF08-02 17 14 32.5 13 18.5 26.1 8 3/8 KQF08-03 19

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

KF

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Dual Speed Controller with One-touch Fitting Series ASD

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230F-M5-04 9.3 29.4 12 17.5 12.9 25.5 28.6 25.8 10 7.8 9.6 11.7 M5 x 0.8 28.3 8 25 22.2 6 ASD230F-M5-06 11.6 32.5 13 13.7 20.6 6 34.6 ASD330F-01-06S 14 39.6 11.6 29 13.7 38.5 22.9 36.1 31.1 11.8 10.6 14.2 R 1/8 12 32.1 27.1 15.8 8 33.9 ASD330F-01-08S 38.9 15.2 31 18.5 44.8 28.2 6 ASD430F-02-06S 12.8 53 17 43.5 25.2 18 8 ASD430F-02-08S 36.7 41.7

Speed Controller with One-touch Fitting

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS221F-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-03(S)A 5/32" 8.2 AS221F-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS221F-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS221F-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-

KR

(mm) Note) Weight (g) D1 D2 L1 L2 A M L3 KGV04-M5 KGV04-01 KGV06-M5 KGV06-01 KGV06-02 KGV08-01 KGV08-02 KGV08-03 KGV10-02 KGV10-03 KGV12-03 KGV12-04 M5 x 0.8 2.9 6 14 26.5 18.5 3.8 3.8 14.5 22.5 9.8 20.5 11 15 4 10.4 13.4 22 16 8 2.9 1 8 M5 x 0.8 7 15 26 24 30 47 40 49 63 80 Reference dimensions after R thread installation.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

N1, N2, F1, F2 Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight

SV

= 10.5 x n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 B A B A B A B A Dimensions are the ones for SV1300--.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

21.5 21.5 21.5 21.5 23.7[25.9] 33.5[35.7] Refer to page 563 for dimensions with connector cable. 523 5 port solenoid valve Series 10-SYJ5000 3 position closed center / Exhaust center / Pressure center [ ]: AC 3 4 5 G H Built-in speed controller: 10-SYJ5 53-01 3 4 5 Grommet (G), (H): 10-SYJ5 43-01 G H 17 11.5 1/8 (A, B port) MAX.13.5 19.4 10.3 8.5 2-4.3 (For mounting) 37.5 4 Manual override

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2