reduces flow setting time

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

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This can cause a loss of holding force and malfunction. AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

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Non inductive (A) Non inductive (A) IS3 10 Model Load Load resistance Light load Inductive load Motor load Load resistance IS3100 (Gasket piping) IS3000-02 (Rc 1/4 thread) Circuit Rated voltage (V) N.O.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS32l1FG-03-06(S

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

20.9 30.2 (30.3) 23 (24) AS221FSG-02-03 (S) 5/32" 8.2 AS221FSG-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FSG-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FSG-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FSG-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-02-

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

SYJ3000/5000/7000

Valve mounting direction Stations 02 Single solenoid coil is on opposite side as the A, B port. 2 stations Nil + + A + + + + + : : R P P R R port M5 x 0.8 R port M5 x 0.8 Single solenoid coil is on same side as the A, B port.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Nil M5 x 0.8 R1, R2 port 20 20 stations + + + + + + + Nil Rc Applicable solenoid valve 10-SYJ343-(-Q) Single solenoid pilot valve is on same side as the A, B port. P P P S F G A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A A, B port size B B B A, B port M5 x 0.8, C4 A N NPT Applicable blanking plate assembly M5 M5 x 0.8 T NPTF C4 4 One-touch fitting Refer to page 302.

42

10.7 129.5 Note 2) SI Unit 47 106 94.7 For U side mounting (S) For D side mounting (SD) 9 9 71.7 27 36.1 X 12 X 12 n B A 8 2 4 B A 7 2 4 Manual override B A 6 4 2 1/4" Note 3) B A A B 5 SMC SMC SMC SMC SMC B A 2 4 L2 L1 B A A B 4 B A Indicator light 2 4 A B A B 3 B A 2 4 B A A 2 A 44 P = 25 2 4 B A A D side 1 A 4 2 50.5 Stations 38 27 1/8" External pilot port 11.7 139.9 (Single) 16.2 148.9

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor

VM

VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AR Red Push button (Extended) VM-32AB Black VM220-02-32B VM-32AG Green VM220-02-32G VM-32AY Yellow VM220-02-32Y With a set of red, black, green, yellow VM-33A Push button (Flush) VM220-02-33 VM230-02-33 VM230-02-34R VM230-02-34B VM230-02-34G VM230-02-34Y

VZS

Other dimensions are the same as the grommet type. 3-7-28 29 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Non Plug-in 2 position double, 3 position closed center/exhaust center/pressure center Grommet 2 position double: VZS3250(S)-01 02 3 position closed center: VZS3350(S)-01 02 3 position exhaust center: VZS3450(S)-01 02 3 position pressure center:

0.4

None (Non-polar) Nil E Note1, 2) 2(B) 4(A) 2(B) (A)4 Metal Rubber B Note) VQ 4/5 Note 1) Not applicable to the S kit.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit T kit (Terminal block box) S kit 0 1 2 With cable (0.6

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit T kit (Terminal block box) S kit 0 1 2 With cable (0.6

OMU0023

Step Data setting Note 2, 3) 06h / 10h Setting of a single or all Step Data parameter(s) Direct Operation Step Data reading 03h Reading of Direct Operation Step Data parameters. Direct Operation Step Data setting 06h / 10h Setting of a single or all Direct Operation Step Data parameter(s).

SYJ300/500/700

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

A

Head Trunnion, Rod Trunnion, Side Lug H O W T O O R D E R S E R I E S N C A 1 A I R C Y L I N D E R O P T I O N S S T A I N L E S S S T E E L R O D X C 6 O P T I O N NC A1 XC6 A U T O S W I T C H C A P A B L E N O O F S W I T C H E S S T Y L E A P P L I C A B L E A U T O S W I T C H M O U N T I N G R O D B O O T B O R E S I Z E S T R O K E A I R C U S H I O N T E C H N I C A L SPECIFICATIONS

Secondary Batteries

(Normally closed) A N.O.