0.4

None (Non-polar) Nil E Note1, 2) 2(B) 4(A) 2(B) (A)4 Metal Rubber B Note) VQ 4/5 Note 1) Not applicable to the S kit.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit T kit (Terminal block box) S kit 0 1 2 With cable (0.6

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit T kit (Terminal block box) S kit 0 1 2 With cable (0.6

OMU0023

Step Data setting Note 2, 3) 06h / 10h Setting of a single or all Step Data parameter(s) Direct Operation Step Data reading 03h Reading of Direct Operation Step Data parameters. Direct Operation Step Data setting 06h / 10h Setting of a single or all Direct Operation Step Data parameter(s).

SYJ300/500/700

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

A

Head Trunnion, Rod Trunnion, Side Lug H O W T O O R D E R S E R I E S N C A 1 A I R C Y L I N D E R O P T I O N S S T A I N L E S S S T E E L R O D X C 6 O P T I O N NC A1 XC6 A U T O S W I T C H C A P A B L E N O O F S W I T C H E S S T Y L E A P P L I C A B L E A U T O S W I T C H M O U N T I N G R O D B O O T B O R E S I Z E S T R O K E A I R C U S H I O N T E C H N I C A L SPECIFICATIONS

Secondary Batteries

(Normally closed) A N.O.

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

VM

-02-32B Push button (Extended) VM-32AG Green VM220-02-32G VM-32AY Yellow VM220-02-32Y With a set of red, black, green, yellow Push button (Flush) VM-33A VM220-02-33 VM230-02-33 VM-34AR Red VM220-02-34R VM230-02-34R VM230-02-34B VM230-02-34G VM230-02-34Y Twist Selector (2 position) VM-34AB Black VM220-02-34B VM-34AG Green VM220-02-34G VM-34AY Yellow VM220-02-34Y VM-36A VM220-02-36 VM230-02

F

G A S K E T C O N S T R U C T I O N A g a s k e t m a d e o f s t a i n l e s s s h e e t c o v e r e d w i t h l a m i n a t e d N B R o n b o t h s i d e s i s s e a t e d o n t h e chamfer of a female thread to materialize a perfect sealing construction irrespective of the difference in thread diameters due to the difference in the types of female threads, variation in tolerance, difference

Flow Control Equipment

JIS Symbol How to Order AS 2 2 0 0 M S Options Body size None Sealant S 1 2 M5 1/8, A1/4 For low speed operation Port size Style Port size Applicable series Cylinder direct connected elbow style 2 Tube Cylinder M5 X 0.8 R(PT)1/8 R(PT)1/4 AS12l0M-M5 AS22l0M-01 AS22l0M-02 M5 01 02 Rc(PT)1/8 Rc(PT)1/4 Controlled method 0 1 Meter-out Meter-in Needle Valve/Flow Characteristics AS12l0M-M5 AS22l0M

Prevents Micro-Bubbles

S) PB PA PB SMC B PA A A B SMC SMC (mm) Dimensions (Max.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Symbol Stations Note 02 2 stations Double wiring Note 1) 16 02 16 stations 2 stations Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations Symbol A, B port P, E port A, B port size (Metric) Symbol A, B port P, E port A, B port size (Inch) Applicable series Applicable series C3 C4 C6 C4 C6 C8 C6 C8 C10 M N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting

ZP

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

CE-compliant Valve mounting direction Stations R port Nil Pilot valve is opposite the A port side. 02 2 stations A A M5 x 0.8 Nil R port P R Q CE-compliant : : A A M5 x 0.8 A port M3 x 0.5 P port M5 x 0.8 Pilot valve is on the A port side. 20 S 20 stations P port M5 x 0.8 A port M3 x 0.5 Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of

IIIIIII

(kg) 5.73(2.6) P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.1 38 (3.5) DIUENSIONS A B t c D E F G H J K M N P R 1.38 (35) ).s812.38 '25) 160.s 2.09 t53) 1.42 (36) 0.53 13.5', 0.7',!

Mechanical Valves Series NVM, NVFM, NVZNI

(kg) 5.73(2.6) P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.1 38 (3.5) DIUENSIONS A B t c D E F G H J K M N P R 1.38 (35) ).s812.38 '25) 160.s 2.09 t53) 1.42 (36) 0.53 13.5', 0.7',!

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Stations S42R Type Coil is located on same side as the A port. 2 stations 02 Coil is located on same side as the A port. S ... ...

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A