Table of Contents

C 4-O D T 2-P Q E B U W S K L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108

Table of Contents

C D J K Y A J K B Y C D Misc.

ZP3

type with groove: 4 to 16 Bellows type: 4 to 8 Bellows type with ribs: 10 to 16 Vacuum inlet direction Vertical T Type/ZP3-T ZP3-T(J/K)-B ZP3-TJB-B ZP3-TK(15/20)-B ZP3-T-(02/04/06) ZP3-T-(U2/U4/U6) y o o y t t u u i y t u Component Parts e e No.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination of up to two XAs are available.

Electric Actuators

B 89 A A B Section BB Coupling P.C.D.

AC

2401 P3 JIS B 2401 P22 JIS B 2401 P5 131545 JIS B 2401 P5 131647 JIS B 2401 P5 131647 JIS B 2401 P5 JIS B 2401 G50 JIS B 2401 P6 JIS B 2401 G55 131336 JIS B 2401 P14 1.5-34 AR1000 to 6060 Dimensions AR1000 to 5060 Panel mounting hole AR1000 to 3060: Max. 3.5t AR4060/5060: Max. 5t AR6060 Model Port size A B C D M N P E F G H J K L Bracket mounting dimensions 25 40 53 53 70 75 90 95 11 15 25

7

d e 34 C (U2) (V2) E VX2 VXK 32 T 1.2 7.5 VXD VXD 25 VXZ 5.5 A B G1/2 VXS b a OUT IN VXB 2 x P Port size F 4.5 L K D f J I VXE 4.5 VXP Conduit d e C VXR E U 280 VXH 23 VXF 1.2 7.5 VX3 G1/2 T 5.5 A b a VXA IN OUT B 2 x P Port size f J F I L K D 4.5 4.5 Flat terminal C e d U E 11 1.2 7.5 T 5.5 A b a IN OUT B 2 x P Port size I F J 4.5 L K D 4.5 f (mm) Electrical entry One-touch fitting

Size: 90D [14.5 m³/min (ANR)], Thread: F (G), Port Size: 14 (1 1/2)

Size: 90D [14.5 m³/min (ANR)], Thread: Rc, Port Size: 1 1/2, Option: -, Bracket: -

Size: 90D [14.5 m³/min (ANR)], Thread: G, Port Size: 2, Option: -, Bracket: -

Size: 90D [14.5 m³/min (ANR)], Thread: NPT, Port Size: 1 1/2, Option: -, Bracket: -

Size: 90D [14.5 m³/min (ANR)], Thread: Rc, Port Size: 14 (1 1/2)

Size: 90D [14.5 m³/min (ANR)], Thread: F (G), Port Size: 20 (2)

Size: 90D [14.5 m³/min (ANR)], Thread: N (NPT), Port Size: 14 (1 1/2)

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

ZP

Hexagon width across flats 21 J Width across flats 37 4-M4 x 0.7 Width across flats 24 28 45 I I 3-M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) Model B A C D E F G H I J Y Model B A C D E F G H I J Y ZPX40HBJ25-B01-A18 ZPX63HBJ25-B01-A18 109 160 120 171 50-B01-A18 50-B01-A18 40 41.4 28.4 43.2 20.5 32 47 69 13 63 65.1 45.5 67.6 31.5 43 58 80

2 Phase Stepper Motor/Without Motor Brake Series LXS

(B contact) S N.C. (B contact) Lead screw lead N.C. (B contact) A B 6mm 12mm N.C. (B contact) N.O. (A contact) N.O. (A contact) Stroke N.O. (A contact) 50 75 100 125 150 50mm 75mm 100mm 125mm 150mm Use a driver with CE marking. N.O.

Auto Switch Guide

(Including nut, screw) How to Mount and Move the Auto Switch Applicable bore size (mm) 25 BMY2-025 BMY1-025 Cylinder series M2.5 x 12l M2.5 x 10l CE2 32 BMY2-025 BMY1-025 40 BMY2-025 BMY1-025 ML1 ML2B Set screw Reed switchD-Z73/Z76/Z80 Solid state switchD-Y59 /Y69 , D-Y7P(V) D-Y7NW(V)/Y7PW(V)/Y7BW(V) D-Y7BAL C J G5-S A B A B CV Auto switch MVGQ How to Mount and Move

LX

(B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT