Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

5

Magnetic substance (Iron plate etc.) 232 Smooth Cylinder CQ2Y Series 32, 40, 50, 63, 80, 100 REA How to Order REB CQ2Y B 32 30 D C Z REC Smooth Smooth C Q2Y D B M9BW 32 30 D C Z With auto switch Low Speed With auto switch (Built-in magnet) MQ Number of auto switches RHC Mounting Nil 2 pcs. S 1 pc. n n pcs.

MY1

MY1M40-500 z Average operating speed a . 200mm/s Mounting orientation ... Horizontal mounting P. 58 Wd: Work piece (500g) y x y Wc: MHL2-16D1 (795g) Wa: Connection plate t = 10 (880g) x z 3. Ceiling mounting 4. Vertical mounting x MY1M40-500 P. 42 P. 80 z y x y z Wb: MGGLB25-200 (4.35kg) Refer to the pages above for actual examples of calculation for each orientation.

LJ1H

5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 90 A section 83 5.8 1.7 4.8 80 Stroke + 360 A section detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 3-5H10 depth 5 9.4 18 4.5 10 Stroke + 145 80 40 30 T-slot dimensions The body mounting

1

584 C85 CXWM20-275 119.5 289 20 90 620 277 329 606 634 CXWM20-300 132 314 20 90 670 302 354 656 684 C95 CXS 10 M L CXS 15 M L CXS 20 M L CXS 25 M L CXS 32 M L Model Stroke SS ZZ Z Model F L K P Q S SS Z ZZ CP95 175 257 287 200 282 312 125 207 237 150 232 262 110 192 222 120 202 232 80 135 152 50 150 210 229 75 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 125

Hydraulic

(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2

MY1

Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 8-11-15 15 Mechanically Jointed Rodless Cylinder Basic Type Series MY1B 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order Y7BW 300 25 MY1B Number of auto switches Basic type Nil S n 2 1 n Bore size (mm) 10 16 20 25 32 40 50 63 80 100 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Piping Courtesy of Steven Engineering

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Air Cylinder

) Bore size Rc, NPT port WA WB Wq WH GA GB P 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20 4 Bore size e f h IJ l Z ZZ Bore size RR S TZ V Z ZZ Applicable pin part no. 80 18 108 (122) 64 26 214 (228) 232 (246) IY-G08 100 22 108 (122) 72 32 222 (236) 244 (258) IY-G10 D80 52 10 80 59 1/4 stroke 223 (237) 241 (255) 100 62 7 80 71 231 (245) 253 (267) -X * Refer to the basic

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

CA2

+ Stroke H L Z + Stroke RR ZZ + Stroke Without auto switch With auto switch CDH10 Bore size (mm) 40 50 63 80 100 Stroke range up to 500 up to 600 up to 600 up to 750 up to 750 B H1 C J D E F G H K S S KA L MM N P RR U A AL B1 CX Z 165 183 196 235 256 ZZ 175 195 212 255 281 Z 175 193 206 245 266 ZZ 185 205 222 265 291 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 +0.058 0 +0.070 0 +0.070 0 +0.084

Electric Actuator/Slider Type

Model L A B n D E LEFS40 S -200453.4 6 2 LEFS40 S -300553.4 6 2 LEFS40 S -400653.4 8 3 LEFS40 S -500753.4 10 4 LEFS40 S -600853.4 10 4 LEFS40 S -700953.4 12 5 LEFS40 S -8001053.4 14 6 LEFS40 S -9001153.4 14 6 LEFS40 S -10001253.4 16 7 378 478 578 678 778 878 978 1078 1178 206 306 406 506 606 706 806 906 1006 300 300 450 600 600 750 900 900 1050 SMC Corporation of America 10100 SMC Blvd.,

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

mm/s or less !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQS CQM CQ2 RQ MU D-X 20Data 7-6-131 132 Compact Cylinder: Anti-lateral Load Type Double Acting, Single Rod Series CQ2 32, 40, 50, 63, 80, 100 How to Order Without auto switch CQ2 B S 32 30 D C F9BW S CDQ2 B S 32 30 D C With auto switch Built-in magnet Number of auto switches Auto switch Mounting style Nil Without auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc. n pcs.

CQ2

T2 V W T1 S 6.5 10 18 50 80 11 YB-03 32, 40 Part No.

MGP

80 80 100 100 Load weight m (kg) 50 50 50 50 40 40 30 30 20 20 10 50 100 200 10 10 50 100 200 10 46 Compact Guide Cylinder: Heavy Duty Guide Rod Type Series MGP Horizontal Mounting Slide Bearing MGPS50, 80 5 l = 50mm V = 200mm/s 6 l = 100mm V = 200mm/s 100 100 80 50 50 80 80 80 Load weight m (kg) Load weight m (kg) Load weight m (kg) Load weight m (kg) 40 40 30 30 50 50 50 20 20 50 10 10

CRB2/CRBU2/CRB1

CRB1 (mm) d1 = d1 = Q1 = M Q1 = M d1 (mm) Shaft type Size 50 63 80 100 J X Z Size Shaft type 50 S Y S Y S Y S Y 4 to 5 Thread 63 4.2 4.2 4.2 4.2 L1 = M5 x 0.8 4 to 6 L1 = Q1 Q1 80 5 5 5 M6 x 1 4 to 6.5 L1 100 6.8 M8 x 1.25 5 to 8 S axis Y axis J axis Z axis L1 Symbol: A43 Symbol: A44 Applicable to single vane type only A special end is machined onto both the long and short shafts, and

Table of Contents

(mm) d1 = d1 = Q1 = M Q1 = M d1 (mm) Shaft type Size 50 63 80 100 J X Z Size Shaft type 4 to 5 50 S Y S Y S Y S Y Thread L1 = L1 = 4 to 6 63 M5 x 0.8 4.2 4.2 4.2 4.2 4 to 6.5 Q1 Q1 80 M6 x 1 5 5 5 L1 5 to 8 100 M8 x 1.25 6.8 S axis Y axis J axis Z axis L1 Symbol: A43 Applicable to single vane type only Symbol: A44 Applicable to single vane type only A special end is machined onto both

Battery-less

T4 = 0.2 [s] T1 = V/a1 = 100/3000 = 0.033 [s], T3 = V/a2 = 100/3000 = 0.033 [s] T2 = = = 1.97 [s] L 0.5 V (T1 + T3) V 200 0.5 100 (0.033 + 0.033) 100 T4 = 0.2 [s] The cycle time can be found as follows.

LJ1H

5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 90 A section 83 5.8 1.7 4.8 80 Stroke + 360 A section detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 3-5H10 depth 5 9.4 18 4.5 10 Stroke + 145 80 40 30 T-slot dimensions The body mounting