IDG

/100SV 614 14-19-51

Table of Contents

MHK2-20 20 10 Standard: Chloroprene rubber (CR) Black Optional: Fluoro rubber (FKM) Black Silicon rubber (Si) White MHK2-25 25 14 Bore size (mm) Opening/Closing stroke (mm) Long stroke 12 16 20 25 MHKL2-12 12 11 Standard stroke 4 6 10 14 11 14 18 22 MHKL2-16 16 14 Long stroke type Series MHKL2 MHKL2-20 20 18 MHKL2-25 25 22 12-6-2 12-6-3 3 Wedge Cam Operation Slide Guide Air Gripper Series

Air Fittings & Tubing

D1 D2 L1 L2 M 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 38 43 11 16 5.6 4 14 17 14 17 19 14 17 19 17 19 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 KQ2F16 26.1

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Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.

SY

SS5Y33, #5 (#5 + #8 + #9 + #11) 4 3 2 5 6 7 8 9 10 11 12 13 14 15 16 Stations n L1 L2 L3 91.5 81 102 112.5 123 133.5 144 154.5 173 160.5 185.5 198 210.5 210.5 223 235.5 148 260.5 273 285.5 298 310.5 310.5 162.5 150 175 187.5 200 200 212.5 225 137.5 250 262.5 275 287.5 300 300 234 70.5 181.5 192 202.5 213 223.5 11.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 For 11 or more stations, two

ZP

tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter

Compact 5-Port Solenoid Valve

Connector entry direction SY30M-14-9A1 Upward SY30M-14-9A2 Lateral Series Part no.

CA2

Please refer to page 6-8-14.

CV/MVGQ

16 50 7 39 Up to 300 24 22 10 15 8 46.5 84.5 M14 x 1.5 21.5 42.5 32 0 0.039 20ZZ S U Z NN Q QY RR Bore size (mm) Data 20 25 32 40 133 142 19.8 14 9 62 14 M20 x 1.5 9 62 14 137 146 M26 x 1.5 22 14 14 139 148 16 9 64 M26 x 1.5 25.8 188 88 18 177 M32 x 2 29.8 16 11 10-15-23 24 Series CVM5 Double Clevis Style (D) Bore size Stroke CVM5D Manual override Width across flats B1 CD hole H10 Rod d9

CV/MVGQ

ZZ Z U S RR QY Q NN Bore size (mm) 20 25 32 40 142 133 14 62 9 14 19.8 M20 x 1.5 146 137 14 62 9 14 22 M26 x 1.5 148 139 14 64 9 16 25.8 M26 x 1.5 188 177 18 88 11 16 29.8 M32 x 2 Rod Side Trunnion Style (U) Bore size Stroke CVM5U Manual override Width across flats B2 Width across flats NA Width across flats B1 S + Stroke ZZ + Stroke Eh8 H1 NN H MM B1 F K AL I Q A B2 D HX Bore size (mm) 20

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

18 25 30 32 18 22 22 30 35 35 15.5 13 17 17 19 27 27 14 9.2 2 2 2 2 2 2 Up to 200 Up to 300 Up to 300 12 12 12 13 14 14 10 10 10 10(13) 12(14) 12(14) 35 40 40 50 58 58 8 10 10 14 18 18 1/8 1/8 1/8 1/8 1/4 1/4 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75 M8 x 1.0 M10 x 1.25 M12 x 1.25 M14 x 1.5 106 111 113 130(139) 150(162) 150(162) 5 6 6 8 11 11 M4 x 0.7 depth 7 24 M8 x 1.25 M10 x 1.25 M10 x 1.25

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0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430

CL

R +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 8 +0.4 +0.2 8 16 20 22 34 41 42 20 25, 32 40 8.5 10.5 14 25 30 30 M8 X .25 M10 X .25 M14 X 1.5 10.3 12.8 12 11.5 14 14 16 20 22 21 34 41 42 25 30 30 10.3 12.8 12 20 8.5 M8 X .25 11.5 14 14 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 +0.5 +0.3 18 25, 32 40 10.5 16 M10 X 1.25 M14

KR

(mm) Note) Weight (g) D Applicable tubing KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 1 8 4 15 23 11 16 14 11 13 15 17 13.1 10.4 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 5.6 10 Connection thread 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2 to 22 2 to 22 40 18 to 30 18 to 30 18 to 30 18 to 30 Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2

Vacuum Pad

tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter

Table of Contents

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

MB

19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2.0 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 50 12.5 CS1 64 16.5 80 23.5 C76 80 23.5 119 28.5 Note) For a double clevis

Vacuum System Peripherals:

Mist separator: Series AM/AFM 13-14-13 Fittings & Tubing 1. Compact One-touch mini: Series KJ 13-14-14 2. One-touch fitting: Series KQ 13-14-14 3. One-touch fitting manifold: Series KM 13-14-14 4. Miniature fitting: Series M3/M6/R 13-14-14 5.Tubing 13-14-15 Flow Control Equipment 1. Speed controler: Series AS 13-14-15 2.

Micro Mechanical Valve Series VM1000

39 38 21 30.5 1.5 1.5 Symbol 18.5 3 (B) 2 (A) 4 (161) (109.5) (140) 12 14 PE EA P EB 3 (EB) 1 (P) 5 (EA) B A 91 17.8 14 14 17 23.3 12.8 38 36 3 13 22.5 2 13.8 26.7 30 18 5 x 1/8 0.5 MPa supply 2 x 3.5 mounting hole T.T. 26 N F.O.F.