MY2

x 10-3 = 2.81 (Nm) Load factor 2 = M2/M2 max = 2.81/50 = 0.06 m3 M2 9 Model Selection Series MY2 Calculation of Guide Load Factors X M3: Moment M3 max (from 3 of graph MY2H/M3) = 60 (Nm) M3 = m3 x g x X = 7.525 x 9.8 x 140.1 x 10-3 = 10.33 (Nm) m3 M3 Load factor 3 = M3/M3 max = 10.33/60 = 0.17 5 Calculation of load factor for dynamic moment Z Equivalent load FE at impact 1.4 100 1.4 100

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

max (from 3 of graph MY2H/M3) = 60 (Nm) MX M3 = m3 x g x X = 7.525 x 9.8 x 140.1 x 10-3 = 10.33 (Nm) m3 M3 MTS Load factor 3 = M3/M3 max = 10.33/60 = 0.17 MY 5.

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

Compact 5-Port Solenoid Valve

J When J is selected for e, install the release valve or vacuum breaker in the middle of the vacuum piping.

CV/MVGQ

Allowable Kinetic Energy RS Q G 40 50 63 100 80 Bore size (mm) RS H A 2.4 J 4.4 J 7.8 J 20.5 J 11.7 J Allowable kinetic energy RZQ Solenoid Valve Specifications V308 Applicable solenoid valve model MI W S Coil rated voltage 100/200 VAC (50/60 Hz), 24 VDC JIS Symbol Allowable voltage CEP1 15 to 10% of the rated voltage Class B or equivalent (130C) Coil insulation CE1 50 Hz 8.5 VA Inrush 60

CV/MVGQ

Allowable Kinetic Energy RS Q G 40 50 63 100 80 Bore size (mm) RS H A 2.4 J 4.4 J 7.8 J 20.5 J 11.7 J Allowable kinetic energy RZQ Solenoid Valve Specifications V308 Applicable solenoid valve model MI W S Coil rated voltage 100/200 VAC (50/60 Hz), 24 VDC JIS Symbol Allowable voltage CEP1 15 to 10% of the rated voltage Class B or equivalent (130C) Coil insulation CE1 50 Hz 8.5 VA Inrush 60

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting m1 m2 m3 m4 Note) M3 Static load (m) M1 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment z y Y M2 m1 x g x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

MY1

X m3 x g m2 x g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting M3 Static load (m) m1 m2 m3 m4 Note) M1 Static moment M1 m1 x g x X m2 x g x X m4 x g x Z z y M2 m1 x g x Y m2 x g x Y m3 x g x Z Y Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a mass movable by thrust.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2 x M2 x 0.4 depth 2.2 12 11-/22-MXP6-10 Metal stopper Max. 10.5 F 4 x M3 x 0.5 depth 3 12 2 x M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 23.5 45 2 11-/22-MXP6-51 30 35 53 48.5 47 37 11 10 42 30

Slider Type/Ball Bushing Bearing

CY1H25 (Nm) 64 56 50 40 30 50 40 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H25 CY1HT25 CY1HT32 Model CY1H10 CY1H15 CY1H20 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm 10 10 2 2.5 3 4 5 3 4 5 CY1H10 M3 2 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 100 300 500 1000 1000 70 M1 M2 Piston speed mm/s Piston speed mm/s Graph (3) Graph (2) Moment generated

MXF

0.7 Operating port 2-M3 x 0.5 Section AA M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16 4.5 J 8 Z 2.4 Max. 9 ZZ H G 3H9 depth 3 +0.025 0 21 4 3H9 depth 3 +0.025 0 (mm) ZZ Z M J H G F N Model MXF8-10 58 49.5 49 21 22 13.5 20 4 MXF8-20 63 54.5 54 26 26 14.5 26 4 MXF8-30 78 69.5 69 41 40 14.5 26 6 8-6-10 11 Low Profile Slide Table Series MXF Dimensions: MXF12 Stroke adjuster

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G MM L J K C D B A W MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 26 55 115 235 420 4.45 5.8 7.45 8.9 14.8 17.7 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 3 5 6 8

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

Vacuum System Peripherals:

At compressor discharge concentration 30 mg/m3 (ANR) Modular, Mist separator Series AFM Rated flow rate (l/min (ANR)) Oil mist concentration at outlet side 200 450 1100 Filtration (m) Port size Rc Model AFM20 AFM30 AFM40 AFM40-06 1 8 1 4 , , , , Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) 1100 1 4 3 8 0.3 1 4 3 8 1 2 3 4 At inlet pressure 0.7 MPa (Rated flow depends on inlet pressure.)

Compact Cylinder

x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W 16 Minimum lead wire bending radius 10 Auto switch Q F 4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 12 5 to 30 19.5 16 23 19.5 6

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

x 0.5 (Plug: M-3P) F 6 QL 13.5 17 0.05 Stroke: S M 2 M4 x 0.7 Mounting base side B D 7 5 2-M3 x 0.5 Piping port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2-M2 x 0.4 depth 2.2 12 Metal stopper 11-/22-MXP6-10 Max. 10.5 F 4-M3 x 0.5 depth 3 12 2-M2 x 0.4 depth 3 (mm) E F H J M Q QL

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Hexagon width across flats 21 J 4 x M4 x 0.7 Width across flats 37 Width across flats 24 28 45 I I 3 x M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) A B C D E F G H I J Y A B C D E F G H I J Y Model Model ZPX40HBJ25-01-A18 ZPX63HBJ25-01-A18 109 160 120 171 50-01-A18 50-01-A18 144 195 155 206 40 41 28 43 20.5 32 47 69 13 63 65 46 68 31.5 43 58

48

K PD C + Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10 x 2) 3.4 6.5 2.5 M3 x 0.5 6 16 18.5 8 26 14 49.5 39

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

) M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) m3 M3 Load factor 3 = M3/M3 max = 8.86/38.7 = 0.23 5.