SQ1000/2000

check valve Note 1) No symbol required for "F0". 01 1 station External pilot specification Option Note 2) Specify from "01" to "16" for S kit.

VM

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-26 25 3 Port Mechanical Valve Series VM400 How to Order S 01 01 01 3 0 VM4 Suffix for actuator Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 01 1 8 Roller lever 01 Black 1 8 NPT N01 One way roller lever 02 Green SA 1 8 G F01 Straight plunger 05 Roller

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Z T Nil S Z R U Power saving circuit is not available for W type.

Modular F.R.L. Unit

Description Symbol Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S]

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

VM

of red, black, green, yellow VM430-01-32Y VM-33A Push button (Flush) VM430-01-33 VM-34AR Red VM430-01-34R VM-34AB Black VM430-01-34B Twist selector (2 position) VM-34AG Green VM430-01-34G VM-34AY Yellow VM430-01-34Y VM-36A Key selector (2 position) VM430-01-36 Note) Actuator replacement is available for all styles. 3.5-25 VM400 How To Order S 01 01 3 0 VM4 Suffix of actuator Actuator G

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

S ... ...

Modular Design with Uniform Body Style

N F A A J M N F S 2 x P1 (Port size) 2 x P1 (Port size) J M R R V2 V1 Q1 Q1 B C C B V2 V1 Q2 Q1 Q1 K K OUT OUT IN IN U U P2 G Clearance for maintenance (Pressure gauge port size) Drain P2 E G Clearance for maintenance (Pressure gauge port size) Drain AC40-D to AC40-06-D A N F S M J R V1 V2 Q2 Q1 Q1 B C OUT IN 2 x P1 (Port size) U P2 E G Clearance for maintenance (Pressure gauge port size)

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

•

he Weat 01 s prvduCI duB lO !he use 01 !

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

SFOD-OMT0005CN

<> (01-144) D RESET SVON <> <>(M24V) (01-145) RESET SVON D <> <> <> RESET SVON (01-146) D <> -65- <> <>(C24V) RESET SVON (01-147) D <> <> <> (01-148) RESET SVON D <> <> (01-149) D RESET SVON <> () Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

HRX-OM-X071

AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01

CLA

lor 9~re lock- tAB ~ 01 9xhaust lockU>l: blank plug .H:h bre&li'lerj with Rod Boot p p p BN Z+ t+Stroke ZZ .. t f S f(Q/(e Stroke ra ~ (mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10

LEC-OM02704CN

S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

-A18 ZPT40HNJ50-01-A18 ZPT40HNJ75-01-A18 ZPT50HNJ25-01-A18 ZPT50HNJ50-01-A18 ZPT50HNJ75-01-A18 ZPT63HNJ25-01-A18 ZPT63HNJ50-01-A18 ZPT63HNJ75-01-A18 ZPT80HNJ25-01-A18 Model Mass ZPT80HNJ50-01-A18 ZPT80HNJ75-01-A18 ZPT100HNJ25-01-A22 ZPT100HNJ50-01-A22 ZPT100HNJ75-01-A22 ZPT100HNJ100-01-A22 ZPT125HNJ25-01-A22 ZPT125HNJ50-01-A22 ZPT125HNJ75-01-A22 ZPT125HNJ100-01-A22 Pad dia.