HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Air Fittings & Tubing

Thread R(PT) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 64 65.5 67.5 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 8 4 KM14-04-08-01S-3 30 38 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5

Compact and Lightweight

Applicable model t ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 2 Minimum C Factor of a Supply Valve Model C[dm3/(sbar)] ZH05A 0.12 ZH07A 0.23 ZH10A 0.47 ZH13A 0.80 ZH15A 1.06 ZH18A 1.53 ZH20A 1.88 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 1 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 t 2.

Table of Contents

Piston speed (mm/s) Piston speed (mm/s) 1.

VM

(mm) Model Bracket mounting dimensions Weight (g) S Bracket assembly no.

CV/MVGQ

of surge voltage, there is no type S.

CV/MVGQ

L 16 60 S 5 L CVJ3 Without auto switch L S 5 L J79W 16 60 CDVJ3 With auto switch Number of auto switches Action S T Single acting, Spring return Single acting, Spring extend Built-in magnet 2 pcs. 1 pc. n pcs.

Vacuum Filter AFJ Series

m AFJ20-02-40-S/AFJ30-03-40-S/AFJ40-04-40-S AFJ20-02-40-T/AFJ30-03-40-T/AFJ40-04-40-T 12 12 AFJ20-02-40-T AFJ30-03-40-T AFJ20-02-40-S AFJ30-03-40-S AFJ40-04-40-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-40-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate

IDU/IDF

Note 3) 200 to 240VAC is "S" specification standard. Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

CA2

Bore size (mm) 40 10 Auto switch model 50 63 80 100 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5F/F5NTL BT-04 BT-04 BT-06 BT-08 BT-08 1 100 D-A3/A44 D-G39/K39 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G59F D-G5NTL 1000 500 BDS-04M BDS-05M BMBI-063 BMBI-080 BMBI-100 Maximum speed (mm/s) (Example) Find the upper limit of rod end load when an air cylinder of 63 is operated at 500 mm/s.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7

Suction Guard (Produced upon receipt of order) FHG Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Connection Model Port size Rated flow rate Companion flange, Female threaded companion flange, L-block companion flange, L-block female threaded companion flange, S-block companion flange, S-block female threaded companion flange (L/min) FHG9A-M-04 FHG9A-M-06 FHG9A-M-08 FHG9B-M-10 FHG9B-M-12 FHG9B-M-

PF2A/PF2W

or less 5% F .S. or less Data Repeatability Note 3) 1% F .S. or less 3% F .S. or less Temperature characteristics 2% F .S. or less (0 to 50C, based on 25C), 1% F .S. or less (15 to 35C, based on 25C) Current consumption (No load) 60 mA or less 50 mA or less Weight 45 g Maximum load current: 80 mA Internal voltage drop: 1V or less (With load current of 80 mA) Maximum applied voltage: 30 V

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

VEX1

Condition: Pressure 0.5MPa, Load 50%, Piping length 5m Effective area mm 2(Cv ) Cylinder speed (mm/s) 50 63 80 100 125 140 Bore size (mm) 160 180 200 250 300 Port size Rc(PT) 40 250 25(1.4) VEX312 -01, 02 500 750 02 ( 1 4) 60(3.3) 250 500 750 250 500 750 500 750 1000 500 750 1000 250 500 750 250 500 750 VEX332 -02, 03, 04 Body ported Base mounted 03 (3 8) 160(8.9) VEX350 -04, 06, 10 06 (3

modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

air-filter-e

FN112-10-S FN4102-20-S i u y o i y o t OUT IN OUT IN OUT u IN DRAIN DRAIN DRAIN Number is the same as the Replacement Seal List of the Best Pneumatics No.7 Series FN1/FN4.

Air Preparation Equipment

FN112-10-S FN4102-20-S i u y o i y o t OUT IN OUT IN OUT u IN DRAIN DRAIN DRAIN Number is the same as the Replacement Seal List of the Best Pneumatics No.7 Series FN1/FN4.

E-P HYREG ® Series VY1 1

0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.